6.3 Basics of Reverse-Engineering Art
533
Y – 0 6
Fig. 6.14 SEM—top view of pixels at the polysilicon layer
Fig. 6.15 SEM cross section of pixels [5]
important data source is the section analysis, which usually used a scanning electronic microscope (SEM), a transmission electronic microscope (TEM), or a scanning
capacitive microscope (SCM). For a detailed study of the chemical elements of the
materials used to form the structure, the most frequently used method is the energy