21
Nanolithography and Nanomanipulation
A. K. Raychaudhuri
Abstract
In this chapter we provide a brief review of different nanolithography and nanomanipulation techniques. We discuss mainly such techniques as templated growth,
dip pen lithography, anodic oxidation and scanning probe microscope based nanomanipulation. The chapter contains an introduction to the basic techniques followed by examples of such nanostructure growth.
21.1
Introduction
The word lithography is generally used in the context of microelectronics where
structures are defined in semiconductor wafers like Si or GaAs to make devices.
Such a definition of lithography however refers to the top-down approach. In the
context of fabrication of nanostructures one needs to broaden the definition of
lithography to include bottom-up routes that are often employed to synthesize
nanostructures or their arrays. In this route of lithography, the created pattern either directs the growth process or constrains the growth to within a nanometer or
few tens of nanometers. Nanolithography also includes a mask for conventional
dry or wet etching, as in conventional lithography albeit using novel routes. Nanomanipulation is intimately related to nanolithography. This is an enabling tool for
assembly and manipulation of nanosized objects like nanoparticles, nanotubes and
nanowires.
In the last five years the field of nanolithography has grown extensively and
found innovative applications in the area of nanofabrication. The field of nanolithography starts where microlithography stops. It is important to have some acquaintance with the field of microlithography in order to appreciate the new field
of nanolithography. I refer to a more recent reference to microlithography [1]. The
scope of this chapter is limited and we will discuss only certain methods of nanolithography which use, directly or indirectly, chemical routes. We refer to some of
the existing reviews for general aspects of nanofabrication [2, 3]. In this chapter we
mainly include: (a) Templated growth and (b) Scanning probe microscopy (SPM)
688
Nanolithography and Nanomanipulation
A. K. Raychaudhuri
Abstract
In this chapter we provide a brief review of different nanolithography and nanomanipulation techniques. We discuss mainly such techniques as templated growth,
dip pen lithography, anodic oxidation and scanning probe microscope based nanomanipulation. The chapter contains an introduction to the basic techniques followed by examples of such nanostructure growth.
21.1
Introduction
The word lithography is generally used in the context of microelectronics where
structures are defined in semiconductor wafers like Si or GaAs to make devices.
Such a definition of lithography however refers to the top-down approach. In the
context of fabrication of nanostructures one needs to broaden the definition of
lithography to include bottom-up routes that are often employed to synthesize
nanostructures or their arrays. In this route of lithography, the created pattern either directs the growth process or constrains the growth to within a nanometer or
few tens of nanometers. Nanolithography also includes a mask for conventional
dry or wet etching, as in conventional lithography albeit using novel routes. Nanomanipulation is intimately related to nanolithography. This is an enabling tool for
assembly and manipulation of nanosized objects like nanoparticles, nanotubes and
nanowires.
In the last five years the field of nanolithography has grown extensively and
found innovative applications in the area of nanofabrication. The field of nanolithography starts where microlithography stops. It is important to have some acquaintance with the field of microlithography in order to appreciate the new field
of nanolithography. I refer to a more recent reference to microlithography [1]. The
scope of this chapter is limited and we will discuss only certain methods of nanolithography which use, directly or indirectly, chemical routes. We refer to some of
the existing reviews for general aspects of nanofabrication [2, 3]. In this chapter we
mainly include: (a) Templated growth and (b) Scanning probe microscopy (SPM)
688