6
R. Garcia-Ramirez and S. Hosseini
Table 1.1
(continued)
BioMEMS
platform
Year Scientist/authors/group Company/institution Country
Fabrication strategy
Application
Specific or
remarks
References
Implantable
pressure sensing
device
1974 Wilhelm Rindner
Device Research
Inc.®
United
States
Not disclosed
The device was
designed to
measure blood
pressure within
the body
The device enables
the calibration of
the pressure
system while the
sensor is at the site
Rindner
(2020)
Multielectrode
probe for
neurophysiology
1975 Kensall Wise and
James Angell
University of
Michigan
United
States
A gold electrode was
formed by electroplating.
Insulation material was
removed from the electrode
tip using photoengraving
techniques
Multielectrode
structure
suitable for
measuring
neurons
electrical
activity with low
noise. The three
tips permitted
the analysis of
adjacent areas of
the brain
The device is able
to combine
stimulating and
recording
electrodes in a
single array while
minimizing
crosstalk. The low
impedance of the
electrodes reduces
the overall noise
of the system
Wise
(1975)
Multiple-electrode
array for a
cochlear implant
1976 Graeme Clark and
Richard Hallworth
University of
Melbourne
Australia
A layer of platinum was
deposited on a fluorinated
ethylene-propylene (FEP)
surface using a
radio-frequency sputtering
technique. The platinum
layer was dip-coated in
photoresist material, this
was exposed to ultraviolet
light (UV) through a
photographic mask having
the design of electrodes,
therefore the unexposed
areas were etched away
Electrode array
for cochlear
implantation
Reduction in the
intracochlear
section enables
current density
was kept at a
minimum rate,
thus not damaging
cochlear tissue
Clark et al.
(1977)
(continued)