5 Bio-microelectromechanical Systems (BioMEMS) in Bio-sensing …
113
Table 5.1
(continued)
BioMEMS platform Main components
Fabrication strategy
Mechanisms of
operation
Detected analyte Specifics
References
LOC
• LOC system
• a-Si:H diodes
• ITO film
The a-Si:H diodes
were coated with
p-i-n structures using
PE-CVD technique.
The ITO film, on the
other hand, was
deposited by the aim
of magnetron
sputtering
The a-Si:H diodes
acted as both
temperature sensors
and photosensors,
while the ITO layer
acted as transparent
heating source.
During its operation,
the glass was
thermally and
optically coupled
with the cells and
electrically attached
to an electronic
platform, which
controlled the LOC’s
temperature and
monitored the
photocurrents of the
sensor
S. cerevisiae
The developed
configuration allowed
the on-chip detection
of 1500
± 200
genetically
engineered BL yeast
bioreporters cells
with a linear response
of 10 6
cells
Santangelo et al.
(2018)
The analyte of interest, and the advantages and disadvantages of each platform are presented in this table
Amorphous silicon carbide (a-SiC:H); E. coli
(EC); Lab-on-Chip (LOC); Hydrogenated amorphous silicon (a-Si:H); Indium tin oxide (ITO); Magnetic
nanoparticle clusters (MNCs); Plasma Enhanced Chemical Vapor Deposition (PE-CVD)