7 Micro-hole Arrays and Net-like Structure Fabrication …
243
6. Y. Lawrence Yao, H. Chen, W. Zhang. Time scale effects in laser material removal: a review.
Int. J. Adv. Manuf. Technol. 26(5), 598–608 (2005)
7. B.N. Chichkov, C. Momma, S. Nolte, F. Von Alvensleben, A. Tünnermann, Femtosecond,
picosecond and nanosecond laser ablation of solids. Appl. Phys. A 63(2), 109–115 (1996)
8. J.G. Fujimoto, E.P. Ippen, J.M. Liu, N. Bloembergen, Femtosecond laser interaction with
metallic tungsten and nonequilibrium electron and lattice temperatures. Phys. Rev. Lett. 53(19),
1837–1840 (1984)
9. D.C. Xuan, H.K. Bo, N.C. Chong, Micro-structuring of glass with features less than 100 μm
by electrochemical discharge machining. Precis. Eng. 33(4), 459–465 (2009)
10. E. Kai, K. Mizutani, Micro-drilling of monocrystalline silicon using a cutting tool. Precis. Eng.
26(3), 263–268 (2002)
11. S.H. Ahn, H.R. Shi, D.K. Choi, N.C. Chong, Electro-chemical micro drilling using ultra short
pulses. Precis. Eng. 28(2), 129–134 (2004)
12. Yi. Zhang, S. Li, G. Chen, J. Mazumder, Experimental observation and simulation of keyhole
dynamics during laser drilling. Opt. Laser Technol. 48(6), 405–414 (2013)
13. P.S. Spinney, D.G. Howitt, R.L. Smith, S.D. Collins, Nanopore formation by low-energy
focused electron beam machining. Nanotechnology 21(37), 2058–2064 (2010)
14. T.H. Maiman, 5–stimulated optical radiation in ruby. Essent. Lasers 134–136 (1969)
15. P.P. Pronko, S.K. Dutta, J. Squier, J.V. Rudd, D. Du, G. Mourou, Machining of sub-micron
holes using a femtosecond laser at 800 nm. Opt. Commun. 114(1–2), 106–110 (1995)
16. E.N. Glezer, E. Mazur, Ultrafast-laser driven micro-explosions in transparent materials. Appl.
Phys. Lett. 71(7), 882–884 (1997)
17. X. Zhu, A. Yu Naumov, D.M. Villeneuve, P.B. Corkum, Influence of laser parameters and
material properties on micro drilling with femtosecond laser pulses. Appl. Phys. A 69(1),
S367–S371 (1999)
18. X. Zhu, D.M. Villeneuve, A. Yu Naumov, S. Nikumb, P.B. Corkum, Experimental study of
drilling sub-10 μm holes in thin metal foils with femtosecond laser pulses. Appl. Surf. Sci.
152(3), 138–148 (1999)
19. Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, Y. Jiang, Three-dimensional hole
drilling of silica glass from the rear surface with femtosecond laser pulses. Opt. Lett. 26(23),
1912–1914 (2001)
20. N. Muhammad, L. Li, Underwater femtosecond laser micromachining of thin nitinol tubes for
medical coronary stent manufacture. Appl. Phys. A 107(4), 849–861 (2012)
21. T.Y. Choi, D.J. Hwang, C.P. Grigoropoulos (2002) Femtosecond laser induced ablation of
crystalline silicon upon double beam irradiation. Appl. Surf. Sci. 197, 720–725 (2002)
22. Y. Nakata, T. Okada, M. Maeda, Fabrication of dot matrix, comb, and nanowire structures using
laser ablation by interfered femtosecond laser beams. Appl. Phys. Lett. 81(22), 4239–4241
(2002)
23. G. Kamlage, T. Bauer, A. Ostendorf, B.N. Chichkov, Deep drilling of metals by femtosecond
laser pulses. Appl. Phys. A 77(2), 307–310 (2003)
24. Q. Wang, A. Chen, S. Li, H. Qi, Y. Qi, Hu. Zhan, M. Jin, Influence of ambient pressure on the
ablation hole in femtosecond laser drilling Cu. Appl. Opt. 54(27), 8235–8240 (2015)
25. G. Deng, G. Feng, S. Zhou, Experimental and FDTD study of silicon surface morphology
induced by femtosecond laser irradiation at a high substrate temperature. Opt. Express 25(7),
7818–7827 (2017)
26. L.S. Jiao, S.K. Moon, E.Y.K. Ng, H.Y. Zheng, H.S. Son, Influence of substrate heating on hole
geometry and spatter area in femtosecond laser drilling of silicon. Appl. Phys. Lett. 104(18),
181902 (2014)
27. J.H. Klein-Wiele, J. Bekesi, P. Simon, Sub-micron patterning of solid materials with ultraviolet
femtosecond pulses. Appl. Phys. A 79(4), 775–778 (2004)
28. F. He, Y. Cheng, L. Qiao, C. Wang, Z. Xu, K. Sugioka, K. Midorikawa, J. Wu, Two-photon
fluorescence excitation with a microlens fabricated on the fused silica chip by femtosecond
laser micromachining. Appl. Phys. Lett. 96(4), 041108-041108-3 (2010)
243
6. Y. Lawrence Yao, H. Chen, W. Zhang. Time scale effects in laser material removal: a review.
Int. J. Adv. Manuf. Technol. 26(5), 598–608 (2005)
7. B.N. Chichkov, C. Momma, S. Nolte, F. Von Alvensleben, A. Tünnermann, Femtosecond,
picosecond and nanosecond laser ablation of solids. Appl. Phys. A 63(2), 109–115 (1996)
8. J.G. Fujimoto, E.P. Ippen, J.M. Liu, N. Bloembergen, Femtosecond laser interaction with
metallic tungsten and nonequilibrium electron and lattice temperatures. Phys. Rev. Lett. 53(19),
1837–1840 (1984)
9. D.C. Xuan, H.K. Bo, N.C. Chong, Micro-structuring of glass with features less than 100 μm
by electrochemical discharge machining. Precis. Eng. 33(4), 459–465 (2009)
10. E. Kai, K. Mizutani, Micro-drilling of monocrystalline silicon using a cutting tool. Precis. Eng.
26(3), 263–268 (2002)
11. S.H. Ahn, H.R. Shi, D.K. Choi, N.C. Chong, Electro-chemical micro drilling using ultra short
pulses. Precis. Eng. 28(2), 129–134 (2004)
12. Yi. Zhang, S. Li, G. Chen, J. Mazumder, Experimental observation and simulation of keyhole
dynamics during laser drilling. Opt. Laser Technol. 48(6), 405–414 (2013)
13. P.S. Spinney, D.G. Howitt, R.L. Smith, S.D. Collins, Nanopore formation by low-energy
focused electron beam machining. Nanotechnology 21(37), 2058–2064 (2010)
14. T.H. Maiman, 5–stimulated optical radiation in ruby. Essent. Lasers 134–136 (1969)
15. P.P. Pronko, S.K. Dutta, J. Squier, J.V. Rudd, D. Du, G. Mourou, Machining of sub-micron
holes using a femtosecond laser at 800 nm. Opt. Commun. 114(1–2), 106–110 (1995)
16. E.N. Glezer, E. Mazur, Ultrafast-laser driven micro-explosions in transparent materials. Appl.
Phys. Lett. 71(7), 882–884 (1997)
17. X. Zhu, A. Yu Naumov, D.M. Villeneuve, P.B. Corkum, Influence of laser parameters and
material properties on micro drilling with femtosecond laser pulses. Appl. Phys. A 69(1),
S367–S371 (1999)
18. X. Zhu, D.M. Villeneuve, A. Yu Naumov, S. Nikumb, P.B. Corkum, Experimental study of
drilling sub-10 μm holes in thin metal foils with femtosecond laser pulses. Appl. Surf. Sci.
152(3), 138–148 (1999)
19. Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, Y. Jiang, Three-dimensional hole
drilling of silica glass from the rear surface with femtosecond laser pulses. Opt. Lett. 26(23),
1912–1914 (2001)
20. N. Muhammad, L. Li, Underwater femtosecond laser micromachining of thin nitinol tubes for
medical coronary stent manufacture. Appl. Phys. A 107(4), 849–861 (2012)
21. T.Y. Choi, D.J. Hwang, C.P. Grigoropoulos (2002) Femtosecond laser induced ablation of
crystalline silicon upon double beam irradiation. Appl. Surf. Sci. 197, 720–725 (2002)
22. Y. Nakata, T. Okada, M. Maeda, Fabrication of dot matrix, comb, and nanowire structures using
laser ablation by interfered femtosecond laser beams. Appl. Phys. Lett. 81(22), 4239–4241
(2002)
23. G. Kamlage, T. Bauer, A. Ostendorf, B.N. Chichkov, Deep drilling of metals by femtosecond
laser pulses. Appl. Phys. A 77(2), 307–310 (2003)
24. Q. Wang, A. Chen, S. Li, H. Qi, Y. Qi, Hu. Zhan, M. Jin, Influence of ambient pressure on the
ablation hole in femtosecond laser drilling Cu. Appl. Opt. 54(27), 8235–8240 (2015)
25. G. Deng, G. Feng, S. Zhou, Experimental and FDTD study of silicon surface morphology
induced by femtosecond laser irradiation at a high substrate temperature. Opt. Express 25(7),
7818–7827 (2017)
26. L.S. Jiao, S.K. Moon, E.Y.K. Ng, H.Y. Zheng, H.S. Son, Influence of substrate heating on hole
geometry and spatter area in femtosecond laser drilling of silicon. Appl. Phys. Lett. 104(18),
181902 (2014)
27. J.H. Klein-Wiele, J. Bekesi, P. Simon, Sub-micron patterning of solid materials with ultraviolet
femtosecond pulses. Appl. Phys. A 79(4), 775–778 (2004)
28. F. He, Y. Cheng, L. Qiao, C. Wang, Z. Xu, K. Sugioka, K. Midorikawa, J. Wu, Two-photon
fluorescence excitation with a microlens fabricated on the fused silica chip by femtosecond
laser micromachining. Appl. Phys. Lett. 96(4), 041108-041108-3 (2010)