224
G. Feng et al.
Fig. 7.11 SEM images of the frontside (left two columns) and backside (right two columns) microhole drilled by fs laser at temperature 300 K (a and h), 373 K (b and i), 473 K (c and j), 573 K
(d and k), 673 K (e and l), 773 K (f and m), 873 K (g and n) [26]
Fig. 7.12 Microstructures on the metal fabricated by using ultraviolet femtosecond laser interference technique [27]
has strong reproducibility and can be processed thousands of sub-micron holes in a
flash, so it has a good prospect in the industry.
In 2010, the ZhiZhan Xu group of the Shanghai Institute of Optics and Fine
Mechanics in Chinese Academy of Sciences fabricated micro-lens in the internal
of the fused silica by using femtosecond laser [28]. The sample was a 1 mm-thick
G. Feng et al.
Fig. 7.11 SEM images of the frontside (left two columns) and backside (right two columns) microhole drilled by fs laser at temperature 300 K (a and h), 373 K (b and i), 473 K (c and j), 573 K
(d and k), 673 K (e and l), 773 K (f and m), 873 K (g and n) [26]
Fig. 7.12 Microstructures on the metal fabricated by using ultraviolet femtosecond laser interference technique [27]
has strong reproducibility and can be processed thousands of sub-micron holes in a
flash, so it has a good prospect in the industry.
In 2010, the ZhiZhan Xu group of the Shanghai Institute of Optics and Fine
Mechanics in Chinese Academy of Sciences fabricated micro-lens in the internal
of the fused silica by using femtosecond laser [28]. The sample was a 1 mm-thick