30 Development of Electrostatic Linear Motor for Insect-Type …
433
Fig. 30.11 Electrostatic
linear motor
actuators, the rhombus-shaped spring to assist the driving of the electrostatic linear
motor, leaf spring that returns driving part of the electrostatic actuator to the original
position, electrodes V D1 , V D2 , V D3 , V D4 , and GND.
30.5.2 Motion of Electrostatic Linear Motor
Figure 30.12 shows the motion of the shuttle using the electrostatic actuator. As
shown in Fig. 30.12, the electrostatic linear motor provides the delivering motion
of the shuttle by driven the two pairs of electrostatic actuators at the same time. By
repeating this delivering motion with four actuators, the shuttle is smoothly delivered
to generate a large displacement. The electrostatic linear motor can be bi-directionally
driving with high accuracy by designed the electrostatic motor on the left and right.
In addition, the electrostatic linear motor is possible 300 µm in total at 150 µm on
the one way of the left and right. The microrobot leg can take sufficiently the action,
because the displacement by the linear drive is more than necessary displacement
for the action of the microrobot leg.