434
G. Osada et al.
Fig. 30.12 Motion of the
shuttle using the electrostatic
actuator
30.5.3 Output of Electrostatic Linear Motor
Figure 30.13 shows the schematic view of the comb teeth of the electrostatic actuator.
The electrostatic actuator can generate an electrostatic force between the comb teeth
by applying a voltage. The generated force F T of the electrostatic actuator can be
determined from the dielectric constant ε, the comb teeth distance G 1 , G 2 , length L,
thickness h, and the voltage V applied to the electrostatic actuator, as in Eq. (30.1).
F T =
εhL
2
1
G 1
2
−
1
G 2
2
V
2
(30.1)