142
J. Liu et al.
(a)
(b)
(c)
(d)
Fig. 6.11 TSVs with different loading distributions along the edges [5]: a MLD1, b MLD2, c
MLD3, and d MLD4. The arrows sketch the mechanical loading in different regions. The white
dashed curves sketch the protrusion profiles
J. Liu et al.
(a)
(b)
(c)
(d)
Fig. 6.11 TSVs with different loading distributions along the edges [5]: a MLD1, b MLD2, c
MLD3, and d MLD4. The arrows sketch the mechanical loading in different regions. The white
dashed curves sketch the protrusion profiles