3 Catalysts via Atomic Layer Deposition
73
Table 3.1
ALD processes for metal catalysts and the corresponding catalytic reactions
Metal catalyst
Precursor
Deposition temperature
Support
Catalytic reaction
Pt [15, 16, 20, 21, 161–164] MeCpPtMe
3 –O
2
[15, 21, 161, 163]
MeCpPtMe
3 -O
3 [16, 162, 164]
270 °C [162]
280 °C [164]
300 °C
[15, 16, 21, 163]
320 °C [161]
Al
2 O
3 [15]
TiO
2 [162]
MoS
2 [21]
SrTiO
3 [163]
carbon nanotube
(CNT) [16, 164]
Carbon aerogel [161]
CO oxidation [161]
CO, NO, C
x H
y oxidation
[162]
Water–gas shift [15]
Styrene hydrogenation [16]
Acrolein hydrogenation [163]
Ammonia borane hydrolysis
[164]
Hydrogen evolution reaction
[21]
Oxygen reduction reaction
[20]
Pd [25–30]
Pd(hfac)
2
– CH
2 O [25–30]
100 °C [26]
150 °C [29]
200 °C [25, 27, 28, 30]
C [30]
Al
2 O
3 [25, 26, 29]
ZnO [25]
Ni(OH)
2 [27]
CNT [28]
Methanol decomposition [25,
26]
Ethanol oxidation [27]
Formate oxidation [28]
1,3-butadiene hydrogenation
[29]
Oxygen reduction reaction
[30]
Ir [33, 34]
Ir(acac)
3 –O
2 [33, 34]
200 °C [33,
34]
250 °C [33]
Ƴ-Al 2 O
3 [33]
Zeolite [34]
Toluene hydrogenation [33]
Decalin conversion [34]
Rh [36]
Rh(acac)
3 –O
3 –H
2 [36]
250 °C [36]
Ƴ-Al 2 O
3 [36]
DRM [36]
(continued)