3 Catalysts via Atomic Layer Deposition
99
20. Xu S, Kim Y, Park J et al (2018) Extending the limits of Pt/C catalysts with passivation-gasincorporated atomic layer deposition. Nat Catal 1:624
21. Ren W, Zhang H, Cheng C (2017) Ultrafine Pt nanoparticles decorated MoS 2 nanosheets with
significantly improved hydrogen evolution activity. Electrochim Acta 241:316
22. Elam JW, Zinovev A, Han CY et al (2006) Atomic layer deposition of palladium films on
Al 2 O 3 surfaces. Thin Solid Films 515:1664–1673
23. TenEyck GA, Pimanpang S, Bakhru H et al (2006) Atomic layer deposition of Pd on an
oxidized metal substrate. Chem Vap Deposition 12:290–294
24. Senkevich JJ, Tang F, Rogers D et al (2003) Substrate-independent palladium atomic layer
deposition. Chem Vap Deposition 9:258–264
25. Feng H, Elam JW, Libera JA et al (2010) Palladium catalysts synthesized by atomic layer
deposition for methanol decomposition. Chem Mater 22:3133–3142
26. Feng H, Libera JA, Stair PC et al (2011) Subnanometer palladium particles synthesized by
atomic layer deposition. ACS Catal 1:665–673
27. Jiang Y, Chen J, Zhang J et al (2017) Controlled decoration of Pd on Ni (OH) 2 nanoparticles
by atomic layer deposition for high ethanol oxidation activity. Appl Surf Sci 420:214–221
28. Wang J, Liu C, Lushington A et al (2016) Pd on carbon nanotubes-supported Ag for formate
oxidation: the effect of Ag on anti-poisoning performance. Electrochim Acta 210:285–292
29. Hong Y, Du H, Hu Y et al (2015) Precisely controlled porous alumina overcoating on pd
catalyst by atomic layer deposition: enhanced selectivity and durability in hydrogenation of
1,3-butadiene. ACS Catal 5:2735–2739
30. Lei Y, Lu J, Luo X et al (2013) Synthesis of porous carbon supported palladium nanoparticle
catalysts by atomic layer deposition: application for rechargeable lithium-O 2 battery. Nano
Lett 13:4182–4189
31. Aaltonen T, Ritala M, Sammelselg V et al (2004) Atomic layer deposition of iridium thin
films. J. Electrochem Soc 151:489–492
32. Choi BH, Lee JH, Lee HK et al (2011) Effect of interface layer on growth behavior of
atomic-layer-deposited Ir thin film as novel Cu diffusion barrier. Appl Surf Sci 257:9654–9660
33. Silvennoinen RJ, Jylhä OJT, Lindblad M et al (2007) Supported iridium catalysts prepared
by atomic layer deposition: effect of reduction and calcination on activity in toluene
hydrogenation. Catal Lett 114:135–144
34. Vuori H, Silvennoinen RJ, Lindblad M et al (2009) Beta zeolite-supported iridium catalysts
by gas phase deposition. Catal Lett 131:7–15
35. Park KJ, Parsons GN (2006) Selective area atomic layer deposition of rhodium and effective
work function characterization in capacitor structures. Appl Phys Lett 89:043111
36. Li Y, Jiang J, Zhu C et al (2018) The enhanced catalytic performance and stability of Rh/γAl 2 O 3 Catalyst Synthesized By Atomic Layer Deposition (ALD) for methane dry reforming.
Materials 11:172
37. Gould TD, Lubers AM, Neltner BT et al (2013) Synthesis of supported Ni catalysts by atomic
layer deposition. J Catal 303:9–15
38. Gao Z, Dong M, Wang G et al (2015) Multiply confined nickel nanocatalysts produced by
atomic layer deposition for hydrogenation reactions. Angew Chem 54:9006–9010
39. Lindblad M, Lindfors LP, Suntola T (1994) Preparation of Ni/Al 2 O 3 catalysts from vapor
phase by atomic layer epitaxy. Catal Lett 27:323–336
40. Jacobs JP, Lindfors LP, Reintjes JGH et al (1994) The growth mechanism of nickel in the
preparation of Ni/Al 2 O 3 catalysts studied by LEIS, XPS and catalytic activity. Catal Lett
25:315–324
41. Kim DH, Sim JK, Seo HO et al (2013) Carbon dioxide reforming of methane over mesoporous
Ni/SiO 2 catalyst. Fuel 112:111–116
42. Jiang C, Shang Z, Liang X (2015) Chemoselective transfer hydrogenation of nitroarenes
catalyzed by highly dispersed, supported nickel nanoparticles. ACS Cata 5:4814–4818
43. Mårtensson P, Larsson K, Carlsson JO (2000) Atomic layer epitaxy of copper: an ab initio
investigation of the CuCl/H 2 process: III. Reaction barriers. Appl Surface Sci 157:92–100
99
20. Xu S, Kim Y, Park J et al (2018) Extending the limits of Pt/C catalysts with passivation-gasincorporated atomic layer deposition. Nat Catal 1:624
21. Ren W, Zhang H, Cheng C (2017) Ultrafine Pt nanoparticles decorated MoS 2 nanosheets with
significantly improved hydrogen evolution activity. Electrochim Acta 241:316
22. Elam JW, Zinovev A, Han CY et al (2006) Atomic layer deposition of palladium films on
Al 2 O 3 surfaces. Thin Solid Films 515:1664–1673
23. TenEyck GA, Pimanpang S, Bakhru H et al (2006) Atomic layer deposition of Pd on an
oxidized metal substrate. Chem Vap Deposition 12:290–294
24. Senkevich JJ, Tang F, Rogers D et al (2003) Substrate-independent palladium atomic layer
deposition. Chem Vap Deposition 9:258–264
25. Feng H, Elam JW, Libera JA et al (2010) Palladium catalysts synthesized by atomic layer
deposition for methanol decomposition. Chem Mater 22:3133–3142
26. Feng H, Libera JA, Stair PC et al (2011) Subnanometer palladium particles synthesized by
atomic layer deposition. ACS Catal 1:665–673
27. Jiang Y, Chen J, Zhang J et al (2017) Controlled decoration of Pd on Ni (OH) 2 nanoparticles
by atomic layer deposition for high ethanol oxidation activity. Appl Surf Sci 420:214–221
28. Wang J, Liu C, Lushington A et al (2016) Pd on carbon nanotubes-supported Ag for formate
oxidation: the effect of Ag on anti-poisoning performance. Electrochim Acta 210:285–292
29. Hong Y, Du H, Hu Y et al (2015) Precisely controlled porous alumina overcoating on pd
catalyst by atomic layer deposition: enhanced selectivity and durability in hydrogenation of
1,3-butadiene. ACS Catal 5:2735–2739
30. Lei Y, Lu J, Luo X et al (2013) Synthesis of porous carbon supported palladium nanoparticle
catalysts by atomic layer deposition: application for rechargeable lithium-O 2 battery. Nano
Lett 13:4182–4189
31. Aaltonen T, Ritala M, Sammelselg V et al (2004) Atomic layer deposition of iridium thin
films. J. Electrochem Soc 151:489–492
32. Choi BH, Lee JH, Lee HK et al (2011) Effect of interface layer on growth behavior of
atomic-layer-deposited Ir thin film as novel Cu diffusion barrier. Appl Surf Sci 257:9654–9660
33. Silvennoinen RJ, Jylhä OJT, Lindblad M et al (2007) Supported iridium catalysts prepared
by atomic layer deposition: effect of reduction and calcination on activity in toluene
hydrogenation. Catal Lett 114:135–144
34. Vuori H, Silvennoinen RJ, Lindblad M et al (2009) Beta zeolite-supported iridium catalysts
by gas phase deposition. Catal Lett 131:7–15
35. Park KJ, Parsons GN (2006) Selective area atomic layer deposition of rhodium and effective
work function characterization in capacitor structures. Appl Phys Lett 89:043111
36. Li Y, Jiang J, Zhu C et al (2018) The enhanced catalytic performance and stability of Rh/γAl 2 O 3 Catalyst Synthesized By Atomic Layer Deposition (ALD) for methane dry reforming.
Materials 11:172
37. Gould TD, Lubers AM, Neltner BT et al (2013) Synthesis of supported Ni catalysts by atomic
layer deposition. J Catal 303:9–15
38. Gao Z, Dong M, Wang G et al (2015) Multiply confined nickel nanocatalysts produced by
atomic layer deposition for hydrogenation reactions. Angew Chem 54:9006–9010
39. Lindblad M, Lindfors LP, Suntola T (1994) Preparation of Ni/Al 2 O 3 catalysts from vapor
phase by atomic layer epitaxy. Catal Lett 27:323–336
40. Jacobs JP, Lindfors LP, Reintjes JGH et al (1994) The growth mechanism of nickel in the
preparation of Ni/Al 2 O 3 catalysts studied by LEIS, XPS and catalytic activity. Catal Lett
25:315–324
41. Kim DH, Sim JK, Seo HO et al (2013) Carbon dioxide reforming of methane over mesoporous
Ni/SiO 2 catalyst. Fuel 112:111–116
42. Jiang C, Shang Z, Liang X (2015) Chemoselective transfer hydrogenation of nitroarenes
catalyzed by highly dispersed, supported nickel nanoparticles. ACS Cata 5:4814–4818
43. Mårtensson P, Larsson K, Carlsson JO (2000) Atomic layer epitaxy of copper: an ab initio
investigation of the CuCl/H 2 process: III. Reaction barriers. Appl Surface Sci 157:92–100