Origami MEMS
203
Table 2
Different actuation mechanism for origami fabrication and their details
Actuation mechanisms
Size of origami
Advantages and disadvantages
Reversible/Irreversible
Capillary force
100 nm–1000
µm
Advantages
– Inexpensive fabrication
Disadvantages
– Pairing of droplets and sheets demands
multilayer fabrication
– Difficulty making complex shapes
– Elastomers return to their original shape
Reversible or irreversible
e.g.
[45]
[77]
[153]
[20]
[45] (Copyright 2002 by John Wiley & Sons, Inc. Reproduced by permission of John Wiley & Sons, Inc.) [77, 153] (Reprinted with the permission of AIP
Publishing) [20] (Copyright 2009 American Chemical Society) [38, 44, 88, 93, 117, 121]
Electric field/magnetic field
100
µm–10 mm
Advantages
– Excellent temporal control over the folding
– Quick response
– Easy manipulation
– Wireless control
– Nanorobot fabrication (Magnetic)
Disadvantages
– External system to control the device
Reversible
(continued)
203
Table 2
Different actuation mechanism for origami fabrication and their details
Actuation mechanisms
Size of origami
Advantages and disadvantages
Reversible/Irreversible
Capillary force
100 nm–1000
µm
Advantages
– Inexpensive fabrication
Disadvantages
– Pairing of droplets and sheets demands
multilayer fabrication
– Difficulty making complex shapes
– Elastomers return to their original shape
Reversible or irreversible
e.g.
[45]
[77]
[153]
[20]
[45] (Copyright 2002 by John Wiley & Sons, Inc. Reproduced by permission of John Wiley & Sons, Inc.) [77, 153] (Reprinted with the permission of AIP
Publishing) [20] (Copyright 2009 American Chemical Society) [38, 44, 88, 93, 117, 121]
Electric field/magnetic field
100
µm–10 mm
Advantages
– Excellent temporal control over the folding
– Quick response
– Easy manipulation
– Wireless control
– Nanorobot fabrication (Magnetic)
Disadvantages
– External system to control the device
Reversible
(continued)