270
J. Xu et al.
43. Y. Liao, J. Song, E. Li et al., Rapid prototyping of three-dimensional microfluidic mixers in
glass by femtosecond laser direct writing. Lab Chip 12, 746–749 (2012)
44. S. Maruo, O. Nakamura, S. Kawata, Three-dimensional microfabrication with two-photonabsorbed photopolymerization. Opt. Lett. 22, 132–134 (1997)
45. E. Stratakis, A. Ranella, M. Farsari et al., Laser-based micro/nanoengineering for biological
applications. Prog. Quantum Electron. 33, 127–163 (2009)
46. M. Farsari, B.N. Chichkov, Materials processing: two-photon fabrication. Nat. Photonics 3,
450–452 (2009)
47. M. Malinauskas, M. Farsari, A. Piskarskas et al., Ultrafast laser nanostructuring of photopolymers: a decade of advances. Phys. Rep. 533, 1–31 (2013)
48. T.W. Lim, Y. Son, Y.J. Jeong et al., Three-dimensionally crossing manifold micro-mixer for
fast mixing in a short channel length. Lab Chip 11, 100–103 (2011)
49. D. Wu, S. Wu, J. Xu et al., Hybrid femtosecond laser microfabrication to achieve true 3D
glass/polymer composite biochips with multiscale features and high performance: the concept
of ship-in-a-bottle biochip. Laser Photonics Rev. 8, 458–467 (2014)
50. J. Wang, Y. He, H. Xia et al., Embellishment of microfluidic devices via femtosecond laser
micronanofabrication for chip functionalization. Lab Chip 10, 1993–1996 (2010)
51. L. Amato, Y. Gu, N. Bellini et al., Integrated three-dimensional filter separates nanoscale from
microscale elements in a microfluidic chip. Lab Chip 12, 1135–1142 (2012)
52. H. Xia, J. Wang, Y. Tian et al., Ferrofluids for fabrication of remotely controllable micronanomachines by two-photon polymerization. Adv. Mater. 22, 3204–3207 (2010)
53. K. Sugioka, T. Hongo, H. Takai et al., Selective metallization of internal walls of hollow
structures inside glass using femtosecond laser. Appl. Phys. Lett. 86, 171910 (2005)
54. Y. Hanada, K. Sugioka, K. Midorikawa, Selective metallization of photostructurable glass by
femtosecond laser direct writing for biochip application. Appl. Phys. A 90, 603–607 (2008)
55. Z. Zhou, J. Xu, Y. Liao et al., Fabrication of an integrated Raman sensor by selective surface
metallization using a femtosecond laser oscillator. Opt. Commun. 282, 1370–1373 (2009)
56. J. Xu, D. Wu, Y. Hanada et al., Electrofluidics fabricated by space-selective metallization in
glass microfluidic structures using femtosecond laser direct writing. Lab Chip 13, 4608–4616
(2013)
57. T. Tanaka, A. Ishikawa, S. Kawata, Two-photon-induced reduction of metal ions for fabricating
three dimensional electrically conductive metallic microstructure. Appl. Phys. Lett. 88, 08110
(2006)
58. S. Maruo, T. Saeki, Femtosecond laser direct writing of metallic microstructures by photoreduction of silver nitrate in a polymer matrix. Opt. Express 16, 1174–1179 (2008)
59. Y. Cao, N. Takeyasu, T. Tanaka et al., 3D metallic nanostructure fabrication by surfactantassisted multiphoton-induced reduction. Small 5, 1144–1148 (2009)
60. B. Xu, H. Xia, L. Niu et al., Flexible nanowiring of metal on nonplanar substrates by
femtosecond-laser-induced electroless plating. Small 6, 1762–1766 (2010)
61. S.M. Eaton, C.D. Marco, R. Martinez-Vazquez et al., Femtosecond laser microstructuring for
polymeric lab-on-chips. J. Biophotonics 5, 687–702 (2012)
62. K. Sugioka, M. Masuda, T. Hongo et al., Three-dimensional microfluidic structure embedded
in photostructurable glass by femtosecond laser for lab-on-chip application. Appl. Phys. A 78,
815–817 (2004)
63. Y. Cheng, K. Sugioka, K. Midorikawa et al., Three-dimensional micro-optical components
embedded in photosensitive glass by a femtosecond laser. Opt. Lett. 28, 1144–1146 (2003)
64. K. Sugioka, Y. Cheng, Fabrication of 3D microfluidic structures inside glass by femtosecond
laser micromachining. Appl. Phys. A 114, 215–221 (2014)
65. S. Kiyama, S. Matsuo, S. Hashimoto et al., Examination of etching agent and etching mechanism on femtosecond laser microfabrication of channels inside vitreous silica substrates. J.
Phys. Chem. C 113, 11560–11566 (2009)
66. M. Hermans, J. Gottmann, F. Riedel, Selective laser-induced etching of fused silica at high
scan-speeds using KOH. J. Laser Micro Nanoeng. 9, 126–131 (2014)
J. Xu et al.
43. Y. Liao, J. Song, E. Li et al., Rapid prototyping of three-dimensional microfluidic mixers in
glass by femtosecond laser direct writing. Lab Chip 12, 746–749 (2012)
44. S. Maruo, O. Nakamura, S. Kawata, Three-dimensional microfabrication with two-photonabsorbed photopolymerization. Opt. Lett. 22, 132–134 (1997)
45. E. Stratakis, A. Ranella, M. Farsari et al., Laser-based micro/nanoengineering for biological
applications. Prog. Quantum Electron. 33, 127–163 (2009)
46. M. Farsari, B.N. Chichkov, Materials processing: two-photon fabrication. Nat. Photonics 3,
450–452 (2009)
47. M. Malinauskas, M. Farsari, A. Piskarskas et al., Ultrafast laser nanostructuring of photopolymers: a decade of advances. Phys. Rep. 533, 1–31 (2013)
48. T.W. Lim, Y. Son, Y.J. Jeong et al., Three-dimensionally crossing manifold micro-mixer for
fast mixing in a short channel length. Lab Chip 11, 100–103 (2011)
49. D. Wu, S. Wu, J. Xu et al., Hybrid femtosecond laser microfabrication to achieve true 3D
glass/polymer composite biochips with multiscale features and high performance: the concept
of ship-in-a-bottle biochip. Laser Photonics Rev. 8, 458–467 (2014)
50. J. Wang, Y. He, H. Xia et al., Embellishment of microfluidic devices via femtosecond laser
micronanofabrication for chip functionalization. Lab Chip 10, 1993–1996 (2010)
51. L. Amato, Y. Gu, N. Bellini et al., Integrated three-dimensional filter separates nanoscale from
microscale elements in a microfluidic chip. Lab Chip 12, 1135–1142 (2012)
52. H. Xia, J. Wang, Y. Tian et al., Ferrofluids for fabrication of remotely controllable micronanomachines by two-photon polymerization. Adv. Mater. 22, 3204–3207 (2010)
53. K. Sugioka, T. Hongo, H. Takai et al., Selective metallization of internal walls of hollow
structures inside glass using femtosecond laser. Appl. Phys. Lett. 86, 171910 (2005)
54. Y. Hanada, K. Sugioka, K. Midorikawa, Selective metallization of photostructurable glass by
femtosecond laser direct writing for biochip application. Appl. Phys. A 90, 603–607 (2008)
55. Z. Zhou, J. Xu, Y. Liao et al., Fabrication of an integrated Raman sensor by selective surface
metallization using a femtosecond laser oscillator. Opt. Commun. 282, 1370–1373 (2009)
56. J. Xu, D. Wu, Y. Hanada et al., Electrofluidics fabricated by space-selective metallization in
glass microfluidic structures using femtosecond laser direct writing. Lab Chip 13, 4608–4616
(2013)
57. T. Tanaka, A. Ishikawa, S. Kawata, Two-photon-induced reduction of metal ions for fabricating
three dimensional electrically conductive metallic microstructure. Appl. Phys. Lett. 88, 08110
(2006)
58. S. Maruo, T. Saeki, Femtosecond laser direct writing of metallic microstructures by photoreduction of silver nitrate in a polymer matrix. Opt. Express 16, 1174–1179 (2008)
59. Y. Cao, N. Takeyasu, T. Tanaka et al., 3D metallic nanostructure fabrication by surfactantassisted multiphoton-induced reduction. Small 5, 1144–1148 (2009)
60. B. Xu, H. Xia, L. Niu et al., Flexible nanowiring of metal on nonplanar substrates by
femtosecond-laser-induced electroless plating. Small 6, 1762–1766 (2010)
61. S.M. Eaton, C.D. Marco, R. Martinez-Vazquez et al., Femtosecond laser microstructuring for
polymeric lab-on-chips. J. Biophotonics 5, 687–702 (2012)
62. K. Sugioka, M. Masuda, T. Hongo et al., Three-dimensional microfluidic structure embedded
in photostructurable glass by femtosecond laser for lab-on-chip application. Appl. Phys. A 78,
815–817 (2004)
63. Y. Cheng, K. Sugioka, K. Midorikawa et al., Three-dimensional micro-optical components
embedded in photosensitive glass by a femtosecond laser. Opt. Lett. 28, 1144–1146 (2003)
64. K. Sugioka, Y. Cheng, Fabrication of 3D microfluidic structures inside glass by femtosecond
laser micromachining. Appl. Phys. A 114, 215–221 (2014)
65. S. Kiyama, S. Matsuo, S. Hashimoto et al., Examination of etching agent and etching mechanism on femtosecond laser microfabrication of channels inside vitreous silica substrates. J.
Phys. Chem. C 113, 11560–11566 (2009)
66. M. Hermans, J. Gottmann, F. Riedel, Selective laser-induced etching of fused silica at high
scan-speeds using KOH. J. Laser Micro Nanoeng. 9, 126–131 (2014)