6 Atomic Scale Kinetics of TSV Protrusion
141
(a)
(b)
(c)
(d)
Fig. 6.10 Stress mapping in TSV from FEM simulation without consideration of microstructure:
(a) the normal stress σ xx , (b) the shear stress σ xy , (c) the von Mises stress and (d) distribution of
the von Mises stress along the edge of TSV. Note that the stress distribution is exactly the same
along both the left and right edges due to symmetry
left and right halves of the TSV. As a result, a slower diffusion rate along y-direction
and a lower protrusion are resulted.
141
(a)
(b)
(c)
(d)
Fig. 6.10 Stress mapping in TSV from FEM simulation without consideration of microstructure:
(a) the normal stress σ xx , (b) the shear stress σ xy , (c) the von Mises stress and (d) distribution of
the von Mises stress along the edge of TSV. Note that the stress distribution is exactly the same
along both the left and right edges due to symmetry
left and right halves of the TSV. As a result, a slower diffusion rate along y-direction
and a lower protrusion are resulted.