1 History of Bio-microelectromechanical Systems (BioMEMS)
9
Table 1.1
(continued)
BioMEMS
platform
Year Scientist/authors/group Company/institution Country
Fabrication strategy
Application
Specific or
remarks
References
Lab-on-a-chip for
signaling
1987 Harvey Hoch et al
Comell University
United
States
Polystyrene replicas of
ion-etched Si wafer
templated with specific
surface topographies to
exhibit maximum cell
differentiation were
microfabricated by using
electron-beam lithography
Cell
differentiation
The mechanisms
involved in signal
reception for the
growth orientation
and infection
structure
formation were
determined for a
stomatal
penetrating rust
fungus
Hoch et al.
(1987)
Lab-on-a-chip for
growth orientation
1987 Jochen Walter et al
Max Planck
Institute for
Developmental
Biology
Germany
A negative mold is
produced by a
photoetching process, a
positive
mold is then formed; this is
used for the production of
the
silicone rubber matrix
containing the array of
microchannels
Cell
differentiation
Fast prototyping
technique that
enables the
production of
multiple devices
from a single
negative mold
Walter
et al.
(1987)
µTAS
1990 Andréas Manz et al
Ciba-Geigy®
Switzerland Not disclosed
Potential uses
for microfluidic
and lab-on-chip
devices
µTAS, created a
novel strategy for
further devices to
explore the field
Manz et al.
(1990)
(continued)