1 Controlled and Localized Electrochemical Microfabrication …
15
18. Gomer, R.: Extensions of the field-emission fluctuation method for the determination of surface
diffusion coefficients. Appl. Phys. A 39, 1–8 (1986)
19. Chen, X., Qu, N., Li, H., Guo, Z.: Removal of islands from micro-dimple arrays prepared by
through-mask electrochemical micromachining. Precis. Eng. 39, 204–211 (2015)
20. Wang, Y., Zeng, Y., Qu, N., Zhu, D.: Fabrication of sub-micro spherical probes by liquid
membrane pulsed electrochemical etching. J. Mater. Process. Tech. 231, 171–178 (2016)
21. Wang, Y., Zeng, Y., Zhang, W.: Improving the machining efficiency of electrochemical
micromachining with oscillating workpiece. Int. J. Adv. Manuf. Technol. 102, 2695–2708
(2019)
22. Yuan, Y., Han, L., Huang, D., Su, J., Tian, Z., Tian, Z., Zhan, D.: Electrochemical
micromachining under mechanical motion mode. Electrochim. Acta 183, 3–7 (2015)
15
18. Gomer, R.: Extensions of the field-emission fluctuation method for the determination of surface
diffusion coefficients. Appl. Phys. A 39, 1–8 (1986)
19. Chen, X., Qu, N., Li, H., Guo, Z.: Removal of islands from micro-dimple arrays prepared by
through-mask electrochemical micromachining. Precis. Eng. 39, 204–211 (2015)
20. Wang, Y., Zeng, Y., Qu, N., Zhu, D.: Fabrication of sub-micro spherical probes by liquid
membrane pulsed electrochemical etching. J. Mater. Process. Tech. 231, 171–178 (2016)
21. Wang, Y., Zeng, Y., Zhang, W.: Improving the machining efficiency of electrochemical
micromachining with oscillating workpiece. Int. J. Adv. Manuf. Technol. 102, 2695–2708
(2019)
22. Yuan, Y., Han, L., Huang, D., Su, J., Tian, Z., Tian, Z., Zhan, D.: Electrochemical
micromachining under mechanical motion mode. Electrochim. Acta 183, 3–7 (2015)