Structure and Properties of B 4 C
Coatings Obtained by RF Sputtering
with External Magnetic Field
A. V. Taran, I. E. Garkusha, V. S. Taran, R. M. Muratov, T. S. Skoblo,
O. I. Sidashenko, S. P. Romaniuk, T. V. Maltsev, and A. A. Baturin
In this research, the method of synthesizing B 4 C coatings in Bulat-type device by
using an RF plasma source with an external magnetic field is considered, which
is based on the sputtering of the cathode material by high-energy argon ions when
creating plasma in a weak magnetic field. The presence of an external magnetic field
provided a drift and oscillating motion of the electrons and allowed the creation
of plasma in the range of pressures 10 ÷ 10
−2 Pa. The structure and chemical
compositions of the obtained coatings have been investigated by SEM with EDX
and XRF methods. Mechanical and tribological properties of thin B 4 C coatings were
investigated using nanoindentation and ball-on-disk methods.
1 Introduction
Boron carbide (B 4 C) ceramics have excellent physical and mechanical properties:
high melting point and hardness, good abrasion resistance, and excellent resistance
to chemical agents [1–6]. Therefore, boron carbide is used in many industrial applications including cutting tools, drills, aerospace and machinery components, and
A. V. Taran (B) · I. E. Garkusha · V. S. Taran · R. M. Muratov
National Science Center “Kharkiv Institute of Physics and Technology” (NSC KIPT), Institute of
Plasma Physics, Kharkiv, Ukraine
e-mail: avtaran@ukr.net
I. E. Garkusha · T. S. Skoblo · O. I. Sidashenko · S. P. Romaniuk (B) · T. V. Maltsev
National Technical University of Agriculture, Kharkiv, Ukraine
e-mail: romaniuk.khntusg@gmail.com
I. E. Garkusha · A. A. Baturin
National Technical University “Kharkiv Polytechnic Institute”, Kharkiv, Ukraine
I. E. Garkusha
V. N. Karazin Kharkiv National University, Kharkiv, Ukraine
© Springer Nature Switzerland AG 2021
O. Fesenko and L. Yatsenko (eds.), Nanomaterials and Nanocomposites,
Nanostructure Surfaces, and Their Applications, Springer Proceedings
in Physics 246, https://doi.org/10.1007/978-3-030-51905-6_5
51
Coatings Obtained by RF Sputtering
with External Magnetic Field
A. V. Taran, I. E. Garkusha, V. S. Taran, R. M. Muratov, T. S. Skoblo,
O. I. Sidashenko, S. P. Romaniuk, T. V. Maltsev, and A. A. Baturin
In this research, the method of synthesizing B 4 C coatings in Bulat-type device by
using an RF plasma source with an external magnetic field is considered, which
is based on the sputtering of the cathode material by high-energy argon ions when
creating plasma in a weak magnetic field. The presence of an external magnetic field
provided a drift and oscillating motion of the electrons and allowed the creation
of plasma in the range of pressures 10 ÷ 10
−2 Pa. The structure and chemical
compositions of the obtained coatings have been investigated by SEM with EDX
and XRF methods. Mechanical and tribological properties of thin B 4 C coatings were
investigated using nanoindentation and ball-on-disk methods.
1 Introduction
Boron carbide (B 4 C) ceramics have excellent physical and mechanical properties:
high melting point and hardness, good abrasion resistance, and excellent resistance
to chemical agents [1–6]. Therefore, boron carbide is used in many industrial applications including cutting tools, drills, aerospace and machinery components, and
A. V. Taran (B) · I. E. Garkusha · V. S. Taran · R. M. Muratov
National Science Center “Kharkiv Institute of Physics and Technology” (NSC KIPT), Institute of
Plasma Physics, Kharkiv, Ukraine
e-mail: avtaran@ukr.net
I. E. Garkusha · T. S. Skoblo · O. I. Sidashenko · S. P. Romaniuk (B) · T. V. Maltsev
National Technical University of Agriculture, Kharkiv, Ukraine
e-mail: romaniuk.khntusg@gmail.com
I. E. Garkusha · A. A. Baturin
National Technical University “Kharkiv Polytechnic Institute”, Kharkiv, Ukraine
I. E. Garkusha
V. N. Karazin Kharkiv National University, Kharkiv, Ukraine
© Springer Nature Switzerland AG 2021
O. Fesenko and L. Yatsenko (eds.), Nanomaterials and Nanocomposites,
Nanostructure Surfaces, and Their Applications, Springer Proceedings
in Physics 246, https://doi.org/10.1007/978-3-030-51905-6_5
51