6 Bio-microelectromechanical Systems (BioMEMS) …
129
Table 6.1
(continued)
BioMEMS platform
Main components
Fabrication strategy
Mechanisms of operation Detected analyte
Specifics
References
Capillary-driven
microfluidic ELISA
chip
• 3D-printed dark ABS
plastic
• Photodiode array
• Stepper motor
• Si wafer
The Si wafer microfluidic
chips were first dry etched
by using DRIE. After
priming the wafer surface
with HMDS vapor, a
positive photoresist was
spin coated and etched on
the surface. After
development of the
photoresist, through a
“chip-olate” process, the
wafer was diced and chips
were separated for
application
The capillary microfluidic
chip was sealed with a
thin layer of PDMS
coated with HRP. The CL
substrate was flown
through the chip using
capillary pressure. The
light was generated in the
channel once the substrate
came into contact with the
HRP. The signal was
measured and monitored
using a custom detector,
which scanned the chip
surface
The device has not been
tested for biorecognition,
however, has shown great
potentials in biosensing
The device operated
without a need for an
external light source
Ramon et al. (2017)
(continued)