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List of Abbreviations
SEU: Single-event upset
SGOI: SiGe-on-insulator
SiGe: Silicon-germanium
SIMS: Secondary ion mass spectrometry
SMT: Stress memorisation technique
SMU: Source monitor unit
SNWT: Silicon nanowire transistor
SO: Spin-orbit
SOI: Silicon-on-insulator
SPCM: SPICE process compact model
SPT: Stress proximity technique
SQW: Single quantum well
SRB: Strain-relaxed buffer
SS: Subthreshold slope
SSDOI: Strained Si-directly-on-insulator
SSOI: Strained Si-on-insulator
STI: Shallow trench isolation
TCAD: Technology computer-aided design
TDDB: Time-dependent dielectric breakdown
TG MOSFET: Tri-gate MOSFET
TSV: Through-silicon via
UHVCVD: Ultra-high-vacuum chemical vapour deposition
ULSI: Ultra-large-scale integration
UTB: Ultra-thin body
VCO: Voltage-controlled oscillator
VLS: Vapour-liquid-solid
VLSI: Very-large-scale integration
VS: Virtual substrate
VW: Virtual wafer
VWF: Virtual wafer fabrication