The Art and Signs of a Few Good Mechanical Designs in MEMS
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Fig. 28 Two-layered design of a compliant stage with DaCMs and compliant sliders. This design
has decoupled as well as amplified motion of the stage in x- and y-directions
Fig. 29 A single-layer planar design of Fig. 28 with 12 compliant sliders, four compliant sliders,
and two DaCMs. Here, the movement of the proof mass is amplified at the output points of DaCMs
to enhance the sensitivity and bandwidth of the accelerometer
because of DaCMs. It does not use 12 DaCMs; it uses only two. To compensate
for off-axis motion, it uses additional compliant sliders. As can be seen in Fig. 29,
it has 12 compliant sliders of one kind (marked 1 to 12), four compliant sliders of
another kind (marked i to iv), two DaCMs (marked A and B), and four electrostatic