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Lee, Three-dimensional silicon/carbon core-shell electrode as an anode material for lithium-ion
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29. X.-X. Tang, W. Liu, B.-Y. Ye, Y. Tang, Preparation of current collector with blind holes and
enhanced cycle performance of silicon-based anode. Trans. Nonferrous Met. Soc. China 23(6),
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30. P.H.L. Notten, F. Roozeboom, R.A.H. Niessen, L. Baggetto, 3-D integrated all-solid-state
rechargeable batteries. Adv. Mater. 19(24), 4564–4567 (2007)
31. R. Kohler, P. Smyrek, S. Ulrich, M. Bruns, V. Trouillet, W. Pfleging, Patterning and annealing
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32. J. Pröll, R. Kohler, M. Torge, S. Ulrich, C. Ziebert, M. Bruns, H.J. Seifert, W. Pfleging, Laser
microstructuring and annealing processes for lithium manganese oxide cathodes. Appl. Surf.
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33. J. Pröll, P.G. Weidler, R. Kohler, A. Mangang, S. Heissler, H.J. Seifert, W. Pfleging, Comparative
studies of laser annealing technique and furnace annealing by X-ray diffraction and Raman
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34. K.-Y. Oh, J.B. Siegel, L. Secondo, S.U. Kim, N.A. Samad, J. Qin, D. Anderson, K. Garikipati,
A. Knobloch, B.I. Epureanu, C.W. Monroe, A. Stefanopoulou, Rate dependence of swelling in
lithium-ion cells. J. Power Sources 267, 197–202 (2014). https://doi.org/10.1016/j.jpowsour.
2014.05.039
35. X. Su, Q.L. Wu, J.C. Li, X.C. Xiao, A. Lott, W.Q. Lu, B.W. Sheldon, J. Wu, Silicon-based
nanomaterials for Lithium-ion batteries: a review. Adv. Energy Mater. 4(1) (2014). https://doi.
org/10.1002/Aenm.201300882
36. D. Chen, S. Indris, M. Schulz, B. Gamer, R. Mönig, In situ scanning electron microscopy
on lithium-ion battery electrodes using an ionic liquid. J. Power Sources 196(15), 6382–6387
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37. T. Yoon, C.C. Nguyen, D.M. Seo, B.L. Lucht, Capacity fading mechanisms of silicon nanoparticle negative electrodes for lithium ion batteries. J. Electrochem. Soc. 162(12), A2325–A2330
(2015). https://doi.org/10.1149/2.0731512jes
38. H. Wu, Y. Cui, Designing nanostructured Si anodes for high energy lithium ion batteries. Nano
Today 7(5), 414–429 (2012). https://doi.org/10.1016/j.nantod.2012.08.004
39. A. Magasinski, B. Zdyrko, I. Kovalenko, B. Hertzberg, R. Burtovyy, C.F. Huebner, T.F. Fuller,
I. Luzinov, G. Yushin, Toward efficient binders for Li-ion battery si-based anodes: polyacrylic acid. ACS Appl. Mater. Interfaces 2(11), 3004–3010 (2010). https://doi.org/10.1021/
am100871y
40. C. Erk, T. Brezesinski, H. Sommer, R. Schneider, J. Janek, Toward silicon anodes for nextgeneration lithium ion batteries: a comparative performance study of various polymer binders
and silicon nanopowders. ACS Appl. Mater. Interfaces 5(15), 7299–7307 (2013). https://doi.
org/10.1021/am401642c
41. Y. Zheng, Z. An, P. Smyrek, H.J. Seifert, T. Kunze, V. Lang, A.F. Lasagni, W. Pfleging,
Direct laser interference patterning and ultrafast laser-induced micro/nano structuring of current
collectors for lithium-ion batteries. Proc. SPIE 9736, 1B1–1B7 (2016)
42. A.F. Lasagni, C. Gachot, K.E. Trinh, M. Hans, A. Rosenkranz, T. Roch, S. Eckhardt, T. Kunze,
M. Bieda, D. Günther, V. Lang, F. Mücklich, Direct laser interference patterning, 20 years of
development: from the basics to industrial applications. Proc. SPIE 10092, 11 (2017)
43. J.H. Klein-Wiele, P. Simon, Fabrication of periodic nanostructures by phase-controlled
multiple-beam interference. Appl. Phys. Lett. 83(23), 4707–4709 (2003). https://doi.org/10.
1063/1.1631746
44. W. Pfleging, R. Kohler, M. Torge, V. Trouillet, F. Danneil, M. Stüber, Control of wettability of
hydrogenated amorphous carbon thin films by laser-assisted micro- and nanostructuring. Appl.
Surf. Sci. 257(18), 7907–7912 (2011). https://doi.org/10.1016/j.apsusc.2011.02.126
45. A.Y. Vorobyev, C. Guo, Direct femtosecond laser surface nano/microstructuring and its
applications. Laser Photonics Rev. 7(3), 385–407 (2013). https://doi.org/10.1002/lpor.201
200017
W. Pfleging et al.
28. J.S. Kim, W. Pfleging, R. Kohler, H.J. Seifert, T.Y. Kim, D. Byun, H.G. Jung, W.C. Choi, J.K.
Lee, Three-dimensional silicon/carbon core-shell electrode as an anode material for lithium-ion
batteries. J. Power Sources 279, 13–20 (2015). https://doi.org/10.1016/j.jpowsour.2014.12.041
29. X.-X. Tang, W. Liu, B.-Y. Ye, Y. Tang, Preparation of current collector with blind holes and
enhanced cycle performance of silicon-based anode. Trans. Nonferrous Met. Soc. China 23(6),
1723–1727 (2013). https://doi.org/10.1016/S1003-6326(13)62654-0
30. P.H.L. Notten, F. Roozeboom, R.A.H. Niessen, L. Baggetto, 3-D integrated all-solid-state
rechargeable batteries. Adv. Mater. 19(24), 4564–4567 (2007)
31. R. Kohler, P. Smyrek, S. Ulrich, M. Bruns, V. Trouillet, W. Pfleging, Patterning and annealing
of nanocrystalline LiCoO 2 thin films. J. Optoelectron. Adv. Mater. 12(3), 547–552 (2010)
32. J. Pröll, R. Kohler, M. Torge, S. Ulrich, C. Ziebert, M. Bruns, H.J. Seifert, W. Pfleging, Laser
microstructuring and annealing processes for lithium manganese oxide cathodes. Appl. Surf.
Sci. 257, 9968–9976 (2011)
33. J. Pröll, P.G. Weidler, R. Kohler, A. Mangang, S. Heissler, H.J. Seifert, W. Pfleging, Comparative
studies of laser annealing technique and furnace annealing by X-ray diffraction and Raman
analysis of lithium manganese oxide thin films for lithium-ion batteries. Thin Solid Films 531,
160–171 (2013). https://doi.org/10.1016/j.tsf.2013.01.015
34. K.-Y. Oh, J.B. Siegel, L. Secondo, S.U. Kim, N.A. Samad, J. Qin, D. Anderson, K. Garikipati,
A. Knobloch, B.I. Epureanu, C.W. Monroe, A. Stefanopoulou, Rate dependence of swelling in
lithium-ion cells. J. Power Sources 267, 197–202 (2014). https://doi.org/10.1016/j.jpowsour.
2014.05.039
35. X. Su, Q.L. Wu, J.C. Li, X.C. Xiao, A. Lott, W.Q. Lu, B.W. Sheldon, J. Wu, Silicon-based
nanomaterials for Lithium-ion batteries: a review. Adv. Energy Mater. 4(1) (2014). https://doi.
org/10.1002/Aenm.201300882
36. D. Chen, S. Indris, M. Schulz, B. Gamer, R. Mönig, In situ scanning electron microscopy
on lithium-ion battery electrodes using an ionic liquid. J. Power Sources 196(15), 6382–6387
(2011). https://doi.org/10.1016/j.jpowsour.2011.04.009
37. T. Yoon, C.C. Nguyen, D.M. Seo, B.L. Lucht, Capacity fading mechanisms of silicon nanoparticle negative electrodes for lithium ion batteries. J. Electrochem. Soc. 162(12), A2325–A2330
(2015). https://doi.org/10.1149/2.0731512jes
38. H. Wu, Y. Cui, Designing nanostructured Si anodes for high energy lithium ion batteries. Nano
Today 7(5), 414–429 (2012). https://doi.org/10.1016/j.nantod.2012.08.004
39. A. Magasinski, B. Zdyrko, I. Kovalenko, B. Hertzberg, R. Burtovyy, C.F. Huebner, T.F. Fuller,
I. Luzinov, G. Yushin, Toward efficient binders for Li-ion battery si-based anodes: polyacrylic acid. ACS Appl. Mater. Interfaces 2(11), 3004–3010 (2010). https://doi.org/10.1021/
am100871y
40. C. Erk, T. Brezesinski, H. Sommer, R. Schneider, J. Janek, Toward silicon anodes for nextgeneration lithium ion batteries: a comparative performance study of various polymer binders
and silicon nanopowders. ACS Appl. Mater. Interfaces 5(15), 7299–7307 (2013). https://doi.
org/10.1021/am401642c
41. Y. Zheng, Z. An, P. Smyrek, H.J. Seifert, T. Kunze, V. Lang, A.F. Lasagni, W. Pfleging,
Direct laser interference patterning and ultrafast laser-induced micro/nano structuring of current
collectors for lithium-ion batteries. Proc. SPIE 9736, 1B1–1B7 (2016)
42. A.F. Lasagni, C. Gachot, K.E. Trinh, M. Hans, A. Rosenkranz, T. Roch, S. Eckhardt, T. Kunze,
M. Bieda, D. Günther, V. Lang, F. Mücklich, Direct laser interference patterning, 20 years of
development: from the basics to industrial applications. Proc. SPIE 10092, 11 (2017)
43. J.H. Klein-Wiele, P. Simon, Fabrication of periodic nanostructures by phase-controlled
multiple-beam interference. Appl. Phys. Lett. 83(23), 4707–4709 (2003). https://doi.org/10.
1063/1.1631746
44. W. Pfleging, R. Kohler, M. Torge, V. Trouillet, F. Danneil, M. Stüber, Control of wettability of
hydrogenated amorphous carbon thin films by laser-assisted micro- and nanostructuring. Appl.
Surf. Sci. 257(18), 7907–7912 (2011). https://doi.org/10.1016/j.apsusc.2011.02.126
45. A.Y. Vorobyev, C. Guo, Direct femtosecond laser surface nano/microstructuring and its
applications. Laser Photonics Rev. 7(3), 385–407 (2013). https://doi.org/10.1002/lpor.201
200017