10
R. Garcia-Ramirez and S. Hosseini
Table 1.1
(continued)
BioMEMS
platform
Year Scientist/authors/group Company/institution Country
Fabrication strategy
Application
Specific or
remarks
References
PCR on-a-chip
1993 M.A. Northrup et al
Lawrence
Livermore National
Laboratory
United
States
The device was
manufactured on Si wafers
and processed with silicon
nitride (Si
3 N
4 ) using low
pressure chemical vapor
deposition (LPCVD).
Patterns were made by
conventional
photolithography
techniques. Reaction
chambers were bonded by
depositing a thin film of
low-temperature-curing
polyimide between two
wafers
Thermal cycling
instrument for
execution of the
polymerase
chain reaction
(PCR) on a chip
The device shows
significant
improvements
over commercial
thermal cycling
instrumentation
including low
power
requirements, and
short cycle times
Northrup
et al.
(1993)
Lab-on-a-chip for
cell
characterization
1993 Larry Kricka
University of
Pennsylvania
United
States
Silicon microchannels were
fabricated by using selective
etching, the microchannels
were sealed with glass by
diffusive bonding
Cell
characterization
Same samples can
be used
subsequently in
other procedures
Kricka
et al.
(1993)
Capillary
electrophoresis for
molecule
separation
1994 Zhonghui Fan and Jed
Harrison
University of
Alberta
Canada
The device was fabricated
using a modification of bulk
Si micromachining
methods, and standard
photolithographic methods
The presented
device
integrated a
capillary
electrophoresis
system on a chip
capable of
performing
rapid separation
of amino acids
The device
competes with
commercial
chemical sensors,
while the high
thermal
conductivity and
mass of the glass
substrate allows
the
use of higher
electric fields
Fan and
Harrison
Jan. (1994)
(continued)
R. Garcia-Ramirez and S. Hosseini
Table 1.1
(continued)
BioMEMS
platform
Year Scientist/authors/group Company/institution Country
Fabrication strategy
Application
Specific or
remarks
References
PCR on-a-chip
1993 M.A. Northrup et al
Lawrence
Livermore National
Laboratory
United
States
The device was
manufactured on Si wafers
and processed with silicon
nitride (Si
3 N
4 ) using low
pressure chemical vapor
deposition (LPCVD).
Patterns were made by
conventional
photolithography
techniques. Reaction
chambers were bonded by
depositing a thin film of
low-temperature-curing
polyimide between two
wafers
Thermal cycling
instrument for
execution of the
polymerase
chain reaction
(PCR) on a chip
The device shows
significant
improvements
over commercial
thermal cycling
instrumentation
including low
power
requirements, and
short cycle times
Northrup
et al.
(1993)
Lab-on-a-chip for
cell
characterization
1993 Larry Kricka
University of
Pennsylvania
United
States
Silicon microchannels were
fabricated by using selective
etching, the microchannels
were sealed with glass by
diffusive bonding
Cell
characterization
Same samples can
be used
subsequently in
other procedures
Kricka
et al.
(1993)
Capillary
electrophoresis for
molecule
separation
1994 Zhonghui Fan and Jed
Harrison
University of
Alberta
Canada
The device was fabricated
using a modification of bulk
Si micromachining
methods, and standard
photolithographic methods
The presented
device
integrated a
capillary
electrophoresis
system on a chip
capable of
performing
rapid separation
of amino acids
The device
competes with
commercial
chemical sensors,
while the high
thermal
conductivity and
mass of the glass
substrate allows
the
use of higher
electric fields
Fan and
Harrison
Jan. (1994)
(continued)