307
Modeling Process Variability in Scaled MOSFETs
TABLE 8.4 (Continued )
Process Variability-Sensitive BSIM4 Model Parameters
Compact Model
Parameter
Typical
Value
(M
0 )
Local Component
of Model Parameter
Global Component
of Model Parameter
Compact Model
Parameter for MC
Statistical Analysis
σ σM
mismacth_z
PDF for MC
Analysis
σ σM
global z
_
PDF for MC
Analysis
RDSW
rdsw0
σ
rdsw z
_
σ
rdsw z agauss
_
( , , )
0 1 3
rdsw
agauss
rdsw z
0
0 1 3
+ σ
_
( , , )
CGSL/CGDL
cgl0
*
*
σ
cgl z
_
σ
cgl z agauss
_
( , , )
0 1 3
cgl
a gauss
cgl z
0
0 1 3
+ σ
_
( , , )
CGSO/CGDO
cgo0
*
*
σ
cgo z
_
σ
cgo z agauss
_
( , , )
0 1 3
cgo
a gauss
cgo z
0
0 1 3
+ σ
_
( , , )
CJS/CJD
cj0
*
*
σ
cj z
_
σ
cj z agauss
_
( , , )
0 1 3
cj
agauss
cj z
0
0 1 3
+ σ
_
( , , )
CJSWS/CJSWD
cjsw0
*
*
σ
cjsw z
_
σ
cjsw z agauss
_
( , , )
0 1 3
cjsw
agauss
cjsw z
0
0 1 3
+ σ
_
( , , )
CJSWGS/CJSWGS
cjswg0
*
*
σ
cjswg z
_
σ
cjswg z agauss
_
( , , )
0 1 3
cjswg
a gauss
cjswg z
0
0 1 3
+ σ
_
( , , )
Source:
Data from S.K. Saha, IEEE Access,
2, 104–115, 2014.