1 Introduction to Laser Micro-to-Nano Manufacturing
63
be research hot topics. These fields should base on hybrid manufacturing which
may involve interdisciplinary techniques and disruptive concepts, such as near-field
manufacturing and super-resolution manufacturing. It is believed that these progress
may pave the way for science and technique evolution for post-Si and post-Moore’s
law and beyond.
Acknowledgements This book chapter is partially based on the lectures of Dr. Anming Hu
presented at the course of “introduction to micro-to-nanomanufacturing” at the University of
Tennessee Knoxville (UTK) for the period of 2014 to 2019. Some materials are modified from
the students’ presentations and course exercises. The contribution from all students is therefore
recognized. The authors are also grateful to Dr. Seungha Shin (UTK) for numerical simulation and
computation simulation, Dr. Jayne Wu (UTK) for ACEK mechanism, and Dr. Feng-yuan Zhang
(UTK) for the scaling theory. The cited research work was supported by numerical funds. These
supports are also sincerely grateful by the authors.
References
1. S. Lei, X. Zhao, X. Yu, A. Hu, S. Vukelic, M.B.G. Jun, H.-E. Joe, Y.L. Yao, Y.C. Shin. Ultrafast
laser applications in manufacturing processes: a state-of-the-art review. J. Manuf. Sci. Eng.
142 (2020)
2. Y. Yu, S. Bai, S. Wang, A. Hu, Ultra-short pulsed laser manufacturing and surface processing
of microdevices. Engineering 4, 779–786 (2018)
3. Y. Yu, S. Wang, D. Ma, P. Joshi, A. Hu, Recent progress on laser manufacturing of microsize
energy devices on flexible substrates. JOM 70, 1816–1822 (2018)
4. A. Hu, Interaction of nanosecond and femtosecond laser pulses with carbon: deposition of
carbon films having novel compositions. Thesis, UWSpace (2008)
5. A. Hu, P. Peng, H. Alarifi, X. Zhang, J. Guo, Y. Zhou, W. Duley, Femtosecond laser welded
nanostructures and plasmonic devices. J. Laser Appl. 24, 042001 (2012)
6. Y. Yu, Y. Deng, M.A. Al Hasan, Y. Bai, R.-Z. Li, S. Deng, P. Joshi, S. Shin, A. Hu. Femtosecond
laser-induced non-thermal welding for a single Cu nanowire glucose sensor. Nanoscale Adv.
2, 1195–1205 (2020)
7. D. Strickland, G. Mourou, Compression of amplified chirped optical pulses. Optics Commun.
56, 219–221 (1985)
8. M.F. Yanik, H. Cinar, H.N. Cinar, A.D. Chisholm, Y. Jin, A. Ben-Yakar, Functional
regeneration after laser axotomy. Nature 432, 822 (2004)
9. C. Momma, B.N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, H. Welling, B.
Wellegehausen, Short-pulse laser ablation of solid targets. Opt. Commun. 129, 134–142 (1996)
10. R. Srinivasan, E. Sutcliffe, B. Braren, Ablation and etching of polymethylmethacrylate by
very short (160 fs) ultraviolet (308 nm) laser pulses. Appl. Phys. Lett. 51, 1285–1287 (1987)
11. S. Küper, M. Stuke, Femtosecond UV excimer laser ablation. Appl. Phys. B 44, 199–204
(1987)
12. N. Bärsch, K. Körber, A. Ostendorf, K.H. Tönshoff, Ablation and cutting of planar silicon
devices using femtosecond laser pulses. Appl. Phys. A 77, 237–242 (2003)
13. S.S. Wellershoff, J. Hohlfeld, J. Güdde, E. Matthias, The role of electron–phonon coupling
in femtosecond laser damage of metals. Appl. Phys. A 69, S99–S107 (1999)
14. R.R. Gattass, E. Mazur, Femtosecond laser micromachining in transparent materials. Nat.
Photon. 2, 219–225 (2008)
15. K. Sugioka, Y. Cheng, Ultrafast lasers—reliable tools for advanced materials processing.
Light: Sci. Appl. 3, e149–e149 (2014)
63
be research hot topics. These fields should base on hybrid manufacturing which
may involve interdisciplinary techniques and disruptive concepts, such as near-field
manufacturing and super-resolution manufacturing. It is believed that these progress
may pave the way for science and technique evolution for post-Si and post-Moore’s
law and beyond.
Acknowledgements This book chapter is partially based on the lectures of Dr. Anming Hu
presented at the course of “introduction to micro-to-nanomanufacturing” at the University of
Tennessee Knoxville (UTK) for the period of 2014 to 2019. Some materials are modified from
the students’ presentations and course exercises. The contribution from all students is therefore
recognized. The authors are also grateful to Dr. Seungha Shin (UTK) for numerical simulation and
computation simulation, Dr. Jayne Wu (UTK) for ACEK mechanism, and Dr. Feng-yuan Zhang
(UTK) for the scaling theory. The cited research work was supported by numerical funds. These
supports are also sincerely grateful by the authors.
References
1. S. Lei, X. Zhao, X. Yu, A. Hu, S. Vukelic, M.B.G. Jun, H.-E. Joe, Y.L. Yao, Y.C. Shin. Ultrafast
laser applications in manufacturing processes: a state-of-the-art review. J. Manuf. Sci. Eng.
142 (2020)
2. Y. Yu, S. Bai, S. Wang, A. Hu, Ultra-short pulsed laser manufacturing and surface processing
of microdevices. Engineering 4, 779–786 (2018)
3. Y. Yu, S. Wang, D. Ma, P. Joshi, A. Hu, Recent progress on laser manufacturing of microsize
energy devices on flexible substrates. JOM 70, 1816–1822 (2018)
4. A. Hu, Interaction of nanosecond and femtosecond laser pulses with carbon: deposition of
carbon films having novel compositions. Thesis, UWSpace (2008)
5. A. Hu, P. Peng, H. Alarifi, X. Zhang, J. Guo, Y. Zhou, W. Duley, Femtosecond laser welded
nanostructures and plasmonic devices. J. Laser Appl. 24, 042001 (2012)
6. Y. Yu, Y. Deng, M.A. Al Hasan, Y. Bai, R.-Z. Li, S. Deng, P. Joshi, S. Shin, A. Hu. Femtosecond
laser-induced non-thermal welding for a single Cu nanowire glucose sensor. Nanoscale Adv.
2, 1195–1205 (2020)
7. D. Strickland, G. Mourou, Compression of amplified chirped optical pulses. Optics Commun.
56, 219–221 (1985)
8. M.F. Yanik, H. Cinar, H.N. Cinar, A.D. Chisholm, Y. Jin, A. Ben-Yakar, Functional
regeneration after laser axotomy. Nature 432, 822 (2004)
9. C. Momma, B.N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, H. Welling, B.
Wellegehausen, Short-pulse laser ablation of solid targets. Opt. Commun. 129, 134–142 (1996)
10. R. Srinivasan, E. Sutcliffe, B. Braren, Ablation and etching of polymethylmethacrylate by
very short (160 fs) ultraviolet (308 nm) laser pulses. Appl. Phys. Lett. 51, 1285–1287 (1987)
11. S. Küper, M. Stuke, Femtosecond UV excimer laser ablation. Appl. Phys. B 44, 199–204
(1987)
12. N. Bärsch, K. Körber, A. Ostendorf, K.H. Tönshoff, Ablation and cutting of planar silicon
devices using femtosecond laser pulses. Appl. Phys. A 77, 237–242 (2003)
13. S.S. Wellershoff, J. Hohlfeld, J. Güdde, E. Matthias, The role of electron–phonon coupling
in femtosecond laser damage of metals. Appl. Phys. A 69, S99–S107 (1999)
14. R.R. Gattass, E. Mazur, Femtosecond laser micromachining in transparent materials. Nat.
Photon. 2, 219–225 (2008)
15. K. Sugioka, Y. Cheng, Ultrafast lasers—reliable tools for advanced materials processing.
Light: Sci. Appl. 3, e149–e149 (2014)