74
L. Acosta-Soto and S. Hosseini
Table 3.1
(continued)
BioMEMS platform
Main components
Fabrication strategy
Mechanisms of
operation
Detected analyte
Specifics
Ref
3D microfluidic device
with embedded
micro-ball lenses array
• 3D multilayer
PDMS
• Solid micro-ball
lenses
A photolithography
process was used to
fabricate a SU-8 post
array on a silicon
wafer, which was
used to cast PDMS
microwells following
a soft lithography
protocol. Glass
microspheres were
spread on the surface
of the well array and
swept into them
A high-power laser
diode provided
fluorescence
excitation on cells
through a micro-ball
lens array. Multicolor
fluorescence emission
from cells were
collected by the same
micro-lens array and
imaged by a
high-speed CMOS
camera through
telescope optics
Live Mammalian
cells
The fluid flow
should be centered
in order to achieve
optimal uniformity
in signal detection
Fan et al.
(2013)
(continued)