7 Fundamentals and Failures in Die Preparation for 3D Packaging
185
Fig. 7.22 Blade force on dies during saw process. (Color figure online)
Fig. 7.23 Blade force versus
feed rate. (Color figure
online)
revealed [48]. A chip size can be calculated by the following equation [86–88]:
h max =
3
C tan θ
v w
v s
a
d s
1/2
1/2
(7.21)
where C is the active grain number per unit area on the blade surface, θ is the
cross-sectional semi-included angle of an un-deformed chip, v w is the velocity of
workpiece, v s is the velocity of the blade, a is the feed rate of workpiece and ds is
the diameter of the blade. C can be calculated as [18]
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