1 History of Bio-microelectromechanical Systems (BioMEMS)
7
Table 1.1
(continued)
BioMEMS
platform
Year Scientist/authors/group Company/institution Country
Fabrication strategy
Application
Specific or
remarks
References
Microneedle for
drug delivery
1976 Martin Gerstel and
Virgil Place
Alza Corporation ®
United
States
The device was made by
first mixing plastic pellets
or powders and a drug, and
then feeding the mixture
into a heated barrel. It was
conveyed by the thrust of a
ram into a template which
had the desired form of the
microneedles
Drug delivery
and therapeutics
First drug delivery
system (DDS) for
percutaneously
administering
drugs capable for
the continuous
administration of
controlled
amounts of drugs,
eliminating the
associated pain of
conventional DDS
Gerstel
and Place
(1976)
Fixed-array
multi-4electrode
for neuronal
monitoring
1977 Guenter Gross et al
Max Planck
Institute for
Psychiatry
Germany
The microelectrodes were
produced by vacuum
deposition of a titanium (Ti)
and a gold (Au) film, this
film was coated with a
photo sensible polymer,
then exposed to UV light
through a photo-negative
mask, the exposed polymer
was removed via etching,
and the unprotected metal
was subsequently gold
plated galvanically
Long-term
monitoring of
single unit
extracellular
electrical
activity of
neurons
The device
provides low
intrinsic electrode
noise, with a
versatile material
combination to
enhance
temperature
tolerance
Gross et al.
(1977)
(continued)