the basic tools to provide the bridge to the world of optical and e-beam lithography
which interfaces the world of macro-dimensions.
21.2
Template Fabrication
One of the most popular and probably the cheapest method of nanolithography is
to use nanometer size templates that can be used to fabricate nanowires. In some
Fig. 21.2. A perspective of nanolithography and nanomanipulations.
Fig. 21.3. Stepping down of length scales using optical and
e-beam lithography to fabricate electrodes for accommodating
nano-objects.
21 Nanolithography and Nanomanipulation
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