30 Development of Electrostatic Linear Motor for Insect-Type …
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Fig. 30.13 Schematic view
of the comb teeth of the
electrostatic actuator
Since there are 70 comb teeth per the electrostatic actuator, and two electrostatic
actuators deliver simultaneously, the generated force F A of the electrostatic actuator
is expressed by Eq. (30.2).
F A = 2×70 × F T
(30.2)
Figure 30.14 shows the transfer of force to the shuttle by the electrostatic actuator.
As shown in Fig. 30.14, the arm collides with the shuttle and push the shuttle. Further
movement causes the angle of the arm to change from 20° to 21°, pushing the shuttle
1 µm. The arm divides the output F A of the electrostatic actuator into forces F H in
Fig. 30.14 Transfer of force
to the shuttle by the
electrostatic actuator