Chapter 1
History of Bio-microelectromechanical
Systems (BioMEMS)
Ricardo Garcia-Ramirez and Samira Hosseini
1.1 Introduction
MEMS are miniaturized devices that transduce signals in different domains
using semiconductor manufacturing techniques to produce non-electrical elements
(Council 1998). The acronym MEMS was coined in the United States before the
start of the 1990s by Professor Roger Thomas Howe, along with other scientists,
after microscale fabrication was established as a growing engineering field (Maluf
and Williams 2004). The first conference regarding MEMS was held in Berlin in
1988 as part of the International Conference on Micro, Electro and Optomechanical
Systems and Components (Madou 2011).
MEMS’ potentials arose with microelectronics, as these complex devices became
more sophisticated. Their materials and designs were enhanced in order to perform
better on fixed tasks needed in the microelectronics industry (Madou 2011; Folch
2016; Saliterman 2006). As time and research advanced, biological applications
were added to the domain of their use. Currently, the MEMS industry has
several established milestones in the microfabrication technologies, such as micromolding, photolithography, 3D structure assembly, among others (Borenstein 2008).
Since MEMS could also contain mechanical components including cantilevers or
membranes, they are ideal for fulfilling sensing (pressure and flow sensors) and/or
actuation (optical-beam handling) tasks (Council 1998).
Biomedical or Biological Micro-Electro-Mechanical Systems, more commonly
referred to as BioMEMS, are defined as micro or nano-scaled devices or systems that
are used for processing, delivering, manipulating, or analyzing biological and chemical entities for biological or biomedical applications (Bashir 2004). Even though
its name suggests the incorporation of both electronic and mechanical elements, it
should be acknowledged that these devices do not necessarily integrate all functions in
R. Garcia-Ramirez · S. Hosseini (B)
School of Engineering and Sciences, Tecnologico de Monterrey, Monterrey, Mexico
e-mail: samira.hosseini@tec.mx
© The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer
Nature Singapore Pte Ltd. 2021
S. Hosseini et al., BioMEMS, Lecture Notes in Bioengineering,
https://doi.org/10.1007/978-981-15-6382-9_1
1
History of Bio-microelectromechanical
Systems (BioMEMS)
Ricardo Garcia-Ramirez and Samira Hosseini
1.1 Introduction
MEMS are miniaturized devices that transduce signals in different domains
using semiconductor manufacturing techniques to produce non-electrical elements
(Council 1998). The acronym MEMS was coined in the United States before the
start of the 1990s by Professor Roger Thomas Howe, along with other scientists,
after microscale fabrication was established as a growing engineering field (Maluf
and Williams 2004). The first conference regarding MEMS was held in Berlin in
1988 as part of the International Conference on Micro, Electro and Optomechanical
Systems and Components (Madou 2011).
MEMS’ potentials arose with microelectronics, as these complex devices became
more sophisticated. Their materials and designs were enhanced in order to perform
better on fixed tasks needed in the microelectronics industry (Madou 2011; Folch
2016; Saliterman 2006). As time and research advanced, biological applications
were added to the domain of their use. Currently, the MEMS industry has
several established milestones in the microfabrication technologies, such as micromolding, photolithography, 3D structure assembly, among others (Borenstein 2008).
Since MEMS could also contain mechanical components including cantilevers or
membranes, they are ideal for fulfilling sensing (pressure and flow sensors) and/or
actuation (optical-beam handling) tasks (Council 1998).
Biomedical or Biological Micro-Electro-Mechanical Systems, more commonly
referred to as BioMEMS, are defined as micro or nano-scaled devices or systems that
are used for processing, delivering, manipulating, or analyzing biological and chemical entities for biological or biomedical applications (Bashir 2004). Even though
its name suggests the incorporation of both electronic and mechanical elements, it
should be acknowledged that these devices do not necessarily integrate all functions in
R. Garcia-Ramirez · S. Hosseini (B)
School of Engineering and Sciences, Tecnologico de Monterrey, Monterrey, Mexico
e-mail: samira.hosseini@tec.mx
© The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer
Nature Singapore Pte Ltd. 2021
S. Hosseini et al., BioMEMS, Lecture Notes in Bioengineering,
https://doi.org/10.1007/978-981-15-6382-9_1
1