100
R. Chen et al.
44. Li Z, Rahtu A, Gordon RG (2006) Atomic layer deposition of ultrathin copper metal films
from a liquid copper (I) amidinate precursor. J Electrochem Soc 153:C787–C794
45. Chen CS, Lin JH, Lai TW et al (2009) Active sites on Cu/SiO 2 prepared using the atomic
layer epitaxy technique for a low-temperature water-gas shift reaction. J Catal 263:155–166
46. Gao F, Jiang J, Du L et al (2018) Stable and highly efficient Cu/TiO 2 nanocomposite
photocatalyst prepared through atomic layer deposition. Appl Catal A 568:168–175
47. Najafabadi AT, Khodadadi AA, Parnian MJ et al (2016) Atomic layer deposited Co/γAl 2 O 3 catalyst with enhanced cobalt dispersion and Fischer-Tropsch synthesis activity and
selectivity. Appl Catal A 511:31–46
48. Lee D, Yim S, Kim K, Kim J, Kim K (2008) Formation of Ru nanotubes by atomic Llyer
deposition onto an anodized aluminum oxide template. Electrochem Solid State Lett 11:K61–
K63
49. Lu J, Stair PC (2010) Low temperature ABC-type atomic layer deposition: synthesis of highly
uniform ultrafine supported metal nanoparticles. Angew Chem Int Ed 49:2547–2551
50. Li J, Liang X, King DM, Jiang YB, Weimer AW (2010) Highly dispersed Pt nanoparticle
catalyst prepared by atomic layer deposition. Appl Catal B 97:220–226
51. Hämäläinen J, Hatanpää T, Puukilainen E, Costelle L, Pilvi T, Ritala M, Leskelä M (2010)
(MeCp) Ir (CHD) and molecular oxygen as precursors in atomic layer deposition of iridium.
J Mater Chem 20:7669–7675
52. Wang G, Gao Z, Wan G, Lin S, Yang P, Qin Y (2014) High densities of magnetic nanoparticles supported on graphene fabricated by atomic layer deposition and their use as efficient
synergistic microwave absorbers. Nano Research 7:704–716
53. Yang X, Wang A, Qiao B et al (2013) Single-atom catalysts: a new frontier in heterogeneous
catalysis. Acc Chem Res 44:1740–1748
54. Shekhar M, Wang J, Lee W et al (2012) Size and support effects for the water-gas shift catalysis
over gold nanoparticles supported on model Al 2 O 3 and TiO 2 . J Am Chem Soc 134:4700–4708
55. Cargnello M, Doan-Nguyen V, Gordon T et al (2013) Control of metal nanocrystal size reveals
metal-support interface role for ceria catalysts. Science 341:771–773
56. Enterkin J, Setthapun W, Elam J et al (2011) Propane oxidation over Pt/SrTiO 3 nanocuboids.
ACS Catal 1:629–635
57. Mackus A, Weber M, Thissen N et al (2016) Atomic layer deposition of Pd and Pt nanoparticles
for catalysis: on the mechanisms of nanoparticle formation. Nanotechnology 27:034001
58. Goulas A, Van Ommen JV (2013) Atomic layer deposition of platinum clusters on titania
nanoparticles at atmospheric pressure. J Mater Chem A 1:4647–4650
59. Bui H, Grillo F, Kulkarni S et al (2017) Low-temperature atomic layer deposition delivers
more active and stable Pt-based catalysts. Nanoscale 9:10802–10810
60. Gould T, Lubers A, Corpuz A et al (2015) Controlling nanoscale properties of supported
platinum catalysts through atomic layer deposition. ACS Catal 5:1344–1352
61. Dendooven J, Ramachandran R, Solano E et al (2017) Independent tuning of size and coverage
of supported Pt nanoparticles using atomic layer deposition. Nat Commun 8:1074
62. Zhang L, Banis M, Sun X (2018) Single-atom catalysts by the atomic layer deposition
technique. Natl Sci Rev 5:628–630
63. Cheng N, Stambula S, Wang D et al (2016) Platinum single-atom and cluster catalysis of the
hydrogen evolution reaction. Nat Commun 7:13638
64. Liu X, Tang Y, Shen M et al (2018) Bifunctional CO oxidation over Mn-mullite anchored Pt
sub-nanoclusters via atomic layer deposition. Chem Sci 9:2469–2473
65. Wang C, Gu X, Yan H et al (2017) Water-mediated Mars-van Krevelen mechanism for CO
oxidation on ceria-supported single-atom Pt 1 catalyst. ACS Catal 7:887–891
66. Yan H, Cheng H, Yi H et al (2015) Single-atom Pd 1 /graphene catalyst achieved by atomic
layer deposition: remarkable performance in selective hydrogenation of 1,3-butadiene. J Am
Chem Soc 137:10484–10487
67. Yan H, Lv H, Yi H et al (2018) Understanding the underlying mechanism of improved
selectivity in Pd 1 single-atom catalyzed hydrogenation reaction. J Catal 366:70–79
R. Chen et al.
44. Li Z, Rahtu A, Gordon RG (2006) Atomic layer deposition of ultrathin copper metal films
from a liquid copper (I) amidinate precursor. J Electrochem Soc 153:C787–C794
45. Chen CS, Lin JH, Lai TW et al (2009) Active sites on Cu/SiO 2 prepared using the atomic
layer epitaxy technique for a low-temperature water-gas shift reaction. J Catal 263:155–166
46. Gao F, Jiang J, Du L et al (2018) Stable and highly efficient Cu/TiO 2 nanocomposite
photocatalyst prepared through atomic layer deposition. Appl Catal A 568:168–175
47. Najafabadi AT, Khodadadi AA, Parnian MJ et al (2016) Atomic layer deposited Co/γAl 2 O 3 catalyst with enhanced cobalt dispersion and Fischer-Tropsch synthesis activity and
selectivity. Appl Catal A 511:31–46
48. Lee D, Yim S, Kim K, Kim J, Kim K (2008) Formation of Ru nanotubes by atomic Llyer
deposition onto an anodized aluminum oxide template. Electrochem Solid State Lett 11:K61–
K63
49. Lu J, Stair PC (2010) Low temperature ABC-type atomic layer deposition: synthesis of highly
uniform ultrafine supported metal nanoparticles. Angew Chem Int Ed 49:2547–2551
50. Li J, Liang X, King DM, Jiang YB, Weimer AW (2010) Highly dispersed Pt nanoparticle
catalyst prepared by atomic layer deposition. Appl Catal B 97:220–226
51. Hämäläinen J, Hatanpää T, Puukilainen E, Costelle L, Pilvi T, Ritala M, Leskelä M (2010)
(MeCp) Ir (CHD) and molecular oxygen as precursors in atomic layer deposition of iridium.
J Mater Chem 20:7669–7675
52. Wang G, Gao Z, Wan G, Lin S, Yang P, Qin Y (2014) High densities of magnetic nanoparticles supported on graphene fabricated by atomic layer deposition and their use as efficient
synergistic microwave absorbers. Nano Research 7:704–716
53. Yang X, Wang A, Qiao B et al (2013) Single-atom catalysts: a new frontier in heterogeneous
catalysis. Acc Chem Res 44:1740–1748
54. Shekhar M, Wang J, Lee W et al (2012) Size and support effects for the water-gas shift catalysis
over gold nanoparticles supported on model Al 2 O 3 and TiO 2 . J Am Chem Soc 134:4700–4708
55. Cargnello M, Doan-Nguyen V, Gordon T et al (2013) Control of metal nanocrystal size reveals
metal-support interface role for ceria catalysts. Science 341:771–773
56. Enterkin J, Setthapun W, Elam J et al (2011) Propane oxidation over Pt/SrTiO 3 nanocuboids.
ACS Catal 1:629–635
57. Mackus A, Weber M, Thissen N et al (2016) Atomic layer deposition of Pd and Pt nanoparticles
for catalysis: on the mechanisms of nanoparticle formation. Nanotechnology 27:034001
58. Goulas A, Van Ommen JV (2013) Atomic layer deposition of platinum clusters on titania
nanoparticles at atmospheric pressure. J Mater Chem A 1:4647–4650
59. Bui H, Grillo F, Kulkarni S et al (2017) Low-temperature atomic layer deposition delivers
more active and stable Pt-based catalysts. Nanoscale 9:10802–10810
60. Gould T, Lubers A, Corpuz A et al (2015) Controlling nanoscale properties of supported
platinum catalysts through atomic layer deposition. ACS Catal 5:1344–1352
61. Dendooven J, Ramachandran R, Solano E et al (2017) Independent tuning of size and coverage
of supported Pt nanoparticles using atomic layer deposition. Nat Commun 8:1074
62. Zhang L, Banis M, Sun X (2018) Single-atom catalysts by the atomic layer deposition
technique. Natl Sci Rev 5:628–630
63. Cheng N, Stambula S, Wang D et al (2016) Platinum single-atom and cluster catalysis of the
hydrogen evolution reaction. Nat Commun 7:13638
64. Liu X, Tang Y, Shen M et al (2018) Bifunctional CO oxidation over Mn-mullite anchored Pt
sub-nanoclusters via atomic layer deposition. Chem Sci 9:2469–2473
65. Wang C, Gu X, Yan H et al (2017) Water-mediated Mars-van Krevelen mechanism for CO
oxidation on ceria-supported single-atom Pt 1 catalyst. ACS Catal 7:887–891
66. Yan H, Cheng H, Yi H et al (2015) Single-atom Pd 1 /graphene catalyst achieved by atomic
layer deposition: remarkable performance in selective hydrogenation of 1,3-butadiene. J Am
Chem Soc 137:10484–10487
67. Yan H, Lv H, Yi H et al (2018) Understanding the underlying mechanism of improved
selectivity in Pd 1 single-atom catalyzed hydrogenation reaction. J Catal 366:70–79