8 Femtosecond Laser Direct Writing for 3D Microfluidic Biochip …
271
67. F. He, Y. Cheng, Z. Xu et al., Direct fabrication of homogeneous microfluidic channels
embedded in fused silica using a femtosecond laser. Opt. Lett. 35, 282–284 (2010)
68. F. He, J. Lin, Y. Cheng, Fabrication of hollow optical waveguides in fused silica by threedimensional femtosecond laser micromachining. Appl. Phys. B 105, 379–384 (2011)
69. J. Lin, S. Yu, Y. Ma et al., On-chip three-dimensional high-Q microcavities fabricated by
femtosecond laser direct writing. Opt. Express 20, 10212–10217 (2012)
70. R. Osellame, S. Taccheo, M. Marangoni et al., Femtosecond writing of active optical
waveguides with astigmatically shaped beams. J. Opt. Soc. Am. B 20, 1559–1567 (2003)
71. Y. Cheng, K. Sugioka, K. Midorikawa et al., Control of the cross-sectional shape of a hollow
microchannel embedded in photostructurable glass by use of a femtosecond laser. Opt. Lett.
28, 55–57 (2003)
72. K. Sugioka, Y. Cheng, K. Midorikawa et al., Femtosecond laser microprocessing with threedimensionally isotropic spatial resolution using crossed-beam irradiation. Opt. Lett. 31, 208–
210 (2006)
73. F. He, H. Xu, Y. Cheng et al., Fabrication of microfluidic channels with a circular cross section
using spatiotemporally focused femtosecond laser pulses. Opt. Lett. 35, 1106–1108 (2010)
74. Y. Liao, Y. Shen, L. Qiao et al., Femtosecond laser nanostructuring in porous glass with sub-50
nm feature sizes. Opt. Lett. 38, 187–189 (2013)
75. Y. Liao, Y. Cheng, C. Liu et al., Direct laser writing of sub-50 nm nanofluidic channels buried
in glass for three-dimensional micro-nanofluidic integration. Lab Chip 13, 1626–1631 (2013)
76. A. Schaap, T. Rohrlack, Y. Bellouard, Optical classification of algae species with a glass
lab-on-a-chip. Lab Chip 12, 1527–1532 (2012)
77. Z. Wang, K. Sugioka, K. Midorikawa, Fabrication of integrated microchip for optical sensing
by femtosecond laser direct writing of Foturan glass. Appl. Phys. A 93, 225–229 (2008)
78. L. Qiao, F. He, C. Wang et al., A microfluidic chip integrated with a microoptical lens fabricated
by femtosecond laser micromachining. Appl. Phys. A 102, 179–183 (2011)
79. J. Song, J. Lin, J. Tang et al., Fabrication of an integrated high-quality-factor (high-Q)
optofluidic sensor by femtosecond laser micromachining. Opt. Express 22, 14792–14802
(2014)
80. J. Voldman, Electrical forces for microscale cell manipulation. Annu. Rev. Biomed. Eng. 8,
425–454 (2006)
81. L.A. MacQueen, M. Thibault, M.D. Buschmann et al., Electro-manipulation of biological cells
in microdevices. IEEE Trans. Dielectr. Electr. Insul. 19, 1261–1268 (2012)
82. J. Xu, Y. Liao, H. Zeng et al., Selective metallization on insulator surfaces with femtosecond
laser pulses. Opt. Express 15, 12743–12748 (2007)
83. J. Xu, Y. Liao, H. Zeng et al., Mechanism study of femtosecond laser induced selective
metallization (FLISM) on glass surfaces. Opt. Commun. 281, 3505–3509 (2008)
84. Y. Liao, J. Xu, H. Sun et al., Fabrication of microelectrodes deeply embedded in LiNbO 3 using
a femtosecond laser. Appl. Surf. Sci. 254, 7018–7021 (2008)
85. J. Song, Y. Liao, C. Liu et al., Fabrication of gold microelectrodes on a glass substrate by
femtosecond-laser-assisted electroless plating. J. Laser Micro/Nanoeng. 7, 334–338 (2012)
86. Y. Liao, L. Qiao, Z. Wang et al., Fabrication of a liquid crystal light modulator by use of
femtosecond-laser-induced nanoripples. Opt. Mater. Express 3, 1698–1704 (2013)
87. G.A. Shafeev, Laser-assisted activation of dielectrics for electroless metal plating. Appl. Phys.
A 67, 303–311 (1998)
88. J. Xu, D. Wu, J.Y. Ip et al., Vertical sidewall electrodes monolithically integrated into 3D
glass microfluidic chips using water-assisted femtosecond-laser fabrication for in situ control
of electrotaxis. RSC Adv. 5, 24072–24080 (2015)
89. J. Xu, H. Kawano, W. Liu et al., Controllable alignment of elongated microorganisms
in 3D microspace using electrofluidic devices manufactured by hybrid femtosecond laser
microfabrication. Microsyst. Nanoeng. 3, 16078 (2017)
90. J. Xu, K. Midorikawa, K. Sugioka, Femtosecond laser fabricated electrofluidic devices in glass
for 3D manipulation of biological samples. Proc. SPIE 9735, 97350B (2016)
271
67. F. He, Y. Cheng, Z. Xu et al., Direct fabrication of homogeneous microfluidic channels
embedded in fused silica using a femtosecond laser. Opt. Lett. 35, 282–284 (2010)
68. F. He, J. Lin, Y. Cheng, Fabrication of hollow optical waveguides in fused silica by threedimensional femtosecond laser micromachining. Appl. Phys. B 105, 379–384 (2011)
69. J. Lin, S. Yu, Y. Ma et al., On-chip three-dimensional high-Q microcavities fabricated by
femtosecond laser direct writing. Opt. Express 20, 10212–10217 (2012)
70. R. Osellame, S. Taccheo, M. Marangoni et al., Femtosecond writing of active optical
waveguides with astigmatically shaped beams. J. Opt. Soc. Am. B 20, 1559–1567 (2003)
71. Y. Cheng, K. Sugioka, K. Midorikawa et al., Control of the cross-sectional shape of a hollow
microchannel embedded in photostructurable glass by use of a femtosecond laser. Opt. Lett.
28, 55–57 (2003)
72. K. Sugioka, Y. Cheng, K. Midorikawa et al., Femtosecond laser microprocessing with threedimensionally isotropic spatial resolution using crossed-beam irradiation. Opt. Lett. 31, 208–
210 (2006)
73. F. He, H. Xu, Y. Cheng et al., Fabrication of microfluidic channels with a circular cross section
using spatiotemporally focused femtosecond laser pulses. Opt. Lett. 35, 1106–1108 (2010)
74. Y. Liao, Y. Shen, L. Qiao et al., Femtosecond laser nanostructuring in porous glass with sub-50
nm feature sizes. Opt. Lett. 38, 187–189 (2013)
75. Y. Liao, Y. Cheng, C. Liu et al., Direct laser writing of sub-50 nm nanofluidic channels buried
in glass for three-dimensional micro-nanofluidic integration. Lab Chip 13, 1626–1631 (2013)
76. A. Schaap, T. Rohrlack, Y. Bellouard, Optical classification of algae species with a glass
lab-on-a-chip. Lab Chip 12, 1527–1532 (2012)
77. Z. Wang, K. Sugioka, K. Midorikawa, Fabrication of integrated microchip for optical sensing
by femtosecond laser direct writing of Foturan glass. Appl. Phys. A 93, 225–229 (2008)
78. L. Qiao, F. He, C. Wang et al., A microfluidic chip integrated with a microoptical lens fabricated
by femtosecond laser micromachining. Appl. Phys. A 102, 179–183 (2011)
79. J. Song, J. Lin, J. Tang et al., Fabrication of an integrated high-quality-factor (high-Q)
optofluidic sensor by femtosecond laser micromachining. Opt. Express 22, 14792–14802
(2014)
80. J. Voldman, Electrical forces for microscale cell manipulation. Annu. Rev. Biomed. Eng. 8,
425–454 (2006)
81. L.A. MacQueen, M. Thibault, M.D. Buschmann et al., Electro-manipulation of biological cells
in microdevices. IEEE Trans. Dielectr. Electr. Insul. 19, 1261–1268 (2012)
82. J. Xu, Y. Liao, H. Zeng et al., Selective metallization on insulator surfaces with femtosecond
laser pulses. Opt. Express 15, 12743–12748 (2007)
83. J. Xu, Y. Liao, H. Zeng et al., Mechanism study of femtosecond laser induced selective
metallization (FLISM) on glass surfaces. Opt. Commun. 281, 3505–3509 (2008)
84. Y. Liao, J. Xu, H. Sun et al., Fabrication of microelectrodes deeply embedded in LiNbO 3 using
a femtosecond laser. Appl. Surf. Sci. 254, 7018–7021 (2008)
85. J. Song, Y. Liao, C. Liu et al., Fabrication of gold microelectrodes on a glass substrate by
femtosecond-laser-assisted electroless plating. J. Laser Micro/Nanoeng. 7, 334–338 (2012)
86. Y. Liao, L. Qiao, Z. Wang et al., Fabrication of a liquid crystal light modulator by use of
femtosecond-laser-induced nanoripples. Opt. Mater. Express 3, 1698–1704 (2013)
87. G.A. Shafeev, Laser-assisted activation of dielectrics for electroless metal plating. Appl. Phys.
A 67, 303–311 (1998)
88. J. Xu, D. Wu, J.Y. Ip et al., Vertical sidewall electrodes monolithically integrated into 3D
glass microfluidic chips using water-assisted femtosecond-laser fabrication for in situ control
of electrotaxis. RSC Adv. 5, 24072–24080 (2015)
89. J. Xu, H. Kawano, W. Liu et al., Controllable alignment of elongated microorganisms
in 3D microspace using electrofluidic devices manufactured by hybrid femtosecond laser
microfabrication. Microsyst. Nanoeng. 3, 16078 (2017)
90. J. Xu, K. Midorikawa, K. Sugioka, Femtosecond laser fabricated electrofluidic devices in glass
for 3D manipulation of biological samples. Proc. SPIE 9735, 97350B (2016)