Origami MEMS
205
Table 2
(continued)
Actuation mechanisms
Size of origami
Advantages and disadvantages
Reversible/Irreversible
[152]
[13]
[5]
[112]
[152] (Reprinted with the permission of AIP Publishing) [13] (Copyright 2005 by John Wiley & Sons, Inc. Reproduced by permission of John Wiley & Sons,
Inc.) [5] (Reprinted with the permission of AIP Publishing) [112] (Reproduced with permission. © IOP Publishing. All rights reserved) [9, 21, 23, 76, 97, 98,
112, 133, 151, 176]
Swelling (solvent transfer, heat-assisted,
pH-responsive, etc.
~100
µm
Advantages
– Large deflection
– Various triggered actuation
– Biocompatibility
– Biodegradability
Disadvantages
– Reduced stiffness
– Slow response
Reversible
e.g.
(continued)
205
Table 2
(continued)
Actuation mechanisms
Size of origami
Advantages and disadvantages
Reversible/Irreversible
[152]
[13]
[5]
[112]
[152] (Reprinted with the permission of AIP Publishing) [13] (Copyright 2005 by John Wiley & Sons, Inc. Reproduced by permission of John Wiley & Sons,
Inc.) [5] (Reprinted with the permission of AIP Publishing) [112] (Reproduced with permission. © IOP Publishing. All rights reserved) [9, 21, 23, 76, 97, 98,
112, 133, 151, 176]
Swelling (solvent transfer, heat-assisted,
pH-responsive, etc.
~100
µm
Advantages
– Large deflection
– Various triggered actuation
– Biocompatibility
– Biodegradability
Disadvantages
– Reduced stiffness
– Slow response
Reversible
e.g.
(continued)