54
G. K. Ananthasuresh
and used even if they are obscurely buried in the literature. Sometimes, reinvention
of good designs happens and that is inevitable despite the widespread availability of
research publications.
Acknowledgements The author is indebted to his students in the Multidisciplinary and Multiscale
Design and Device (M2D2) laboratory in Mechanical Engineering at the Indian Institute of Science,
Bengaluru. The synergy that exists among the group members plays a pivotal role in pursuing varied
problems in the realms of compliant mechanisms, MEMS, topology optimization, and biomechanics
of cells. Special thanks to Shamanth Hampali, R. Harisankar, Anoosha Pai, and Nitish Sathyamurthy
who created the solid models of most of the designs presented in this paper.
References
1. Muller, R.S. (ed.): Microelectromechanical Systems: Advanced Materials and Fabrication
Methods. NMAB-483, National Academy Press (1997)
2. Ananthasuresh, G.K. (ed.): Optimal Synthesis Methods for MEMS. Kluwer Academic
Publishers (2003)
3. Tang, W.C., Nguyen, T.-C., Howe, R.T.: Laterally driven polysilicon resonant microstructures.
Sens. Actuators 20(1–2), 25–32 (1989)
4. Aksyuk, V.A., Pardo, F., Bolle, C.A., Arney, S., Giles, C.R., Bishop, D.J.: Lucent Microstar
micromirror array technology for large optical crossconnects. In: Proceedings of the SPIE,
MOEMS and Miniaturized Systems, vol. 4178 (2000). https://doi.org/10.1117/12.396503
5. Krishnan, G., Ananthasuresh, G.K.: Evaluation and design of compliant displacement
amplifying mechanisms for sensor applications. J. Mech. Des. 130(10), 102304, 1–9 (2008)
6. Khan, S., Ananthasuresh, G.K.: Improving the sensitivity and bandwidth of in-plane capacitive
micro-accelerometers using compliant mechanical amplifiers. IEEE J. Microelectromech. Syst.
23(4), 871–887 (2014)
7. Challoner, A.D., Ge, H.H., Liu, J.Y.: Boeing disc resonator gyroscope. In: IEEE/ION Position,
Location, and Navigation Symposium—PLANS 2014 (2014)
8. Hung, E.S., Senturia, S.D.: Extending the travel range of analog-tuned electrostatic actuators.
J. Microelectromech. Syst. 8(4), 497–505 (1999)
9. Que, L., Park, J.-S., Gianchandani, Y.B.: Bent-beam electrothermal actuators-part i: single
beam and cascaded devices. J. Microelectromech. Syst. 10(2), 247–254 (2001)
10. Yang, Y.-J., Liao, H.-H., Huang, K.-H., Huang, Y.-Y., Lin, C.-W., Yang, L.-J., Jaw, F.-S.:
Novel designs of herringbone chaotic mixers. In: Proceedings of the 1st IEEE International
Conference on Nano/Micro Engineered and Molecular Systems (2006)
11. Kollimada, S., Balakrishnan, S., Malhi, C., Raju, S.R., Suma, M.S., Das, S., Ananthasuresh,
G.K.: A micromechanical device for in situ stretching single cells cultured on it. J. Micro-Bio
Robot. 13, 27–37 (2018)
12. Moulton, T., Ananthasuresh, G.K.: Design and manufacture of electro-thermal-compliant micro
devices. Sens. Actuators Phys. 90, 38–48 (2001)
13. Fan, L.-S., Tai, Y.-C., Muller, R.S.: Intergrated movable micromechanical structures for sensors
and actuators. IEEE Trans. Electron Devices 35(6), 724–730 (1988)
14. Mehregany, M., Bart, S.F., Tavrow, L.S., Lang, J.H., Senturia, S.D., Schlecht, M.F.: A study
of three microfabricated variable-capacitance motors. Sens. Actuators A21(22/23), 173–179
(1990)
15. Sandia Ultra-planar Multi-level MEMS Technology (2020). https://www.sandia.gov/mesa/_
assets/documents/design_documents/SUMMiT_V_Dmanual.pdf
16. Kota, S., Ananthasuresh, G.K., Crary, S.B., Wise, K.D.: Design and fabrication of microelectromechanical systems. J. Mech. Des. 116(4), 1081–1088 (1994)
G. K. Ananthasuresh
and used even if they are obscurely buried in the literature. Sometimes, reinvention
of good designs happens and that is inevitable despite the widespread availability of
research publications.
Acknowledgements The author is indebted to his students in the Multidisciplinary and Multiscale
Design and Device (M2D2) laboratory in Mechanical Engineering at the Indian Institute of Science,
Bengaluru. The synergy that exists among the group members plays a pivotal role in pursuing varied
problems in the realms of compliant mechanisms, MEMS, topology optimization, and biomechanics
of cells. Special thanks to Shamanth Hampali, R. Harisankar, Anoosha Pai, and Nitish Sathyamurthy
who created the solid models of most of the designs presented in this paper.
References
1. Muller, R.S. (ed.): Microelectromechanical Systems: Advanced Materials and Fabrication
Methods. NMAB-483, National Academy Press (1997)
2. Ananthasuresh, G.K. (ed.): Optimal Synthesis Methods for MEMS. Kluwer Academic
Publishers (2003)
3. Tang, W.C., Nguyen, T.-C., Howe, R.T.: Laterally driven polysilicon resonant microstructures.
Sens. Actuators 20(1–2), 25–32 (1989)
4. Aksyuk, V.A., Pardo, F., Bolle, C.A., Arney, S., Giles, C.R., Bishop, D.J.: Lucent Microstar
micromirror array technology for large optical crossconnects. In: Proceedings of the SPIE,
MOEMS and Miniaturized Systems, vol. 4178 (2000). https://doi.org/10.1117/12.396503
5. Krishnan, G., Ananthasuresh, G.K.: Evaluation and design of compliant displacement
amplifying mechanisms for sensor applications. J. Mech. Des. 130(10), 102304, 1–9 (2008)
6. Khan, S., Ananthasuresh, G.K.: Improving the sensitivity and bandwidth of in-plane capacitive
micro-accelerometers using compliant mechanical amplifiers. IEEE J. Microelectromech. Syst.
23(4), 871–887 (2014)
7. Challoner, A.D., Ge, H.H., Liu, J.Y.: Boeing disc resonator gyroscope. In: IEEE/ION Position,
Location, and Navigation Symposium—PLANS 2014 (2014)
8. Hung, E.S., Senturia, S.D.: Extending the travel range of analog-tuned electrostatic actuators.
J. Microelectromech. Syst. 8(4), 497–505 (1999)
9. Que, L., Park, J.-S., Gianchandani, Y.B.: Bent-beam electrothermal actuators-part i: single
beam and cascaded devices. J. Microelectromech. Syst. 10(2), 247–254 (2001)
10. Yang, Y.-J., Liao, H.-H., Huang, K.-H., Huang, Y.-Y., Lin, C.-W., Yang, L.-J., Jaw, F.-S.:
Novel designs of herringbone chaotic mixers. In: Proceedings of the 1st IEEE International
Conference on Nano/Micro Engineered and Molecular Systems (2006)
11. Kollimada, S., Balakrishnan, S., Malhi, C., Raju, S.R., Suma, M.S., Das, S., Ananthasuresh,
G.K.: A micromechanical device for in situ stretching single cells cultured on it. J. Micro-Bio
Robot. 13, 27–37 (2018)
12. Moulton, T., Ananthasuresh, G.K.: Design and manufacture of electro-thermal-compliant micro
devices. Sens. Actuators Phys. 90, 38–48 (2001)
13. Fan, L.-S., Tai, Y.-C., Muller, R.S.: Intergrated movable micromechanical structures for sensors
and actuators. IEEE Trans. Electron Devices 35(6), 724–730 (1988)
14. Mehregany, M., Bart, S.F., Tavrow, L.S., Lang, J.H., Senturia, S.D., Schlecht, M.F.: A study
of three microfabricated variable-capacitance motors. Sens. Actuators A21(22/23), 173–179
(1990)
15. Sandia Ultra-planar Multi-level MEMS Technology (2020). https://www.sandia.gov/mesa/_
assets/documents/design_documents/SUMMiT_V_Dmanual.pdf
16. Kota, S., Ananthasuresh, G.K., Crary, S.B., Wise, K.D.: Design and fabrication of microelectromechanical systems. J. Mech. Des. 116(4), 1081–1088 (1994)