14
Y. Wang and Y. Zeng
the controlled profile and precision could be fabricated by EMM potentially. Preliminary experiments also demonstrated the possibility of high-aspect-ratio processing
by layer-by-layer EMM with moving spherical tip as the tool electrode.
Acknowledgements This work was supported by the National Natural Science Foundation of
China (51905525), the Zhejiang Provincial Natural Science Foundation (LQ19E050003), and the
Natural Science Foundation of Ningbo (2019A610152).
References
1. Ghoshal, B., Bhattacharyya, B.: Shape control in micro borehole generation by EMM with the
assistance of vibration of tool. Precis. Eng. 38(1), 127–317 (2014)
2. Schuster, R., Kirchner, V., Allongue, P., Ertl, G.: Electrochemical micromachining. Science
289(5476), 98–101 (2000)
3. Li, Y., Maynor, B.W., Liu, J.: Electrochemical AFM “Dip-Pen” Nanolithography. J. Am. Chem.
Soc. 123(9), 2105–2106 (2001)
4. Xie, Z.X., Kolb, D.M.: Spatially confined copper dissolution by an STM tip: a new type of
electrochemical reaction. J. Electroanal. Chem. 481(2), 177–182 (2000)
5. Sheffer, M., Mandler, D.: Scanning electrochemical imprinting: a tool for surface patterning.
J. Electrochem. Soc. 155(3), D203–D208 (2008)
6. Abril, O., Gündel, A., Maroun, F., Allongue, P., Schuster, R.: Single-step electrochemical
nanolithography of metal thin films by localized etching with an AFM tip. Nanotechnology
19(32), 325301 (2008)
7. Hu, J., Yu, M.F.: Meniscus-confined three-dimensional electrodeposition for direct writing of
wire bonds. Science 329(5989), 313–316 (2010)
8. Lai, L.J., Zhou, H., Du, Y.J., Zhang, J., Jia, J.C., Jiang, L.M., Zhu, L.M., Tian, Z.W., Tian,
Z.Q., Zhan, D.P.: High precision electrochemical micromachining based on confined etchant
layer technique. Electrochem. Commun. 28, 135–138 (2013)
9. Schuster, R., Kirchner, V., Xia, X.H., Bittner, A.M., Ertl, G.: Nanoscale electrochemistry. Phys.
Rev. Lett. 80, 5599–5602 (1998)
10. Xie, X.H., Chung, H.J., Sow, C.H., Wee, A.T.S.: Nanoscale materials patterning and engineering
by atomic force microscopy nanolithography. Mat. Sci. Eng. 54(1–2), 1–48 (2006)
11. Garcia, R., Martinez, R.V., Martinez, J.: Nano-chemistry and scanning probe nanolithographies.
Chem. Soc. Rev. 35(1), 29–38 (2006)
12. Jiang, L.M., Du, Y.J., Jia, J., Lai, L.J., Zhou, H., Zhu, L.M., Tian, Z.W., Tian, Z.Q., Zhan, D.:
Three dimensional micromachining on aluminum surface by electrochemical wet stamping
technique. Electrochem. Commun. 33, 119–122 (2013)
13. Zhan, D., Han, L., Zhang, J., Shi, K., Zhou, J., Tian, Z.: Confined chemical etching for electrochemical machining with nanoscale accuracy. Accounts. Chem. Res. 49(11), 2596–2604
(2016)
14. Zhang, L., Zhang, J., Yuan, D., Han, L., Zhou, J., Tian, Z., Tian, Z., Zhan, D.: Electrochemical nanoimprint lithography directly on n-type crystalline silicon (111) wafer. Electrochem.
Commun. 75, 1–4 (2017)
15. Kock, M., Kirchner, V., Schuster, R.: Electrochemical micromachining with ultrashort voltage
pulses-a versatile method with lithographical precision. Electrochim. Acta 48(20), 3213–3219
(2003)
16. Bi, X., Zeng, Y., Qu, N.: Wire electrochemical micromachining of high-quality pure-nickel
microstructures focusing on different machining indicators. Precis. Eng. 61, 14–22 (2019)
17. Ma, X., Schuster, R.: Locally enhanced cathodoluminescence of electrochemically fabricated
gold nanostructures. J. Electroanal. Chem. 662(1), 12–16 (2011)
Y. Wang and Y. Zeng
the controlled profile and precision could be fabricated by EMM potentially. Preliminary experiments also demonstrated the possibility of high-aspect-ratio processing
by layer-by-layer EMM with moving spherical tip as the tool electrode.
Acknowledgements This work was supported by the National Natural Science Foundation of
China (51905525), the Zhejiang Provincial Natural Science Foundation (LQ19E050003), and the
Natural Science Foundation of Ningbo (2019A610152).
References
1. Ghoshal, B., Bhattacharyya, B.: Shape control in micro borehole generation by EMM with the
assistance of vibration of tool. Precis. Eng. 38(1), 127–317 (2014)
2. Schuster, R., Kirchner, V., Allongue, P., Ertl, G.: Electrochemical micromachining. Science
289(5476), 98–101 (2000)
3. Li, Y., Maynor, B.W., Liu, J.: Electrochemical AFM “Dip-Pen” Nanolithography. J. Am. Chem.
Soc. 123(9), 2105–2106 (2001)
4. Xie, Z.X., Kolb, D.M.: Spatially confined copper dissolution by an STM tip: a new type of
electrochemical reaction. J. Electroanal. Chem. 481(2), 177–182 (2000)
5. Sheffer, M., Mandler, D.: Scanning electrochemical imprinting: a tool for surface patterning.
J. Electrochem. Soc. 155(3), D203–D208 (2008)
6. Abril, O., Gündel, A., Maroun, F., Allongue, P., Schuster, R.: Single-step electrochemical
nanolithography of metal thin films by localized etching with an AFM tip. Nanotechnology
19(32), 325301 (2008)
7. Hu, J., Yu, M.F.: Meniscus-confined three-dimensional electrodeposition for direct writing of
wire bonds. Science 329(5989), 313–316 (2010)
8. Lai, L.J., Zhou, H., Du, Y.J., Zhang, J., Jia, J.C., Jiang, L.M., Zhu, L.M., Tian, Z.W., Tian,
Z.Q., Zhan, D.P.: High precision electrochemical micromachining based on confined etchant
layer technique. Electrochem. Commun. 28, 135–138 (2013)
9. Schuster, R., Kirchner, V., Xia, X.H., Bittner, A.M., Ertl, G.: Nanoscale electrochemistry. Phys.
Rev. Lett. 80, 5599–5602 (1998)
10. Xie, X.H., Chung, H.J., Sow, C.H., Wee, A.T.S.: Nanoscale materials patterning and engineering
by atomic force microscopy nanolithography. Mat. Sci. Eng. 54(1–2), 1–48 (2006)
11. Garcia, R., Martinez, R.V., Martinez, J.: Nano-chemistry and scanning probe nanolithographies.
Chem. Soc. Rev. 35(1), 29–38 (2006)
12. Jiang, L.M., Du, Y.J., Jia, J., Lai, L.J., Zhou, H., Zhu, L.M., Tian, Z.W., Tian, Z.Q., Zhan, D.:
Three dimensional micromachining on aluminum surface by electrochemical wet stamping
technique. Electrochem. Commun. 33, 119–122 (2013)
13. Zhan, D., Han, L., Zhang, J., Shi, K., Zhou, J., Tian, Z.: Confined chemical etching for electrochemical machining with nanoscale accuracy. Accounts. Chem. Res. 49(11), 2596–2604
(2016)
14. Zhang, L., Zhang, J., Yuan, D., Han, L., Zhou, J., Tian, Z., Tian, Z., Zhan, D.: Electrochemical nanoimprint lithography directly on n-type crystalline silicon (111) wafer. Electrochem.
Commun. 75, 1–4 (2017)
15. Kock, M., Kirchner, V., Schuster, R.: Electrochemical micromachining with ultrashort voltage
pulses-a versatile method with lithographical precision. Electrochim. Acta 48(20), 3213–3219
(2003)
16. Bi, X., Zeng, Y., Qu, N.: Wire electrochemical micromachining of high-quality pure-nickel
microstructures focusing on different machining indicators. Precis. Eng. 61, 14–22 (2019)
17. Ma, X., Schuster, R.: Locally enhanced cathodoluminescence of electrochemically fabricated
gold nanostructures. J. Electroanal. Chem. 662(1), 12–16 (2011)