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Y. Wang and Y. Zeng
Fig. 1.7 a, b Two-dimensional AFM image of the fabricated microchannels with the programmed
shape by EMM while using the moving spherical tip as the tool electrode, c, d The corresponding
cross-sectional profiles of the microchannels
1.3.4 Fabrication of High Aspect Ratio Microchannels
To fabricate microchannels with higher depth, layer-by-layer EMM has been studied,
as illustrated in Fig. 1.8a. The aspect ratio has been specified as the ratio between the
Fig. 1.8 Schematic illustration of layer-by-layer EMM with moving spherical tip as the tool
electrode, b Two-dimensional AFM image of the fabricated high aspect ratio microchannel,
c Cross-sectional profile of the microchannels
Y. Wang and Y. Zeng
Fig. 1.7 a, b Two-dimensional AFM image of the fabricated microchannels with the programmed
shape by EMM while using the moving spherical tip as the tool electrode, c, d The corresponding
cross-sectional profiles of the microchannels
1.3.4 Fabrication of High Aspect Ratio Microchannels
To fabricate microchannels with higher depth, layer-by-layer EMM has been studied,
as illustrated in Fig. 1.8a. The aspect ratio has been specified as the ratio between the
Fig. 1.8 Schematic illustration of layer-by-layer EMM with moving spherical tip as the tool
electrode, b Two-dimensional AFM image of the fabricated high aspect ratio microchannel,
c Cross-sectional profile of the microchannels