130
A. S. Cerda-Kipper and S. Hosseini
Table 6.1
(continued)
BioMEMS platform
Main components
Fabrication strategy
Mechanisms of operation Detected analyte
Specifics
References
LOC ELISA platform
• Photodiode sensors
• Photodiode chips
• Microcontroller
• Transimpedance
amplifier
• Microchannel inlets
• Double-sided PCB
By using magnetron
sputtering a-Si:H
photodiodes arrays were
microfabricated on glass
substrates and patterned
through photolithography
and wet etched. a-SiN
x
were deposited by
PECVD on n-i-p a-Si:H
photodiodes and patterned
and etched by RIE.
Subsequently, through
sputtering ITO was
deposited and patterned
using lift-off, followed by
another layer of a-SiN
x .
The photodiode chips
were diced and
wire-bonded to the PCB.
Soft-lithography was used
for the development of the
microfluidic device. The
SU-8 substrate was
prepared by immersion on
PGMEA, washed using
IPA and dried. PMMA
were developed by laser
ablation to hold the device
together
By adding the target
antibody through the first
inlet, PBS on the second
inlet, and luminol
solutions on the third, the
autonomous capillary
ELISA was activated. To
detect and quantify the
CL signals, the
microfluidic device was
attached to a custom
socket. The PMMA
machined parts were used
to hold and align the
photodiode chips towards
the microfluidic device
Anti-rabbit IgG labeled
with HRP
Autonomous and
sequential fluid flow
capabilities such as
control of the average
fluid velocity at any given
point of the analysis,
were acquired by the
capillary microfluidic
device. The intricate
manipulation of liquids
and flow was achieved in
a self-powered and
automated fashion by the
incorporation of simple
microchannel based
modules into the
microfluidics device
Novo et al. (2014)
(continued)
A. S. Cerda-Kipper and S. Hosseini
Table 6.1
(continued)
BioMEMS platform
Main components
Fabrication strategy
Mechanisms of operation Detected analyte
Specifics
References
LOC ELISA platform
• Photodiode sensors
• Photodiode chips
• Microcontroller
• Transimpedance
amplifier
• Microchannel inlets
• Double-sided PCB
By using magnetron
sputtering a-Si:H
photodiodes arrays were
microfabricated on glass
substrates and patterned
through photolithography
and wet etched. a-SiN
x
were deposited by
PECVD on n-i-p a-Si:H
photodiodes and patterned
and etched by RIE.
Subsequently, through
sputtering ITO was
deposited and patterned
using lift-off, followed by
another layer of a-SiN
x .
The photodiode chips
were diced and
wire-bonded to the PCB.
Soft-lithography was used
for the development of the
microfluidic device. The
SU-8 substrate was
prepared by immersion on
PGMEA, washed using
IPA and dried. PMMA
were developed by laser
ablation to hold the device
together
By adding the target
antibody through the first
inlet, PBS on the second
inlet, and luminol
solutions on the third, the
autonomous capillary
ELISA was activated. To
detect and quantify the
CL signals, the
microfluidic device was
attached to a custom
socket. The PMMA
machined parts were used
to hold and align the
photodiode chips towards
the microfluidic device
Anti-rabbit IgG labeled
with HRP
Autonomous and
sequential fluid flow
capabilities such as
control of the average
fluid velocity at any given
point of the analysis,
were acquired by the
capillary microfluidic
device. The intricate
manipulation of liquids
and flow was achieved in
a self-powered and
automated fashion by the
incorporation of simple
microchannel based
modules into the
microfluidics device
Novo et al. (2014)
(continued)