Origami MEMS
233
38. Filipiak, D.J., Azam, A., Leong, T.G.: Hierarchical self-assembly of complex polyhedral
microcontainers. J. Micromech. Microeng. 075012, 1–6 (2009). https://doi.org/10.1088/09601317/19/7/075012
39. Forterre, Y., Dumais, J.: Generating helices in nature 333, 1715–1717 (2011)
40. Fu, H., Nan, K., Bai, W., et al.: Morphable 3D mesostructures and microelectronic devices
by multistable buckling mechanics. Nat. Mater. 17, 268–276 (2018). https://doi.org/10.1038/
s41563-017-0011-3
41. Ge, Q., Dunn, C.K., Qi, H.J., Dunn, M.L.: Active origami by 4D printing. Smart Mater. Struct.
23 (2014). https://doi.org/10.1088/0964-1726/23/9/094007
42. Ge, Q., Qi, H.J., Dunn, M.L.: Active materials by four-dimension printing. Appl. Phys. Lett.
103 (2013). https://doi.org/10.1063/1.4819837
43. George, D., Hernandez, E.A.P., Madou, M.: Origami fabrication using single layer
photolithography and capillary folding. In: Proceedings of the 7th International Workshop
on Nanotechnology and its Applications (2019a)
44. George, D., Madou, M., Hernandez, E.A.P, Lo, R.C.: Fabrication of polymer and carbon
polyhedra through controlled cross-linking and capillary deformations 9171–9177 (2019b).
https://doi.org/10.1039/c9sm01410a
45. Gracias, D.H., Kavthekar, V., Love, J.C., et al.: Fabrication of micrometer-scale, patterned
polyhedra by self-assembly. Adv. Mater. 14, 235–238 (2002). https://doi.org/10.1002/15214095(20020205)14:3%3c235:AID-ADMA235%3e3.0.CO;2-B
46. Gracias, D.H., Tien, J., Breen, T.L., et al.: Forming electrical networks in three dimensions
by self-assembly. Science (80-) 289, 1170–1172 (2000). https://doi.org/10.1126/science.289.
5482.1170
47. Guan, J., He, H., Hansford, D.J., Lee, L.J.: Self-folding of three-dimensional hydrogel
microstructures. J. Phys. Chem. B 109, 23134–23137 (2005). https://doi.org/10.1021/jp0
54341g
48. Gultepe, E., Randhawa, J.S., Kadam, S., et al.: Biopsy with thermally-responsive untethered
microtools. Adv. Mater. 25, 514–519 (2013). https://doi.org/10.1002/adma.201203348
49. Guo, L., Anderson, D.G., Langer, R.: Bio-Inspired polymer composite actuator and generator
driven by water gradients. Science (80-) 339, 9–12 (2012)
50. Guo, X., Li, H., Yeop Ahn, B., et al.: Two- and three-dimensional folding of thin film singlecrystalline silicon for photovoltaic power applications. Proc. Natl. Acad. Sci. 106, 20149–
20154 (2009). https://doi.org/10.1073/pnas.0907390106
51. Hauser, A.W., Evans, A.A., Na, J.H., Hayward, R.C.: Photothermally reprogrammable buckling of nanocomposite gel sheets. Angew. Chem. Int. Ed. 54, 5434–5437 (2015). https://doi.
org/10.1002/anie.201412160
52. Holmes, D.P., Roché, M., Sinha, T., Stone, H.A.: Bending and twisting of soft materials by
non-homogenous swelling. Soft Matter 7, 5188–5193 (2011). https://doi.org/10.1039/c0sm01
492c
53. Hong, F., Zhang, F., Liu, Y., Yan, H.: DNA Origami: Scaffolds for Creating Higher Order
Structures (2017)
54. Hu, G.F., Damanpack, A.R., Bodaghi, M., Liao, W.H.: (2017) Increasing dimension of structures by 4D printing shape memory polymers via fused deposition modeling. Smart Mater.
Struct. 26. https://doi.org/10.1088/1361-665X/aa95ec
55. Hu, L., Choi, J.W., Yang, Y., et al.: Highly conductive paper for energy-storage devices. Proc.
Natl. Acad. Sci. U.S.A. 106, 21490–21494 (2009). https://doi.org/10.1073/pnas.0908858106
56. Hu, W., Lum, G.Z., Mastrangeli, M., Sitti, M.: Small-scale soft-bodied robot with multimodal
locomotion. Nature 554, 81–85 (2018). https://doi.org/10.1038/nature25443
57. Huang, W., Koric, S., Yu, X., et al.: Precision structural engineering of self-rolled-up 3D
nanomembranes guided by transient quasi-static FEM modeling. Nano Lett. 14, 6293–6297
(2014). https://doi.org/10.1021/nl5026369
58. In, H.J., Kumar, S., Shao-Horn, Y., Barbastathis, G.: Origami fabrication of nanostructured,
three-dimensional devices: electrochemical capacitors with carbon electrodes. Appl. Phys.
Lett. 88, 6–9 (2006). https://doi.org/10.1063/1.2177639
233
38. Filipiak, D.J., Azam, A., Leong, T.G.: Hierarchical self-assembly of complex polyhedral
microcontainers. J. Micromech. Microeng. 075012, 1–6 (2009). https://doi.org/10.1088/09601317/19/7/075012
39. Forterre, Y., Dumais, J.: Generating helices in nature 333, 1715–1717 (2011)
40. Fu, H., Nan, K., Bai, W., et al.: Morphable 3D mesostructures and microelectronic devices
by multistable buckling mechanics. Nat. Mater. 17, 268–276 (2018). https://doi.org/10.1038/
s41563-017-0011-3
41. Ge, Q., Dunn, C.K., Qi, H.J., Dunn, M.L.: Active origami by 4D printing. Smart Mater. Struct.
23 (2014). https://doi.org/10.1088/0964-1726/23/9/094007
42. Ge, Q., Qi, H.J., Dunn, M.L.: Active materials by four-dimension printing. Appl. Phys. Lett.
103 (2013). https://doi.org/10.1063/1.4819837
43. George, D., Hernandez, E.A.P., Madou, M.: Origami fabrication using single layer
photolithography and capillary folding. In: Proceedings of the 7th International Workshop
on Nanotechnology and its Applications (2019a)
44. George, D., Madou, M., Hernandez, E.A.P, Lo, R.C.: Fabrication of polymer and carbon
polyhedra through controlled cross-linking and capillary deformations 9171–9177 (2019b).
https://doi.org/10.1039/c9sm01410a
45. Gracias, D.H., Kavthekar, V., Love, J.C., et al.: Fabrication of micrometer-scale, patterned
polyhedra by self-assembly. Adv. Mater. 14, 235–238 (2002). https://doi.org/10.1002/15214095(20020205)14:3%3c235:AID-ADMA235%3e3.0.CO;2-B
46. Gracias, D.H., Tien, J., Breen, T.L., et al.: Forming electrical networks in three dimensions
by self-assembly. Science (80-) 289, 1170–1172 (2000). https://doi.org/10.1126/science.289.
5482.1170
47. Guan, J., He, H., Hansford, D.J., Lee, L.J.: Self-folding of three-dimensional hydrogel
microstructures. J. Phys. Chem. B 109, 23134–23137 (2005). https://doi.org/10.1021/jp0
54341g
48. Gultepe, E., Randhawa, J.S., Kadam, S., et al.: Biopsy with thermally-responsive untethered
microtools. Adv. Mater. 25, 514–519 (2013). https://doi.org/10.1002/adma.201203348
49. Guo, L., Anderson, D.G., Langer, R.: Bio-Inspired polymer composite actuator and generator
driven by water gradients. Science (80-) 339, 9–12 (2012)
50. Guo, X., Li, H., Yeop Ahn, B., et al.: Two- and three-dimensional folding of thin film singlecrystalline silicon for photovoltaic power applications. Proc. Natl. Acad. Sci. 106, 20149–
20154 (2009). https://doi.org/10.1073/pnas.0907390106
51. Hauser, A.W., Evans, A.A., Na, J.H., Hayward, R.C.: Photothermally reprogrammable buckling of nanocomposite gel sheets. Angew. Chem. Int. Ed. 54, 5434–5437 (2015). https://doi.
org/10.1002/anie.201412160
52. Holmes, D.P., Roché, M., Sinha, T., Stone, H.A.: Bending and twisting of soft materials by
non-homogenous swelling. Soft Matter 7, 5188–5193 (2011). https://doi.org/10.1039/c0sm01
492c
53. Hong, F., Zhang, F., Liu, Y., Yan, H.: DNA Origami: Scaffolds for Creating Higher Order
Structures (2017)
54. Hu, G.F., Damanpack, A.R., Bodaghi, M., Liao, W.H.: (2017) Increasing dimension of structures by 4D printing shape memory polymers via fused deposition modeling. Smart Mater.
Struct. 26. https://doi.org/10.1088/1361-665X/aa95ec
55. Hu, L., Choi, J.W., Yang, Y., et al.: Highly conductive paper for energy-storage devices. Proc.
Natl. Acad. Sci. U.S.A. 106, 21490–21494 (2009). https://doi.org/10.1073/pnas.0908858106
56. Hu, W., Lum, G.Z., Mastrangeli, M., Sitti, M.: Small-scale soft-bodied robot with multimodal
locomotion. Nature 554, 81–85 (2018). https://doi.org/10.1038/nature25443
57. Huang, W., Koric, S., Yu, X., et al.: Precision structural engineering of self-rolled-up 3D
nanomembranes guided by transient quasi-static FEM modeling. Nano Lett. 14, 6293–6297
(2014). https://doi.org/10.1021/nl5026369
58. In, H.J., Kumar, S., Shao-Horn, Y., Barbastathis, G.: Origami fabrication of nanostructured,
three-dimensional devices: electrochemical capacitors with carbon electrodes. Appl. Phys.
Lett. 88, 6–9 (2006). https://doi.org/10.1063/1.2177639