244
G. Feng et al.
29. H. Huang, L.-M. Yang, J. Liu, Micro-hole drilling and cutting using femtosecond fiber laser.
Opt. Eng. 53(5), 051513–051513 (2014)
30. Z. Deng, Q. Yang, F. Chen, X. Meng, H. Bian, J. Yong, C. Shan, X. Hou, Fabrication of largearea concave microlens array on silicon by femtosecond laser micromachining. Opt. Lett. 40(9),
1928–1931 (2015)
31. M.E. Shaheen, J.E. Gagnon, B.J. Fryer, Experimental study on 785 nm femtosecond laser
ablation of sapphire in air. Laser Phys. Lett. 12(6), 066103 (2015)
32. J.M. Liu, Simple technique for measurements of pulsed Gaussian-beam spot sizes. Opt. Lett.
7(5), 196–198 (1982)
33. D. Gómez, I. Goenaga, On the incubation effect on two thermoplastics when irradiated with
ultrashort laser pulses: broadening effects when machining microchannels. Appl. Surf. Sci.
253(4), 2230–2236 (2006)
34. X. Ni, C. Wang, Z. Wang, M. Hu, Y. Li, L. Chai, The study of nanojoule femtosecond laser
ablation on organic glass. Chin. Opt. Lett. 1(7), 429–431 2003
35. Z. Wang, G. Feng, S. Wang, G. Li, S. Dai, S. Zhou, Improving the quality of femtosecond laser
processing micro-hole array by coated with aluminum film on fused silica sheet. Optik 128,
178–184 (2017)
36. Z. Wang, G. Feng, J. Han, S. Wang, Hu. Ruifeng, G. Li, S. Dai, S. Zhou, Fabrication of
microhole arrays on coated silica sheet using femtosecond laser. Opt. Eng. 55(10), 105101
(2016)
37. V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, P.L. Cavallotti,
Fabrication of long microchannels with circular cross section using astigmatically shaped
femtosecond laser pulses and chemical etching. Appl. Phys. Lett. 88(19), 191107 (2006)
38. Y. Bellouard, A. Said, M. Dugan, P. Bado, Fabrication of high-aspect ratio, micro-fluidic
channels and tunnels using femtosecond laser pulses and chemical etching. Opt. Exp. 12(10),
2120–2129 (2004)
39. D.N. Vitek, D.E. Adams, A. Johnson, P.S. Tsai, S. Backus, C.G. Durfee, D. Kleinfeld,
J.A. Squier, Temporally focused femtosecond laser pulses for low numerical aperture
micromachining through optically transparent materials. Opt. Express 18(17), 18086–18094
(2010)
40. C. Hnatovsky, R.S. Taylor, E. Simova, P.P. Rajeev, D.M. Rayner, V.R. Bhardwaj, P.B. Corkum,
Fabrication of microchannels in glass using focused femtosecond laser radiation and selective
chemical etching. Appl. Phys. A 84(1–2), 47–61 (2006)
41. F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa,
Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a
femtosecond laser. Opt. Lett. 35(3), 282–284 (2010)
42. K.C. Vishnubhatla, N. Bellini, R. Ramponi, G. Cerullo, R. Osellame, Shape control of
microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching.
Opt. Exp. 17(10), 8685–8695 (2009)
43. S. He, F. Chen, K. Liu, Q. Yang, H. Liu, H. Bian, X. Meng, C. Shan, J. Si, Y. Zhao, Fabrication
of three-dimensional helical microchannels with arbitrary length and uniform diameter inside
fused silica. Opt. Lett. 37(18), 3825–3827 (2012)
44. Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, Threedimensional microfluidic channel with arbitrary length and configuration fabricated inside glass
by femtosecond laser direct writing. Opt. Lett. 35(19), 3225–3227 (2010)
45. S. Wang, G. Feng, S. Zhou, Microsized structures assisted nanostructure formation on ZnSe
wafer by femtosecond laser irradiation. Appl. Phys. Lett. 105, 253110 (2014)
46. S. Wang, G. Feng, Femtosecond laser induced surface structuring on silicon by diffractionassisted micropatterning. Proc. SPIE 9255, 925540 (2015)
47. G. Li, G. Feng, S. Wang, H. Zhang, Z. Wang, S. Zhou, Femtosecond laser assisted fabrication
of networked semi-occlusive microfluidic channel on fused silica glass surface. Optik (2017)
48. S. Kiyama, S. Matsuo, S. Hashimoto, Y. Morihira, Examination of etching agent and
etching mechanism on femotosecond laser microfabrication of channels inside vitreous silica
substrates†. J. Phys. Chem. C 113(27), 11560–11566 (2009)
G. Feng et al.
29. H. Huang, L.-M. Yang, J. Liu, Micro-hole drilling and cutting using femtosecond fiber laser.
Opt. Eng. 53(5), 051513–051513 (2014)
30. Z. Deng, Q. Yang, F. Chen, X. Meng, H. Bian, J. Yong, C. Shan, X. Hou, Fabrication of largearea concave microlens array on silicon by femtosecond laser micromachining. Opt. Lett. 40(9),
1928–1931 (2015)
31. M.E. Shaheen, J.E. Gagnon, B.J. Fryer, Experimental study on 785 nm femtosecond laser
ablation of sapphire in air. Laser Phys. Lett. 12(6), 066103 (2015)
32. J.M. Liu, Simple technique for measurements of pulsed Gaussian-beam spot sizes. Opt. Lett.
7(5), 196–198 (1982)
33. D. Gómez, I. Goenaga, On the incubation effect on two thermoplastics when irradiated with
ultrashort laser pulses: broadening effects when machining microchannels. Appl. Surf. Sci.
253(4), 2230–2236 (2006)
34. X. Ni, C. Wang, Z. Wang, M. Hu, Y. Li, L. Chai, The study of nanojoule femtosecond laser
ablation on organic glass. Chin. Opt. Lett. 1(7), 429–431 2003
35. Z. Wang, G. Feng, S. Wang, G. Li, S. Dai, S. Zhou, Improving the quality of femtosecond laser
processing micro-hole array by coated with aluminum film on fused silica sheet. Optik 128,
178–184 (2017)
36. Z. Wang, G. Feng, J. Han, S. Wang, Hu. Ruifeng, G. Li, S. Dai, S. Zhou, Fabrication of
microhole arrays on coated silica sheet using femtosecond laser. Opt. Eng. 55(10), 105101
(2016)
37. V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, P.L. Cavallotti,
Fabrication of long microchannels with circular cross section using astigmatically shaped
femtosecond laser pulses and chemical etching. Appl. Phys. Lett. 88(19), 191107 (2006)
38. Y. Bellouard, A. Said, M. Dugan, P. Bado, Fabrication of high-aspect ratio, micro-fluidic
channels and tunnels using femtosecond laser pulses and chemical etching. Opt. Exp. 12(10),
2120–2129 (2004)
39. D.N. Vitek, D.E. Adams, A. Johnson, P.S. Tsai, S. Backus, C.G. Durfee, D. Kleinfeld,
J.A. Squier, Temporally focused femtosecond laser pulses for low numerical aperture
micromachining through optically transparent materials. Opt. Express 18(17), 18086–18094
(2010)
40. C. Hnatovsky, R.S. Taylor, E. Simova, P.P. Rajeev, D.M. Rayner, V.R. Bhardwaj, P.B. Corkum,
Fabrication of microchannels in glass using focused femtosecond laser radiation and selective
chemical etching. Appl. Phys. A 84(1–2), 47–61 (2006)
41. F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa,
Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a
femtosecond laser. Opt. Lett. 35(3), 282–284 (2010)
42. K.C. Vishnubhatla, N. Bellini, R. Ramponi, G. Cerullo, R. Osellame, Shape control of
microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching.
Opt. Exp. 17(10), 8685–8695 (2009)
43. S. He, F. Chen, K. Liu, Q. Yang, H. Liu, H. Bian, X. Meng, C. Shan, J. Si, Y. Zhao, Fabrication
of three-dimensional helical microchannels with arbitrary length and uniform diameter inside
fused silica. Opt. Lett. 37(18), 3825–3827 (2012)
44. Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, Threedimensional microfluidic channel with arbitrary length and configuration fabricated inside glass
by femtosecond laser direct writing. Opt. Lett. 35(19), 3225–3227 (2010)
45. S. Wang, G. Feng, S. Zhou, Microsized structures assisted nanostructure formation on ZnSe
wafer by femtosecond laser irradiation. Appl. Phys. Lett. 105, 253110 (2014)
46. S. Wang, G. Feng, Femtosecond laser induced surface structuring on silicon by diffractionassisted micropatterning. Proc. SPIE 9255, 925540 (2015)
47. G. Li, G. Feng, S. Wang, H. Zhang, Z. Wang, S. Zhou, Femtosecond laser assisted fabrication
of networked semi-occlusive microfluidic channel on fused silica glass surface. Optik (2017)
48. S. Kiyama, S. Matsuo, S. Hashimoto, Y. Morihira, Examination of etching agent and
etching mechanism on femotosecond laser microfabrication of channels inside vitreous silica
substrates†. J. Phys. Chem. C 113(27), 11560–11566 (2009)