242
G. Feng et al.
7.5 Applications
Femtosecond lasers are widely used in the fields of ultra-precision processing, microelectronic device manufacturing, medical, high-density information storage, and
recording, which are characterized by a small thermal effect, high precision, and
wide processing range. These advanced technologies will play an important role in
revealing the microscopic world as well as science and technology.
With the development of miniaturized products and application of components,
the demand for high-quality micro-holes is increasing in the industry. Among them,
high-quality micro-holes are used in aeronautical manufacturing [50], biological
devices [51], micro-sensing manufacturing [52, 53], micro-flow devices [54, 55],
the new energy field [56], micro-lens [57, 58], ignition target for application to
laser-driven inertial confinement fusion (ICF) [59, 60], etc.
During the last two decades, microfluidic systems have attracted considerable
attention due to microfluidic system’s highly integrating and minimizing. Meanwhile, microfluidic systems can be used for a series of chemical and biological analysis applications [61–63].Microfluidic channels are the key components of a micrototal analysis system (μ-TAS) [64]; thus, the research about them is imminent. So
far, photolithography is still a main way of microfluidic channels fabrication which
is actually a two-dimensional planar fabrication technology [65, 66]. Therefore,
fabrication of three-dimensional (3D) microfluidic structures by photolithographybased techniques requires additional stacking and bonding, leading to an increase
in complexity and cost. A main method for achieving 3D microfluidic structures in
transparent substrates is to use FLDW as demonstrated by many groups [67, 68]. The
microfluidic structures fabricated by FLDW which is a maskless fabrication technique have been found to be comprehensive applications, such as single-cell manipulation, analytics, and label-free protein detection [69], microfluidic waveguide lasers
[70], nano-aquarium for dynamic observation of living cells [71], and optofluidic
sensors with various functions including refractive index monitoring [72].
References
1. J. Krüger, W. Kautek, Ultrashort pulse-laser interaction with dielectrics and polymers. Adv.
Polym. Sci. 168, 247–290 (2004)
2. R. Le Harzic, N. Huot, E. Audouard, C. Jonin, Comparison of heat-affected zones due to
nanosecond and femtosecond laser pulses using transmission electronic microscopy[J]. Appl.
Phys. Lett. 80(21), 3886–3888 (2002)
3. S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B.N. Chichkov, B. Wellegehausen, H. Welling,
Ablation of metals by ultrashort laser pulses[J]. J. Opt. Soc. Am. B 14(10), 2716–2722 (1999)
4. X. Li, L. Jiang, H.L.T. Cong, Transient localized material properties changes by ultrafast laserpulse manipulation of electron dynamics in micro/nano manufacturing. Mater. Res. Soc. Symp.
Proc. 1365 (2011)
5. H.-B. Sun, S. Kawata, Two-photon laser precision microfabrication and its applications to
micro-nano devices and systems[J]. J. Lightwave Technol. 21(3), 624 (2003)
G. Feng et al.
7.5 Applications
Femtosecond lasers are widely used in the fields of ultra-precision processing, microelectronic device manufacturing, medical, high-density information storage, and
recording, which are characterized by a small thermal effect, high precision, and
wide processing range. These advanced technologies will play an important role in
revealing the microscopic world as well as science and technology.
With the development of miniaturized products and application of components,
the demand for high-quality micro-holes is increasing in the industry. Among them,
high-quality micro-holes are used in aeronautical manufacturing [50], biological
devices [51], micro-sensing manufacturing [52, 53], micro-flow devices [54, 55],
the new energy field [56], micro-lens [57, 58], ignition target for application to
laser-driven inertial confinement fusion (ICF) [59, 60], etc.
During the last two decades, microfluidic systems have attracted considerable
attention due to microfluidic system’s highly integrating and minimizing. Meanwhile, microfluidic systems can be used for a series of chemical and biological analysis applications [61–63].Microfluidic channels are the key components of a micrototal analysis system (μ-TAS) [64]; thus, the research about them is imminent. So
far, photolithography is still a main way of microfluidic channels fabrication which
is actually a two-dimensional planar fabrication technology [65, 66]. Therefore,
fabrication of three-dimensional (3D) microfluidic structures by photolithographybased techniques requires additional stacking and bonding, leading to an increase
in complexity and cost. A main method for achieving 3D microfluidic structures in
transparent substrates is to use FLDW as demonstrated by many groups [67, 68]. The
microfluidic structures fabricated by FLDW which is a maskless fabrication technique have been found to be comprehensive applications, such as single-cell manipulation, analytics, and label-free protein detection [69], microfluidic waveguide lasers
[70], nano-aquarium for dynamic observation of living cells [71], and optofluidic
sensors with various functions including refractive index monitoring [72].
References
1. J. Krüger, W. Kautek, Ultrashort pulse-laser interaction with dielectrics and polymers. Adv.
Polym. Sci. 168, 247–290 (2004)
2. R. Le Harzic, N. Huot, E. Audouard, C. Jonin, Comparison of heat-affected zones due to
nanosecond and femtosecond laser pulses using transmission electronic microscopy[J]. Appl.
Phys. Lett. 80(21), 3886–3888 (2002)
3. S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B.N. Chichkov, B. Wellegehausen, H. Welling,
Ablation of metals by ultrashort laser pulses[J]. J. Opt. Soc. Am. B 14(10), 2716–2722 (1999)
4. X. Li, L. Jiang, H.L.T. Cong, Transient localized material properties changes by ultrafast laserpulse manipulation of electron dynamics in micro/nano manufacturing. Mater. Res. Soc. Symp.
Proc. 1365 (2011)
5. H.-B. Sun, S. Kawata, Two-photon laser precision microfabrication and its applications to
micro-nano devices and systems[J]. J. Lightwave Technol. 21(3), 624 (2003)