1 History of Bio-microelectromechanical Systems (BioMEMS)
11
Table 1.1
(continued)
BioMEMS
platform
Year Scientist/authors/group Company/institution Country
Fabrication strategy
Application
Specific or
remarks
References
Chambers for
studying
microtubule
dynamics
1997 Timothy Holy et al
Princeton
University and Bell
Laboratories
United
States
Chromium (Cr) was
evaporated onto clean
coverslips, photoresist was
then exposed to UV through
a mask and developed. The
chromium was etched away
in the exposed areas, and
the glass was etched in
buffered hydrofluoric acid
(HF) to the desired depth
Cellular biology,
study of
diseases
involved with
cellular
structure
The low cost of
fabrication permits
its fast prototyping
and bulk
production,
nevertheless the
production
requires highly
corrosive and
toxic compounds
Holy et al.
(1997)
Microneedles for
drug delivery
1998 Sebastien Henry et al
Georgia Institute of
technology
United
States
A chromium masking
material was deposited onto
Si wafers and patterned. The
wafers were then loaded
into a reactive ion etcher
Painless drug
delivery systems
Microneedles are
long enough to
cross the
permeability
barrier but short
enough to avoid
stimulating nerves
Henry
(1998)
PDMS-based
Microfluidic
Systems
1998 David Duffy et al
Harvard University United
States
Master molds were
fabricated via
photolithography technique.
The replica molds were
made using glass posts
placed on the master and
casting PDMS to yield
elastomeric replicas, to
form enclosed channels. A
PDMS replica was sealed to
a flat slab of PDMS via
plasma treatment
Inexpensive and
easy BioMEMS
device
prototyping
The method was
rapid and cost
effective
Duffy
et al.
(1998)
(continued)
11
Table 1.1
(continued)
BioMEMS
platform
Year Scientist/authors/group Company/institution Country
Fabrication strategy
Application
Specific or
remarks
References
Chambers for
studying
microtubule
dynamics
1997 Timothy Holy et al
Princeton
University and Bell
Laboratories
United
States
Chromium (Cr) was
evaporated onto clean
coverslips, photoresist was
then exposed to UV through
a mask and developed. The
chromium was etched away
in the exposed areas, and
the glass was etched in
buffered hydrofluoric acid
(HF) to the desired depth
Cellular biology,
study of
diseases
involved with
cellular
structure
The low cost of
fabrication permits
its fast prototyping
and bulk
production,
nevertheless the
production
requires highly
corrosive and
toxic compounds
Holy et al.
(1997)
Microneedles for
drug delivery
1998 Sebastien Henry et al
Georgia Institute of
technology
United
States
A chromium masking
material was deposited onto
Si wafers and patterned. The
wafers were then loaded
into a reactive ion etcher
Painless drug
delivery systems
Microneedles are
long enough to
cross the
permeability
barrier but short
enough to avoid
stimulating nerves
Henry
(1998)
PDMS-based
Microfluidic
Systems
1998 David Duffy et al
Harvard University United
States
Master molds were
fabricated via
photolithography technique.
The replica molds were
made using glass posts
placed on the master and
casting PDMS to yield
elastomeric replicas, to
form enclosed channels. A
PDMS replica was sealed to
a flat slab of PDMS via
plasma treatment
Inexpensive and
easy BioMEMS
device
prototyping
The method was
rapid and cost
effective
Duffy
et al.
(1998)
(continued)