21.4.2 Oxidation of Semiconducting Substrates 710
21.5
Use of Scanning Probe Microscopy in Dip Pen Nanolithography 712
21.6
Use of Scanning Probe Microscopy in Nanomanipulation 716
21.7
Nano-Electromechanical Systems 718
Acknowledgements 720
References 720
Index 724
Contents xv