508
P. Joshi et al.
Joshi P, Kumar S, Jain VK, Akhtar J, Singh J (2019) Distributed MEMS mass-sensor based on piezoelectric resonant micro-cantilevers. J Microelectromech Syst. https://doi.org/10.1109/JMEMS.
2019.2908879
Jou JH, Han M-Y, Cheng D-J (1992) Substrate dependent internal stress in sputtered zinc oxide
thin films. J Appl Phys 71:4333
Karthikeyan B, Pandiyarajan T, Mangalaraj RV (2016) Enhanced blue light emission in transparent
ZnO: PVA nanocomposite free standing polymer films. Spectrochim Acta A 152:485
Krupanidhi SB, Sayer M (1984) Position and pressure effects in RF magnetron reactive sputter
deposition of piezoelectric zinc oxide. J Appl Phys 56:3308
Kunj S, Sreenivas K (2016) Residual stress and defect content in magnetron sputtered ZnO films
grown on unheated glass substrates. Curr Appl Phys 16:748
Laidani N, Capelletti R, Elena M, Guzman L, Mariotto G, Miotello A, Ossi PM (1993) Spectroscopic
characterization of thermally treated carbon-rich Si1–xCx films. Thin Sol Films 223:114
Li YF, Yao B, Lu YM, Cong CX, Zhang ZZ, Gai YQ, Zheng CJ, Li BH, Wei ZP, Shen DZ, Fan XW,
Xiao L, Xu SC, Liu Y (2007) Characterization of biaxial stress and its effect on optical properties
of ZnO thin films. Appl Phys Lett 91:021915
Loebl HP, Klee M, Metzmacher C, Brand W, Milsom R, Lok P (2003) Piezoelectric thin AlN films
for bulk acoustic wave (BAW) resonators. Mat Chem Phys 79:143
Maniv S, Westwood WD, Colombini E (1982) Pressure and angle of incidence effects in reactive
planar magnetron sputtered ZnO layers. J Vac Sci Technol 20:162
Mass J, Bhattacharya P, Katiyar RS (2003) Effect of high substrate temperature on Al-doped ZnO
thin films grown by pulsed laser deposition. Mater Sci Eng B 103:9
McCluskey MD, Jokela SJ (2009) Defects in ZnO. J Appl Phys 106:071101
Menon R, Sreenivas K, Gupta V (2008) Influence of stress on the structural and dielectric properties
of RF magnetron sputtered zinc oxide thin film. J Appl Phys 103:094903
Menon R, Gupta V, Tan HH, Sreenivas K, Jagadish C (2011) Origin of stress in radio frequency
magnetron sputtered zinc oxide thin films. J Appl Phys 109:064905
Mohanty BC, Jo YH, Yeon DH, Choi IJ, Choa YS (2009) Stress-induced anomalous shift of optical
band gap in ZnO: Al thin films. Appl Phys Lett 95:062103
Ondo-Ndong R, Ferblantier G, Kalfioui MA, Boyer A, Foucaran A (2003) Properties of RF
magnetron sputtered zinc oxide thin films. J Cryst Growth 255:130
Orikasa Y, Hayashi N, Muranaka S (2008) Effects of oxygen gas pressure on structural, electrical,
and thermoelectric properties of (ZnO)3In2O3 thin films deposited by RF magnetron sputtering.
J Appl Phys 103:113703
Ozgur U, Alivov YI, Liu C, Teke A, Reshchikov MA, Dogan S, Avrutin V, Cho SJ, Morkoç H
(2005) A comprehensive review of ZnO materials and devices. J Appl Phys 98:041301
Ping Y, Pei L, Li-Qiang Z, Xiao-Liang W, Huan W, Xi-Fu S, Fang-Wei X (2012) Uniaxial stress
influence on lattice, band gap and optical properties of n-type ZnO: first-principles calculations.
Chin Phys B 21:016803
Rao TP, Kumar MCS, Angayarkanni SA, Ashok M (2009) Effect of stress on optical band gap of
ZnO thin films with substrate temperature by spray pyrolysis. J Alloy Comp 485:413
Rieger W, Metzger T, Angerer H, Dimitrov R, Ambacher O, Stutzmann M (1996) Influence of
substrate-induced biaxial compressive stress on the optical properties of thin GaN films. Appl
Phys Lett 68:970
Shan W, Hauenstein RJ, Fischer AJ, Song JJ, Perry WG, Bremser MD, Davis RF, Goldenberg
B (1996) Strain effects on excitonic transitions in GaN: deformation potentials. Phys Rev B
54:13460
Singh P, Kumar A, Deepak DK (2007b) Growth and characterization of ZnO nanocrystalline thin
films and nanopowder via low-cost ultrasonic spray pyrolysis. J Cryst Growth 306:303
Singh R, Kumar M, Chandra S (2007a) Growth and characterization of high resistivity C-axis
oriented ZnO films on different substrates by RF magnetron sputtering for MEMS applications.
J Mater Sci 42:4675
P. Joshi et al.
Joshi P, Kumar S, Jain VK, Akhtar J, Singh J (2019) Distributed MEMS mass-sensor based on piezoelectric resonant micro-cantilevers. J Microelectromech Syst. https://doi.org/10.1109/JMEMS.
2019.2908879
Jou JH, Han M-Y, Cheng D-J (1992) Substrate dependent internal stress in sputtered zinc oxide
thin films. J Appl Phys 71:4333
Karthikeyan B, Pandiyarajan T, Mangalaraj RV (2016) Enhanced blue light emission in transparent
ZnO: PVA nanocomposite free standing polymer films. Spectrochim Acta A 152:485
Krupanidhi SB, Sayer M (1984) Position and pressure effects in RF magnetron reactive sputter
deposition of piezoelectric zinc oxide. J Appl Phys 56:3308
Kunj S, Sreenivas K (2016) Residual stress and defect content in magnetron sputtered ZnO films
grown on unheated glass substrates. Curr Appl Phys 16:748
Laidani N, Capelletti R, Elena M, Guzman L, Mariotto G, Miotello A, Ossi PM (1993) Spectroscopic
characterization of thermally treated carbon-rich Si1–xCx films. Thin Sol Films 223:114
Li YF, Yao B, Lu YM, Cong CX, Zhang ZZ, Gai YQ, Zheng CJ, Li BH, Wei ZP, Shen DZ, Fan XW,
Xiao L, Xu SC, Liu Y (2007) Characterization of biaxial stress and its effect on optical properties
of ZnO thin films. Appl Phys Lett 91:021915
Loebl HP, Klee M, Metzmacher C, Brand W, Milsom R, Lok P (2003) Piezoelectric thin AlN films
for bulk acoustic wave (BAW) resonators. Mat Chem Phys 79:143
Maniv S, Westwood WD, Colombini E (1982) Pressure and angle of incidence effects in reactive
planar magnetron sputtered ZnO layers. J Vac Sci Technol 20:162
Mass J, Bhattacharya P, Katiyar RS (2003) Effect of high substrate temperature on Al-doped ZnO
thin films grown by pulsed laser deposition. Mater Sci Eng B 103:9
McCluskey MD, Jokela SJ (2009) Defects in ZnO. J Appl Phys 106:071101
Menon R, Sreenivas K, Gupta V (2008) Influence of stress on the structural and dielectric properties
of RF magnetron sputtered zinc oxide thin film. J Appl Phys 103:094903
Menon R, Gupta V, Tan HH, Sreenivas K, Jagadish C (2011) Origin of stress in radio frequency
magnetron sputtered zinc oxide thin films. J Appl Phys 109:064905
Mohanty BC, Jo YH, Yeon DH, Choi IJ, Choa YS (2009) Stress-induced anomalous shift of optical
band gap in ZnO: Al thin films. Appl Phys Lett 95:062103
Ondo-Ndong R, Ferblantier G, Kalfioui MA, Boyer A, Foucaran A (2003) Properties of RF
magnetron sputtered zinc oxide thin films. J Cryst Growth 255:130
Orikasa Y, Hayashi N, Muranaka S (2008) Effects of oxygen gas pressure on structural, electrical,
and thermoelectric properties of (ZnO)3In2O3 thin films deposited by RF magnetron sputtering.
J Appl Phys 103:113703
Ozgur U, Alivov YI, Liu C, Teke A, Reshchikov MA, Dogan S, Avrutin V, Cho SJ, Morkoç H
(2005) A comprehensive review of ZnO materials and devices. J Appl Phys 98:041301
Ping Y, Pei L, Li-Qiang Z, Xiao-Liang W, Huan W, Xi-Fu S, Fang-Wei X (2012) Uniaxial stress
influence on lattice, band gap and optical properties of n-type ZnO: first-principles calculations.
Chin Phys B 21:016803
Rao TP, Kumar MCS, Angayarkanni SA, Ashok M (2009) Effect of stress on optical band gap of
ZnO thin films with substrate temperature by spray pyrolysis. J Alloy Comp 485:413
Rieger W, Metzger T, Angerer H, Dimitrov R, Ambacher O, Stutzmann M (1996) Influence of
substrate-induced biaxial compressive stress on the optical properties of thin GaN films. Appl
Phys Lett 68:970
Shan W, Hauenstein RJ, Fischer AJ, Song JJ, Perry WG, Bremser MD, Davis RF, Goldenberg
B (1996) Strain effects on excitonic transitions in GaN: deformation potentials. Phys Rev B
54:13460
Singh P, Kumar A, Deepak DK (2007b) Growth and characterization of ZnO nanocrystalline thin
films and nanopowder via low-cost ultrasonic spray pyrolysis. J Cryst Growth 306:303
Singh R, Kumar M, Chandra S (2007a) Growth and characterization of high resistivity C-axis
oriented ZnO films on different substrates by RF magnetron sputtering for MEMS applications.
J Mater Sci 42:4675