130
I. Falcón Casas and W. Kautek
thermomechanical processes can contribute to various extents. Further research is
needed to advance apertureless scanning probe near-field optical lithography to a
better understanding and nanotechnological applicability.
References
1. E. Synge, Lond. Edinburgh Dublin Philos. Mag. J. Sci. 6, 356–362 (1928)
2. D.W. Pohl, W. Denk, M. Lanz, Appl. Phys. Lett. 44, 651–653 (1984)
3. A. Lewis, M. Isaacson, A. Harootunian, A. Muray, Ultramicroscopy 13, 227–231 (1984)
4. R.C. Dunn, Chem. Rev. 99, 2891–2927 (1999)
5. S. Kawata, in Near-Field Optics and Surface Plasmon Polaritons, ed. by S. Kawata (Springer,
Berlin Heidelberg, 2001)
6. S. Patanè, P.G. Gucciardi, M. Labardi, M. Allegrini, La Rivista del Nuovo Cimento 27, 1–46
(2004)
7. S. Kawata, V.M. Shalaev, Tip Enhancement (Elsevier, 2007)
8. L. Novotny, Progress in Optics, vol. 50 (Elsevier, 2007) Chap. 5, pp. 137-184
9. A. Hartschuh, Angew. Chem. Int. Ed. 47, 8178–8191 (2008)
10. J. Wessel, J. Opt. Soc. Am. B 2, 1538–1541 (1985)
11. H.J. Mamin, D. Rugar, Appl. Phys. Lett. 61, 1003–1005 (1992)
12. V. Likodimos, M. Labardi, L. Pardi, M. Allegrini, M. Giordano, A. Arena, S. Patanè, Appl.
Phys. Lett. 82, 3313–3315 (2003)
13. T. Yatsui , M. Ohtsu, in Progress in Nano-Electro-Optics I, Basics and Theory of Near-Field
Optics, ed. by M. Ohtsu (Springer, 2003), Chap. 1
14. S. Sun, G.J. Leggett, Nano Lett. 4, 1381–1384 (2004)
15. G. Wysocki, J. Heitz, D. Bäuerle, Appl. Phys. Lett. 84, 2025–2027 (2004)
16. Y. Lin, M.H. Hong, W.J. Wang, Y.Z. Law, T.C. Chong, Appl. Phys. A 80, 461–465 (2005)
17. S. Noach, M. Manevich, N.P. Eisenberg, E.P. Fokin, T.V. Mihalina, Nanotechnology 16, 775–
778 (2005)
18. W.J. Wang, R. Zhao, L.P. Shi, X.S. Miao, P.K. Tan, M.H. Hong, T.C. Chong, Y.H. Wu, Y. Lin,
J. Appl. Phys. 98, 124313 (2005)
19. G.J. Leggett, Nano Biotechnol. 3, 223–240 (2007)
20. S.-B. Wen, R. Greif, R.E. Russo, Appl. Phys. Lett. 91, 251113 (2007)
21. V. Zorba, X. Mao, R.E. Russo, Appl. Phys. Lett. 95, 041110 (2009)
22. D. Credgington, O. Fenwick, A. Charas, J. Morgado, K. Suhling, F. Cacialli, Adv. Funct. Mater.
20, 2842–2847 (2010)
23. E. Flaxer, M. Klebanov, V. Lyubin, M. Manevich, S. Noach, in Microscopy: Science, Technology, Applications and Education, vol. 3, ed. by A. Mendez-Vilas, J. Diaz (2010), pp. 2103–2110
24. Z. Liu, E. ul Haq, J.K. Hobbs, G.J. Leggett, Y. Zhang, J.M.R. Weaver, C.J. Roberts, Microelectron. Eng. 88, 2109–2112 (2011)
25. S. Sun, D.G. Thompson, D. Graham, G.J. Leggett, J. Mater. Chem. 21, 14173 (2011)
26. E. McLeod, A. Ozcan, J. Lab. Autom. 17, 248–254 (2012)
27. A.A. Kuchmizhak, Y.N. Kulchin, O.B. Vitrik, A.G. Savchuk, S.V. Makarov, S.I. Kudryashov,
A.A. Ionin, Opt. Commun. 308, 125–129 (2013)
28. S.M. Aghaei, N. Yasrebi, B. Rashidian, J. Nanomater. 2015, 1–7 (2015)
29. A.A. Tseng, Opt. Laser Technol. 39, 514–526 (2007)
30. L. Novotny, S.J. Stranick, Annu. Rev. Phys. Chem. 57, 303–331 (2006)
31. R. García, A.W. Knoll, E. Riedo, Nat. Nanotechnol. 9, 577–587 (2014)
32. D. Pires, J.L. Hedrick, A. De Silva, J. Frommer, B. Gotsmann, H. Wolf, M. Despont, U. Duerig,
A.W. Knoll, Science 328, 732–5 (2010)
33. P.C. Paul, A.W. Knoll, F. Holzner, M. Despont, U. Duerig, Nanotechnology 22, 275306 (2011)
I. Falcón Casas and W. Kautek
thermomechanical processes can contribute to various extents. Further research is
needed to advance apertureless scanning probe near-field optical lithography to a
better understanding and nanotechnological applicability.
References
1. E. Synge, Lond. Edinburgh Dublin Philos. Mag. J. Sci. 6, 356–362 (1928)
2. D.W. Pohl, W. Denk, M. Lanz, Appl. Phys. Lett. 44, 651–653 (1984)
3. A. Lewis, M. Isaacson, A. Harootunian, A. Muray, Ultramicroscopy 13, 227–231 (1984)
4. R.C. Dunn, Chem. Rev. 99, 2891–2927 (1999)
5. S. Kawata, in Near-Field Optics and Surface Plasmon Polaritons, ed. by S. Kawata (Springer,
Berlin Heidelberg, 2001)
6. S. Patanè, P.G. Gucciardi, M. Labardi, M. Allegrini, La Rivista del Nuovo Cimento 27, 1–46
(2004)
7. S. Kawata, V.M. Shalaev, Tip Enhancement (Elsevier, 2007)
8. L. Novotny, Progress in Optics, vol. 50 (Elsevier, 2007) Chap. 5, pp. 137-184
9. A. Hartschuh, Angew. Chem. Int. Ed. 47, 8178–8191 (2008)
10. J. Wessel, J. Opt. Soc. Am. B 2, 1538–1541 (1985)
11. H.J. Mamin, D. Rugar, Appl. Phys. Lett. 61, 1003–1005 (1992)
12. V. Likodimos, M. Labardi, L. Pardi, M. Allegrini, M. Giordano, A. Arena, S. Patanè, Appl.
Phys. Lett. 82, 3313–3315 (2003)
13. T. Yatsui , M. Ohtsu, in Progress in Nano-Electro-Optics I, Basics and Theory of Near-Field
Optics, ed. by M. Ohtsu (Springer, 2003), Chap. 1
14. S. Sun, G.J. Leggett, Nano Lett. 4, 1381–1384 (2004)
15. G. Wysocki, J. Heitz, D. Bäuerle, Appl. Phys. Lett. 84, 2025–2027 (2004)
16. Y. Lin, M.H. Hong, W.J. Wang, Y.Z. Law, T.C. Chong, Appl. Phys. A 80, 461–465 (2005)
17. S. Noach, M. Manevich, N.P. Eisenberg, E.P. Fokin, T.V. Mihalina, Nanotechnology 16, 775–
778 (2005)
18. W.J. Wang, R. Zhao, L.P. Shi, X.S. Miao, P.K. Tan, M.H. Hong, T.C. Chong, Y.H. Wu, Y. Lin,
J. Appl. Phys. 98, 124313 (2005)
19. G.J. Leggett, Nano Biotechnol. 3, 223–240 (2007)
20. S.-B. Wen, R. Greif, R.E. Russo, Appl. Phys. Lett. 91, 251113 (2007)
21. V. Zorba, X. Mao, R.E. Russo, Appl. Phys. Lett. 95, 041110 (2009)
22. D. Credgington, O. Fenwick, A. Charas, J. Morgado, K. Suhling, F. Cacialli, Adv. Funct. Mater.
20, 2842–2847 (2010)
23. E. Flaxer, M. Klebanov, V. Lyubin, M. Manevich, S. Noach, in Microscopy: Science, Technology, Applications and Education, vol. 3, ed. by A. Mendez-Vilas, J. Diaz (2010), pp. 2103–2110
24. Z. Liu, E. ul Haq, J.K. Hobbs, G.J. Leggett, Y. Zhang, J.M.R. Weaver, C.J. Roberts, Microelectron. Eng. 88, 2109–2112 (2011)
25. S. Sun, D.G. Thompson, D. Graham, G.J. Leggett, J. Mater. Chem. 21, 14173 (2011)
26. E. McLeod, A. Ozcan, J. Lab. Autom. 17, 248–254 (2012)
27. A.A. Kuchmizhak, Y.N. Kulchin, O.B. Vitrik, A.G. Savchuk, S.V. Makarov, S.I. Kudryashov,
A.A. Ionin, Opt. Commun. 308, 125–129 (2013)
28. S.M. Aghaei, N. Yasrebi, B. Rashidian, J. Nanomater. 2015, 1–7 (2015)
29. A.A. Tseng, Opt. Laser Technol. 39, 514–526 (2007)
30. L. Novotny, S.J. Stranick, Annu. Rev. Phys. Chem. 57, 303–331 (2006)
31. R. García, A.W. Knoll, E. Riedo, Nat. Nanotechnol. 9, 577–587 (2014)
32. D. Pires, J.L. Hedrick, A. De Silva, J. Frommer, B. Gotsmann, H. Wolf, M. Despont, U. Duerig,
A.W. Knoll, Science 328, 732–5 (2010)
33. P.C. Paul, A.W. Knoll, F. Holzner, M. Despont, U. Duerig, Nanotechnology 22, 275306 (2011)