8 Femtosecond Laser Direct Writing for 3D Microfluidic Biochip …
269
19. M. Kim, D.J. Hwang, H. Jeon et al., Single cell detection using a glass-based optofluidic device
fabricated by femtosecond laser pulses. Lab Chip 9, 311–318 (2009)
20. F. Bragheri, L. Ferrara, N. Bellini et al., Optofluidic chip for single cell trapping and stretching
fabricated by a femtosecond laser. J. Biophotonics 3, 234–243 (2010)
21. Y. Hanada, K. Sugioka, H. Kawano et al., Nano-aquarium for dynamic observation of living
cells fabricated by femtosecond laser direct writing of photostructurable glass. Biomed.
Microdevices 10, 403–410 (2008)
22. Y. Hanada, K. Sugioka, S. Ishikawa et al., 3D microfluidic chips with integrated functional
microelements fabricated by a femtosecond laser for studying the gliding mechanism of
cyanobacteria. Lab Chip 11, 2109–2115 (2011)
23. Y. Hanada, T. Ogawa, K. Koike et al., Making the invisible visible: a microfluidic chip using
a low refractive index polymer. Lab Chip 16, 2481–2486 (2016)
24. D. Choudhury, W.T. Ramsay, R. Kiss et al., A 3D mammalian cell separator biochip. Lab Chip
12, 948–953 (2012)
25. F. Brahheri, P. Minzioni, R.M. Vazquez et al., Optofluidic integrated cell sorter fabricated by
femtosecond lasers. Lab Chip 12, 3779–3784 (2012)
26. P. Paiè, F. Bragheri, R.M. Vazquez et al., Straightforward 3D hydrodynamic focusing in
femtosecond laser fabricated microfluidic channels. Lab Chip 14, 1826–1833 (2014)
27. D. Wu, J. Xu, L. Niu, et al., In-channel integration of designable microoptical devices using
flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell
counting. Light Sci. Appl. 4, e228 (2015)
28. K.M. Davis, K. Miura, N. Sugimoto et al., Writing waveguides in glass with a femtosecond
laser. Opt. Lett. 21, 1729–1731 (1996)
29. D. Choudhury, J.R. Macdonald, A.K. Kar, Ultrafast laser inscription: perspectives on future
integrated applications. Laser Photonics Rev. 8, 827–846 (2014)
30. F. Chen, J.R. Vázquez de Aldana, Optical waveguides in crystalline dielectric materials
produced by femtosecond-laser micromachining. Laser Photonics Rev. 8, 251–275 (2014)
31. S. Gross, M.J. Withford, Ultrafast-laser-inscribed 3D integrated photonics: challenges and
emerging applications. Nanophotonics 4, 332–352 (2015)
32. Y. Kondo, J. Qiu, T. Mitsuyu et al., Three-dimensional microdrilling of glass by multiphoton
process and chemical etching. Jpn. J. Appl. Phys. 38, L1146 (1999)
33. A. Marcinkeviˇ cius, S. Juodkazis, M. Watanabe et al., Femtosecond laser-assisted threedimensional microfabrication in silica. Opt. Lett. 26, 277–279 (2001)
34. M. Masuda, K. Sugioka, Y. Cheng et al., 3-D microstructuring inside photosensitive glass by
femtosecond laser excitation. Appl. Phys. A 76, 857–860 (2003)
35. Y. Bellouard, A. Said, M. Dugan et al., Fabrication of high-aspect ratio, micro-fluidic channels
and tunnels using femtosecond laser pulses and chemical etching. Opt. Express 12, 2120–2129
(2004)
36. Y. Li, K. Itoh, W. Watanabe et al., Three-dimensional hole drilling of silica glass from the rear
surface with femtosecond laser pulses. Opt. Lett. 26, 1912–1914 (2001)
37. T.N. Kim, K. Campbell, A. Groisman et al., Femtosecond laser-drilled capillary integrated into
a microfluidic device. Appl. Phys. Lett. 86, 201106 (2005)
38. R. An, Y. Li, Y. Dou et al., Simultaneous multi-microhole drilling of soda-lime glass by waterassisted ablation with femtosecond laser pulses. Opt. Express 13, 1855–1859 (2005)
39. D.J. Hwang, T.Y. Choi, C.P. Grigoropoulos et al., Liquid-assisted femtosecond laser drilling
of straight and three-dimensional microchannels in glass. Appl. Phys. A 79, 605–612 (2004)
40. K. Ke, E.F. Hasselbrink Jr., A.J. Hunt et al., Rapidly prototyped three-dimensional nanofluidic
channel networks in glass substrates. Anal. Chem. 77, 5083–5088 (2005)
41. Y. Liao, Y. Ju, L. Zhang et al., Three-dimensional microfluidic channel with arbitrary length
and configuration fabricated inside glass by femtosecond laser direct writing. Opt. Lett. 35,
3225–3227 (2010)
42. Y. Ju, Y. Liao, L. Zhang et al., Fabrication of large-volume microfluidic chamber embedded in
glass using three-dimensional femtosecond laser micromachining. Microfluid. Nanofluid. 11,
111–117 (2012)
269
19. M. Kim, D.J. Hwang, H. Jeon et al., Single cell detection using a glass-based optofluidic device
fabricated by femtosecond laser pulses. Lab Chip 9, 311–318 (2009)
20. F. Bragheri, L. Ferrara, N. Bellini et al., Optofluidic chip for single cell trapping and stretching
fabricated by a femtosecond laser. J. Biophotonics 3, 234–243 (2010)
21. Y. Hanada, K. Sugioka, H. Kawano et al., Nano-aquarium for dynamic observation of living
cells fabricated by femtosecond laser direct writing of photostructurable glass. Biomed.
Microdevices 10, 403–410 (2008)
22. Y. Hanada, K. Sugioka, S. Ishikawa et al., 3D microfluidic chips with integrated functional
microelements fabricated by a femtosecond laser for studying the gliding mechanism of
cyanobacteria. Lab Chip 11, 2109–2115 (2011)
23. Y. Hanada, T. Ogawa, K. Koike et al., Making the invisible visible: a microfluidic chip using
a low refractive index polymer. Lab Chip 16, 2481–2486 (2016)
24. D. Choudhury, W.T. Ramsay, R. Kiss et al., A 3D mammalian cell separator biochip. Lab Chip
12, 948–953 (2012)
25. F. Brahheri, P. Minzioni, R.M. Vazquez et al., Optofluidic integrated cell sorter fabricated by
femtosecond lasers. Lab Chip 12, 3779–3784 (2012)
26. P. Paiè, F. Bragheri, R.M. Vazquez et al., Straightforward 3D hydrodynamic focusing in
femtosecond laser fabricated microfluidic channels. Lab Chip 14, 1826–1833 (2014)
27. D. Wu, J. Xu, L. Niu, et al., In-channel integration of designable microoptical devices using
flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell
counting. Light Sci. Appl. 4, e228 (2015)
28. K.M. Davis, K. Miura, N. Sugimoto et al., Writing waveguides in glass with a femtosecond
laser. Opt. Lett. 21, 1729–1731 (1996)
29. D. Choudhury, J.R. Macdonald, A.K. Kar, Ultrafast laser inscription: perspectives on future
integrated applications. Laser Photonics Rev. 8, 827–846 (2014)
30. F. Chen, J.R. Vázquez de Aldana, Optical waveguides in crystalline dielectric materials
produced by femtosecond-laser micromachining. Laser Photonics Rev. 8, 251–275 (2014)
31. S. Gross, M.J. Withford, Ultrafast-laser-inscribed 3D integrated photonics: challenges and
emerging applications. Nanophotonics 4, 332–352 (2015)
32. Y. Kondo, J. Qiu, T. Mitsuyu et al., Three-dimensional microdrilling of glass by multiphoton
process and chemical etching. Jpn. J. Appl. Phys. 38, L1146 (1999)
33. A. Marcinkeviˇ cius, S. Juodkazis, M. Watanabe et al., Femtosecond laser-assisted threedimensional microfabrication in silica. Opt. Lett. 26, 277–279 (2001)
34. M. Masuda, K. Sugioka, Y. Cheng et al., 3-D microstructuring inside photosensitive glass by
femtosecond laser excitation. Appl. Phys. A 76, 857–860 (2003)
35. Y. Bellouard, A. Said, M. Dugan et al., Fabrication of high-aspect ratio, micro-fluidic channels
and tunnels using femtosecond laser pulses and chemical etching. Opt. Express 12, 2120–2129
(2004)
36. Y. Li, K. Itoh, W. Watanabe et al., Three-dimensional hole drilling of silica glass from the rear
surface with femtosecond laser pulses. Opt. Lett. 26, 1912–1914 (2001)
37. T.N. Kim, K. Campbell, A. Groisman et al., Femtosecond laser-drilled capillary integrated into
a microfluidic device. Appl. Phys. Lett. 86, 201106 (2005)
38. R. An, Y. Li, Y. Dou et al., Simultaneous multi-microhole drilling of soda-lime glass by waterassisted ablation with femtosecond laser pulses. Opt. Express 13, 1855–1859 (2005)
39. D.J. Hwang, T.Y. Choi, C.P. Grigoropoulos et al., Liquid-assisted femtosecond laser drilling
of straight and three-dimensional microchannels in glass. Appl. Phys. A 79, 605–612 (2004)
40. K. Ke, E.F. Hasselbrink Jr., A.J. Hunt et al., Rapidly prototyped three-dimensional nanofluidic
channel networks in glass substrates. Anal. Chem. 77, 5083–5088 (2005)
41. Y. Liao, Y. Ju, L. Zhang et al., Three-dimensional microfluidic channel with arbitrary length
and configuration fabricated inside glass by femtosecond laser direct writing. Opt. Lett. 35,
3225–3227 (2010)
42. Y. Ju, Y. Liao, L. Zhang et al., Fabrication of large-volume microfluidic chamber embedded in
glass using three-dimensional femtosecond laser micromachining. Microfluid. Nanofluid. 11,
111–117 (2012)