98
R. Chen et al.
substrate also deteriorates the deposition uniformity. The ultimate solutions hinge
critically on the development of new ALD processes and equipment to accelerate
deposition rate and utilization efficiency of precursors.
Acknowledgements The authors gratefully thank Yun Lang, Miao Gong, Jiaming Cai, Kai Qu, and
Yuanting Tang for assisting the collection and organization of corresponding figures and references.
References
1. Zhong L, Yu F, An Y et al (2016) Cobalt carbide nanoprisms for direct production of lower
olefins from syngas. Nature 538:84–87
2. Li L, Zhang N, Huang X, Liu et al (2018) Hydrothermal stability of core–shell
Pd@Ce 0.5 Zr 0.5 O 2 /Al 2 O 3 catalyst for automobile three-way reaction. ACS Catal 8:3222–3231
3. García-Diéguez M, Pieta IS, Herrera MC, Larrubia MA, Alemany LJ (2010) Nanostructured
Pt-and Ni-based catalysts for CO 2 -reforming of methane. J Catal 270:136–145
4. Meng Y, Song W, Huang H, Ren Z, Chen SY, Suib SL (2014) Structure–property relationship of bifunctional MnO 2 nanostructures: highly efficient, ultra-stable electrochemical water
oxidation and oxygen reduction reaction catalysts identified in alkaline media. J Am Chem
Soc 136:11452–11464
5. Yin P, Yao T, Wu Y, Zheng L et al (2016) Single cobalt atoms with precise N-coordination as
superior oxygen reduction reaction catalysts. Angew Chem Int Ed 55:10800–10805
6. Cao K, Cai J, Liu X (2018) Catalysts design and synthesis via selective atomic layer deposition.
J Vac Sci Technol, A 36:010801
7. Hämäläinen J (2013) Atomic layer deposition of noble metal oxide and noble metal thin films.
University of Helsinki, Finland
8. George SM (2010) Atomic layer deposition: an overview. Chem Rev 110:111–131
9. Puurunen RL (2005) Surface chemistry of atomic layer deposition: A case study for the
trimethylaluminum/water process. J Appl Phys 97:121301
10. Miikkulainen V, Leskelä M, Ritala et al (2013) Crystallinity of inorganic films grown by
atomic layer deposition: Overview and general trends. J Appl Phys 113:021301
11. Lim BS, Rahtu A, Gordon RG (2003) Atomic layer deposition of transition metals. Nat Mater
2:749–754
12. Johnson RW, Hultqvist A, Bent SF (2014) A brief review of atomic layer deposition: from
fundamentals to applications. Mater Today 17:236–246
13. Johansson AC, Larsen JV, Verheijen MA et al (2014) Electrocatalytic activity of atomic layer
deposited Pt-Ru catalysts onto N-doped carbon nanotubes. J Catal 311:481–486
14. Hämäläinen J, Rital M, Leskelä M (2013) Atomic layer deposition of noble metals and their
oxides. Chem Mater 26:786–801
15. Setthapun W, Williams WD, Kim S et al (2010) Genesis and evolution of surface species
during Pt atomic layer deposition on oxide supports characterized by in situ XAFS analysis
and water- gas shift reaction. J Phys Chem C 114:9758–9771
16. Li J, Zhang B, Chen Y et al (2015) Styrene hydrogenation performance of Pt nanoparticles
with controlled size prepared by atomic layer deposition. Catal Sci Technol 5:4218–4223
17. Aaltonen T, Ritala M, Tung YL et al (2004) Atomic layer deposition of noble metals:
Exploration of the low limit of the deposition temperature. J Mater Res 19:3353–3358
18. Zhou Y, King DM, Liang X et al (2010) Optimal preparation of Pt/TiO 2 photocatalysts using
atomic layer deposition. Appl Catal B 101:54–60
19. Hämäläinen J, Puukilainen E, Sajavaara et al (2013) Low temperature atomic layer deposition
of noble metals using ozone and molecular hydrogen as reactants. Thin Solid Films 531:243–
250
R. Chen et al.
substrate also deteriorates the deposition uniformity. The ultimate solutions hinge
critically on the development of new ALD processes and equipment to accelerate
deposition rate and utilization efficiency of precursors.
Acknowledgements The authors gratefully thank Yun Lang, Miao Gong, Jiaming Cai, Kai Qu, and
Yuanting Tang for assisting the collection and organization of corresponding figures and references.
References
1. Zhong L, Yu F, An Y et al (2016) Cobalt carbide nanoprisms for direct production of lower
olefins from syngas. Nature 538:84–87
2. Li L, Zhang N, Huang X, Liu et al (2018) Hydrothermal stability of core–shell
Pd@Ce 0.5 Zr 0.5 O 2 /Al 2 O 3 catalyst for automobile three-way reaction. ACS Catal 8:3222–3231
3. García-Diéguez M, Pieta IS, Herrera MC, Larrubia MA, Alemany LJ (2010) Nanostructured
Pt-and Ni-based catalysts for CO 2 -reforming of methane. J Catal 270:136–145
4. Meng Y, Song W, Huang H, Ren Z, Chen SY, Suib SL (2014) Structure–property relationship of bifunctional MnO 2 nanostructures: highly efficient, ultra-stable electrochemical water
oxidation and oxygen reduction reaction catalysts identified in alkaline media. J Am Chem
Soc 136:11452–11464
5. Yin P, Yao T, Wu Y, Zheng L et al (2016) Single cobalt atoms with precise N-coordination as
superior oxygen reduction reaction catalysts. Angew Chem Int Ed 55:10800–10805
6. Cao K, Cai J, Liu X (2018) Catalysts design and synthesis via selective atomic layer deposition.
J Vac Sci Technol, A 36:010801
7. Hämäläinen J (2013) Atomic layer deposition of noble metal oxide and noble metal thin films.
University of Helsinki, Finland
8. George SM (2010) Atomic layer deposition: an overview. Chem Rev 110:111–131
9. Puurunen RL (2005) Surface chemistry of atomic layer deposition: A case study for the
trimethylaluminum/water process. J Appl Phys 97:121301
10. Miikkulainen V, Leskelä M, Ritala et al (2013) Crystallinity of inorganic films grown by
atomic layer deposition: Overview and general trends. J Appl Phys 113:021301
11. Lim BS, Rahtu A, Gordon RG (2003) Atomic layer deposition of transition metals. Nat Mater
2:749–754
12. Johnson RW, Hultqvist A, Bent SF (2014) A brief review of atomic layer deposition: from
fundamentals to applications. Mater Today 17:236–246
13. Johansson AC, Larsen JV, Verheijen MA et al (2014) Electrocatalytic activity of atomic layer
deposited Pt-Ru catalysts onto N-doped carbon nanotubes. J Catal 311:481–486
14. Hämäläinen J, Rital M, Leskelä M (2013) Atomic layer deposition of noble metals and their
oxides. Chem Mater 26:786–801
15. Setthapun W, Williams WD, Kim S et al (2010) Genesis and evolution of surface species
during Pt atomic layer deposition on oxide supports characterized by in situ XAFS analysis
and water- gas shift reaction. J Phys Chem C 114:9758–9771
16. Li J, Zhang B, Chen Y et al (2015) Styrene hydrogenation performance of Pt nanoparticles
with controlled size prepared by atomic layer deposition. Catal Sci Technol 5:4218–4223
17. Aaltonen T, Ritala M, Tung YL et al (2004) Atomic layer deposition of noble metals:
Exploration of the low limit of the deposition temperature. J Mater Res 19:3353–3358
18. Zhou Y, King DM, Liang X et al (2010) Optimal preparation of Pt/TiO 2 photocatalysts using
atomic layer deposition. Appl Catal B 101:54–60
19. Hämäläinen J, Puukilainen E, Sajavaara et al (2013) Low temperature atomic layer deposition
of noble metals using ozone and molecular hydrogen as reactants. Thin Solid Films 531:243–
250