Origami MEMS
207
Table 2
(continued)
Actuation mechanisms
Size of origami
Advantages and disadvantages
Reversible/Irreversible
[147]
[106]
[35]
[54]
[147] (Reproduced with permission. © IOP Publishing. All rights reserved) [35, 106] (Reproduced with permission. © IOP Publishing. All rights reserved)
[54] (Reproduced with permission. © IOP Publishing. All rights reserved) [31, 142, 144, 157]
Liquid crystal
~1 mm
Advantages
– Fast response
– Different triggers
Disadvantages
– Difficulty to microfabricate
Reversible
e.g.
[99]
[81]
[14]
[168]
[99] (Copyright 2018 by John Wiley & Sons, Inc. Reproduced by permission of John Wiley & Sons, Inc.) [14, 81] (Reprinted with permission from the Royal
Society of Chemistry) [168] (Reprinted with permission from the Royal Society of Chemistry) [86, 158]
(continued)
207
Table 2
(continued)
Actuation mechanisms
Size of origami
Advantages and disadvantages
Reversible/Irreversible
[147]
[106]
[35]
[54]
[147] (Reproduced with permission. © IOP Publishing. All rights reserved) [35, 106] (Reproduced with permission. © IOP Publishing. All rights reserved)
[54] (Reproduced with permission. © IOP Publishing. All rights reserved) [31, 142, 144, 157]
Liquid crystal
~1 mm
Advantages
– Fast response
– Different triggers
Disadvantages
– Difficulty to microfabricate
Reversible
e.g.
[99]
[81]
[14]
[168]
[99] (Copyright 2018 by John Wiley & Sons, Inc. Reproduced by permission of John Wiley & Sons, Inc.) [14, 81] (Reprinted with permission from the Royal
Society of Chemistry) [168] (Reprinted with permission from the Royal Society of Chemistry) [86, 158]
(continued)