Ellipsometry Techniques and Its Advanced Applications …
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Fig. 14 Representation of biaxial layer model in context of metal nanoparticle arrays deposited on
rippled-Si substrate
Drude model is adopted along the z-axis which accounts the metallic optical response
using various fitting parameters viz. concentration, mobility, and effective mass of
carriers, etc. It may be mentioned that there is no LSPR coupling along z-axis due to
no repetition of metal nanoparticles/nanowires along this axis. A mean-squared error
(MSE) minimization algorithm is the measure of good biaxial model fit (i.e. figure of
merit). The process flow chart for model fit is presented in Fig. 15. In the following
sections, some of the examples are provided in which advanced plasmonic properties are investigated using GE, more specifically, the characterization of anisotropic
specimen is explained in details.
Fig. 15 Flow chart for the biaxial layer model fit of experimentally measured anisotropic Jones
matrix elements using dielectric functions of bulk metals and error minimization algorithm
565
Fig. 14 Representation of biaxial layer model in context of metal nanoparticle arrays deposited on
rippled-Si substrate
Drude model is adopted along the z-axis which accounts the metallic optical response
using various fitting parameters viz. concentration, mobility, and effective mass of
carriers, etc. It may be mentioned that there is no LSPR coupling along z-axis due to
no repetition of metal nanoparticles/nanowires along this axis. A mean-squared error
(MSE) minimization algorithm is the measure of good biaxial model fit (i.e. figure of
merit). The process flow chart for model fit is presented in Fig. 15. In the following
sections, some of the examples are provided in which advanced plasmonic properties are investigated using GE, more specifically, the characterization of anisotropic
specimen is explained in details.
Fig. 15 Flow chart for the biaxial layer model fit of experimentally measured anisotropic Jones
matrix elements using dielectric functions of bulk metals and error minimization algorithm