The Art and Signs of a Few Good Mechanical Designs in MEMS
55
17. Smith, S.T., Chetwynd, D.G.: Ultraprecision Mechanism Design. Gordon and Breach (1992)
18. Yin, L., Ananthasuresh, G.K.: Design of distributed compliant mechanisms. Mech. Based Des.
Struct. Mach. 31(2), 151–179 (2003)
19. Miller, S.L., Sniegowski, J.J., LaVigne, G., McWhorter, P.J.: Performance trade-offs for a
surface micromachined microengine. In: Proceedings of the SPIE, Micromachined Devices
and Components II, vol. 2882. (1996). https://doi.org/10.1117/12.250702
20. Ye, W., Mukherjee, S.: Design and fabrication of an electrostatic variable gap drive in microelectro-mechanical systems. Comput. Model. Eng. Sci. 1, 111–120 (2000)
21. Silicon-on-insulator Multi-user MEMS Processes (SOIMUMPs) (2020). http://www.memscap.
com/products/mumps/soimumps
22. Howard, J.: Mechanics of Motor Proteins and the Cytoskeleton. Oxford University Press (2005)
23. McAllister, A., Smith, M., Zafirou, K., Day, D., Butler, M.: Apparatus and Method Providing
a Hand-held Sprectrometer. US Patent US20070194239A1 (2007)
24. Saxena, A., Ananthasuresh, G.K.: On an optimal property of compliant topologies. Struct.
Multidiscip. Optim. 19(1), 36–49 (2000)
25. Kota, S., Rodgers, S.M., Hetrick, J.A.: Compliant Displacement-multiplying Apparatus for
Microelectromechanical Systems. US Patent US6175170B1 (2001)
26. Baichapur, G.S., Gugale, H., Maheshwari, A., Bhargav, S.D.B., Ananthasuresh, G.K.: A
Vision-based micro-Newton static force sensor using a displacement-amplifying compliant
mechanism. Mech. Based Des. Struct. Mach. 42(2), 193–210 (2014)
27. Kollimada, S., Khan, S., Balakrishnan, S., Raju. S.R., Suma, M.S., Ananthasuresh, G.K.:
A micro-mechanical compliant device for individual cell-stretching, compression, and insitu force-measurement. In: Proceedings of the International Conference on Manipulation,
Automation, and Robotics at Small Scales. Montreal, Canada (2017)
28. Putty, M., Najafi, K.: A Micromachined vibratory ring gyroscope. In: Proceedings of the Hilton
Head Workshop on Solid State Sensors and Actuators (1995)
29. Guckel, H., Klein, J., Christenson, T., Skrobis, K., Laudon, M., Lovell, E.G.: Thermomagnetic
metal flexure actuators. In: Technical Digest of Solid-State Sensors and Actuators Workshop,
Hilton Head Island, SC, 1992, p. 73 (1992)
30. Timoshenko, S.: Analysis of bimetal thermostats. J. Opt. Soc. Am. 11, 233–255 (1925)
31. Yin, L., Ananthasuresh, G.K.: A novel topology design scheme for the multi-physics problems
of electro-thermally actuated compliant micromechanisms. Sens. Actuators A 97–98, 599–609
(2002)
32. Mankame, N., Ananthasuresh, G.K.: Topology synthesis of electro-thermal-compliant mechanisms using line elements. Struct. Multidiscip. Optim. 26, 209–218 (2004)
33. Sardan, O., Petersen, D.H., Molhave, K., Sigmund, O., Boggild, P.: Topology optimized
electrothermal polysilicon microgrippers. Microelectron. Eng. 85(5–6), 1096–1099 (2008)
34. Mankame, N., Ananthasuresh, G.K.: Comprehensive thermal modeling and characterization of
an electro-thermal-compliant microactuator. J. Micromech. Microeng. 11(5), 452–462 (2001)
35. Awtar, S., Slocum, A.H.: Constraint-based design of parallel kinematic XY flexure mechanisms.
J. Mech. Des. 129(8), 816–830 (2006)
36. Dinesh, M., Ananthasuresh, G.K.: Micromechaical Stages with enhanced range. Int. J. Adv.
Eng. Sci. Appl. Math. 2(1), 35–43 (2010)
37. Baglio, S., Castorina, S., Fortuna, L., Savalli, N.: Scaling Issues and Design of MEMS. WileyInterscience (2008)
38. Ananthasuresh, G.K., Vinoy, K.J., Gopalakrishnan, S., Bhat, K.N., Aatre, V.K.: Chapter 9 in
Micro and Smart Systems: Technology and Modeling. Wiley, New York (2012)
39. Bejan, A., Zane, J.P.: Design in Nature: How the Constructal Law Governs Evolution in Biology,
Physics, Technology, and Social Organization. Anchor Reprint Edition (2013)
40. Yan, S., Wang, F., Sigmund, O.: On the non-optimality of tree structures for heat conduction.
Int. J. Heat Mass Transf. 122, 660–680 (2018)
41. Lakes, R.: Materials with structural hierarchy. Nature 361, 511–515 (1993)
42. Sundaram, M., Ananthasuresh, G.K.: Gustave Eiffel and his optimal structures. Reson. Sci.
Educ. J. 14(8), 849–865 (2009)
55
17. Smith, S.T., Chetwynd, D.G.: Ultraprecision Mechanism Design. Gordon and Breach (1992)
18. Yin, L., Ananthasuresh, G.K.: Design of distributed compliant mechanisms. Mech. Based Des.
Struct. Mach. 31(2), 151–179 (2003)
19. Miller, S.L., Sniegowski, J.J., LaVigne, G., McWhorter, P.J.: Performance trade-offs for a
surface micromachined microengine. In: Proceedings of the SPIE, Micromachined Devices
and Components II, vol. 2882. (1996). https://doi.org/10.1117/12.250702
20. Ye, W., Mukherjee, S.: Design and fabrication of an electrostatic variable gap drive in microelectro-mechanical systems. Comput. Model. Eng. Sci. 1, 111–120 (2000)
21. Silicon-on-insulator Multi-user MEMS Processes (SOIMUMPs) (2020). http://www.memscap.
com/products/mumps/soimumps
22. Howard, J.: Mechanics of Motor Proteins and the Cytoskeleton. Oxford University Press (2005)
23. McAllister, A., Smith, M., Zafirou, K., Day, D., Butler, M.: Apparatus and Method Providing
a Hand-held Sprectrometer. US Patent US20070194239A1 (2007)
24. Saxena, A., Ananthasuresh, G.K.: On an optimal property of compliant topologies. Struct.
Multidiscip. Optim. 19(1), 36–49 (2000)
25. Kota, S., Rodgers, S.M., Hetrick, J.A.: Compliant Displacement-multiplying Apparatus for
Microelectromechanical Systems. US Patent US6175170B1 (2001)
26. Baichapur, G.S., Gugale, H., Maheshwari, A., Bhargav, S.D.B., Ananthasuresh, G.K.: A
Vision-based micro-Newton static force sensor using a displacement-amplifying compliant
mechanism. Mech. Based Des. Struct. Mach. 42(2), 193–210 (2014)
27. Kollimada, S., Khan, S., Balakrishnan, S., Raju. S.R., Suma, M.S., Ananthasuresh, G.K.:
A micro-mechanical compliant device for individual cell-stretching, compression, and insitu force-measurement. In: Proceedings of the International Conference on Manipulation,
Automation, and Robotics at Small Scales. Montreal, Canada (2017)
28. Putty, M., Najafi, K.: A Micromachined vibratory ring gyroscope. In: Proceedings of the Hilton
Head Workshop on Solid State Sensors and Actuators (1995)
29. Guckel, H., Klein, J., Christenson, T., Skrobis, K., Laudon, M., Lovell, E.G.: Thermomagnetic
metal flexure actuators. In: Technical Digest of Solid-State Sensors and Actuators Workshop,
Hilton Head Island, SC, 1992, p. 73 (1992)
30. Timoshenko, S.: Analysis of bimetal thermostats. J. Opt. Soc. Am. 11, 233–255 (1925)
31. Yin, L., Ananthasuresh, G.K.: A novel topology design scheme for the multi-physics problems
of electro-thermally actuated compliant micromechanisms. Sens. Actuators A 97–98, 599–609
(2002)
32. Mankame, N., Ananthasuresh, G.K.: Topology synthesis of electro-thermal-compliant mechanisms using line elements. Struct. Multidiscip. Optim. 26, 209–218 (2004)
33. Sardan, O., Petersen, D.H., Molhave, K., Sigmund, O., Boggild, P.: Topology optimized
electrothermal polysilicon microgrippers. Microelectron. Eng. 85(5–6), 1096–1099 (2008)
34. Mankame, N., Ananthasuresh, G.K.: Comprehensive thermal modeling and characterization of
an electro-thermal-compliant microactuator. J. Micromech. Microeng. 11(5), 452–462 (2001)
35. Awtar, S., Slocum, A.H.: Constraint-based design of parallel kinematic XY flexure mechanisms.
J. Mech. Des. 129(8), 816–830 (2006)
36. Dinesh, M., Ananthasuresh, G.K.: Micromechaical Stages with enhanced range. Int. J. Adv.
Eng. Sci. Appl. Math. 2(1), 35–43 (2010)
37. Baglio, S., Castorina, S., Fortuna, L., Savalli, N.: Scaling Issues and Design of MEMS. WileyInterscience (2008)
38. Ananthasuresh, G.K., Vinoy, K.J., Gopalakrishnan, S., Bhat, K.N., Aatre, V.K.: Chapter 9 in
Micro and Smart Systems: Technology and Modeling. Wiley, New York (2012)
39. Bejan, A., Zane, J.P.: Design in Nature: How the Constructal Law Governs Evolution in Biology,
Physics, Technology, and Social Organization. Anchor Reprint Edition (2013)
40. Yan, S., Wang, F., Sigmund, O.: On the non-optimality of tree structures for heat conduction.
Int. J. Heat Mass Transf. 122, 660–680 (2018)
41. Lakes, R.: Materials with structural hierarchy. Nature 361, 511–515 (1993)
42. Sundaram, M., Ananthasuresh, G.K.: Gustave Eiffel and his optimal structures. Reson. Sci.
Educ. J. 14(8), 849–865 (2009)