30 Development of Electrostatic Linear Motor for Insect-Type …
437
Fig. 30.16 Rhombus-shaped
spring
F S1 = x × k = x ×
Ebh
3
6l 3
(30.4)
The rhombus-shaped spring has a structure in which 11 springs of the rhombusshaped unit stack, as shown in Fig. 30.16. Figure 30.17 shows the schematic view of
the rhombus-shaped spring motion. Since the shuttle of the electrostatic linear motor
drive 150 µm to the left and right. Shuttle maximum displacement x Max = 150 µm.
Fig. 30.17 Schematic view
of the rhombus-shaped
spring motion
437
Fig. 30.16 Rhombus-shaped
spring
F S1 = x × k = x ×
Ebh
3
6l 3
(30.4)
The rhombus-shaped spring has a structure in which 11 springs of the rhombusshaped unit stack, as shown in Fig. 30.16. Figure 30.17 shows the schematic view of
the rhombus-shaped spring motion. Since the shuttle of the electrostatic linear motor
drive 150 µm to the left and right. Shuttle maximum displacement x Max = 150 µm.
Fig. 30.17 Schematic view
of the rhombus-shaped
spring motion